Toshiba and NuFlare Awarded the 59th Okochi Memorial Grand Production Prize

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posted:2/13/2013
language:Japanese
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Description: TOKYO--(BUSINESS WIRE)--Toshiba Corporation (Toshiba) (TOKYO:6502) and NuFlare Technology, Inc. (NFT) (JASDAQ:6256) have been awarded The 59th Okochi Memorial Grand Production Prize for their joint development and practical application of electron beam (EB) mask writers. The award ceremony will take place in Tokyo on March 22. LSI circuits are fabricated by using lithography tools to project and shrink master circuit patterns onto wafers. The master circuit patterns are first written on masks by a style='fon
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