Focus Center Research Program _FCRP_

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					An Industry Perspective on University Research
                  Relations



                  Marie Burnham
                 External Research
                   Motorola, SPS




                                                              marie.burnham@motorola.com

                          SWEEDA WORKSHOP Sedona, AZ
               External Research Group, Marie Burnham   16Nov01
                                                                       RESEARCH
University/Industry Value:
                                                NETWORKING                   RELATIONSHIPS


                                                                       STUDENTS



  I.    SIA driven university research organizations:
         SRC/MARCO
  II.   Motorola Intern Program
  III. IP and us



                               SWEEDA WORKSHOP Sedona, AZ
                    External Research Group, Marie Burnham   16Nov01
U.S. Semiconductor Industry
                  Consortia Partners



     SIA
     1977
                                                                      SRC        FCRP
  Tax, Trade &                                                        1982        1997
  Technology Policy
                                                                     Research & Education
                                 SEMATECH
                                   1987
                      Development & Infrastructure



                             SWEEDA WORKSHOP Sedona, AZ
                  External Research Group, Marie Burnham   16Nov01
                   SIA/SRC/iSEMATECH/SISA/FCRP Membership
     * SRC Science Area Members
    ** SRC Affiliate Member
   *** SRC US Gov't Participant                                    **Coventor
  **** SRC Strategic Industry Partners           Eastman Kodak     **ISE                         **Torrex
 ***** SRC Associate Member                      UMC               **Mission Research            **Ziptronix
****** SRC Adjunct Member                        Charter           **PDF Solutions              ***NIST
                                      *Axcelis                     **SILVACO                    ***NSF
                                    *Cadence                       **Tessera, Inc              ****ISMT
                                *Mentor Graphics                   **Testchip Technologies     ****SEMI
                             *Shipley                                                          ****SIA *
                            *Synopsys                                                          ****SISA
                           *Ultratech Stepper                                                 *****MITRE Corporation
                          **Numerical Technologies                                           ******Compaq              SRC
                                                        ***DARPA           SIA
            SISA
                                                              LSI Logic        Advanced Micro Devices        Hewlett-Packard
           87
                               *Novellus                      National         Agere Systems
           Others
                                                                               Conexant Systems
                                                                               IBM Corporation
                  FCRP                                                         Intel Corporation
                 Air Products
                                                                               Motorola
                                                                               Texas Instruments
                                                                                                                        ISMT
                 Applied Materials
                                                                                                                                     Hyundai
                 KLA-Tencor
                                                                                                                       Infineon Technologies
                 SCP Global Tech.
                                                                                                                                      Phillips
                 SpeedFam/IPEC                                                  Micron                                     STMicroelectronics
                 Teradyne                                  Agilent Technologies                                                        TSMC
                 Veriflo                                   Analog Devices
                                                           Cypress Semiconductor
                                                           Xilinx

                                                                               Intersil

                                                                                                            Last Update: 10/5/2001
             The
             a tax-free and not-for-profit arm of the SIA
            • MISSION: Helps solve North American semiconductor industry’s technical
            challenges with long-range (3-8yr) university research.
            • CHARTER: Manage the research done by graduate students for a consortia of
            12 full and 23 partial membership companies and government agencies.
            • STRATEGY: Provide a framework to make decisions by the SRC management,
            and full-member company management (BoD, SACCs and TABs), and being
            responsive to the ITRS formed by the SIA.


                  Lexico                                                  The Numbers ( most are approximate )
• SIA :           n
               Semiconductor Industry Association
                                                                  • The SRC funded > $30M of fellowships, grants,
• ITRS:        International Technology Roadmap for
               Semiconductors                                     contracts, and projects in 2001
•   BoD:       Board of Directors
                                                                  • Motorola has hired almost 160 SRC advanced
•   ETAB:      Executive Technical Advisory Board
•   SACC:      Science Area Coordinating Committee                degree engineers/scientists from ‘89-present.
•   TAB:       Technical Advisory Board                           • The Motorola SRC team is > 90 technologists.
•   FCRP:      Focus Center Research Program (for
               longer term research > 8yrs)                       • 850 students supervised by 230 profs on 300
• MARCO        Microelectronics Advanced Research                 research tasks at 72 univ’s in US, Taiwan, Ca, and
               COrporation started 2 FCRPs in 1998:
                                                                  Germany
               Interconnects and Design and Test
• ISMT         International Sematech


                                                SWEEDA WORKSHOP Sedona, AZ
                                     External Research Group, Marie Burnham   16Nov01
                              Motorola SRC Science Area Organization
                                            BoD: Sherry Gillespie
                                            ETAB: Marie Burnham, Cotton Hance
    Synthesis and      Test and       Logic and Physical
                                                                                    Circuit Design              Systems Design
     Verification     Testability           Design
                                                                                    Andrew Martin              Gordon McGregor
     Carl Pixley     Magdy Abadir     Pat McGuinness
                                     Pradipto Mukherjee

       Computer-Aided Design                           Interconnect Systems
                                                                                                 Integrated Circuit
      and Test Sciences (CADTS)                                                               Systems Sciences (ICSS)
                    Bill Read                                                                   Chris Chun, Dave Cave

                                 Cross-disciplinary Semiconductor Research (CSR)


         Material and Process                                                                    Nanostructures and
           Sciences (MPS)                           Modeling and Simulation                   Integration Sciences (NIS)
               Clarence Tracy                                                                            Gari Harris
     Environment, Safety                                                        Packaging and                  Advanced Devices
      and Health (ESH)                    Patterning
                                                                            Interconnect Systems             and Technologies (ADT)
Victor Vartanian, H-A Hwang         Lloyd Litt, Scott Hector
                                                                         Darrel Frear, Andrew Mawer        Bruce White, Rainer Thoma

            Front End                            Back End                                              Factory Systems
         Processes (FEP)                      Processes (BEP)                                        Shekar Krishnaswami
   Clarence Tracy, Hsing Tseng           Brad Melnick, Peter Ventzek

                                                      SWEEDA WORKSHOP Sedona, AZ
                                           External Research Group, Marie Burnham   16Nov01
SRC’s Role
                     National                                                    Other
                      Labs                                                      Consortia
                                   SRC Concurrently                         Govt.
            Research
                                                                           Agencies
           Institutions
                                   Managed Phases
    Universities                                                  Industry

                                Planning Phase
                                                                SRC
  Research                      Initiation Phase            Participants
Organizations
                   Performance & Evaluation Phase

                           Tech Transfer Phase

         Relevantly Educated                  Advanced Enabling
         Scientific Workforce                   Technologies



                          Increased Competitiveness
                                  for Industry
Research Selection and
Funding Process

    Member-driven creation of needs document
    Request and submission of white papers
    Member review and selection of proposals to seek
    Request for proposals
    Member review and selection of proposals to fund
    Internal SRC Research Management Committee
     review
      Only Excellent Proposals are funded
  Three-year contract start (Typical)
  Annual member reviews of progress
  Submission of reports and “deliverables” by
   researchers
2001 SRC University Survey
Results to date.
70 of 75 university researchers said SRC was
  sponsor of choice
 SRC is responsive
 (+) Detailed involvement of industry
 (+) Attention to the students
 (-) Funding amounts are too small
 (-) Administrative overhead is too larger
 (-) Want more liaison involvement

                         SWEEDA WORKSHOP Sedona, AZ
              External Research Group, Marie Burnham   16Nov01
Summary Results of SRC ETAB
  Summer Study (june, 2001)
New Research Areas (prioritized):
– Optoelectronics: chip-to-chip, integration with
electronics.
– Embedded Software: must be research.
– Ultra low power heterogeneous system
integration.
– Low cost, high throughput, maskless
patterning for VLSI.




                       SWEEDA WORKSHOP Sedona, AZ
            External Research Group, Marie Burnham   16Nov01
Semiconductor Research Timeline
                              98                    01                      04                    07                  10            13
            $                      Industry
                                   • Largely company                                                                  Reduced funding
                                     specific
                                   • Product emphasis                                                                      and
                                                        SEMATECH &
                                                         SUPPLIERS
Increasing Cost of Research




                                                                                                                       less publically
                                                        • Largely tool specific
                                                        • Industry                                                        available
                                                          manufacturing
                                                          standards
                                                        • manufacturing path
                                                          to commercialization         SRC
                                                                                  • Company specified
                                                                                    research
                                                                                  • Student emphasis
                                                                                  • Emphasize
                                                                                    technology transfer                    $175,000,000
                                                                                  • Company funded INDUSTRIAL LABS
                                                                                                        • Bell Labs
                                                                                                                           • Focus Centers ($40-60M)
                                                                                                        • IBM Research     • Nanoelectronics($85M of
                                        Development                                                     • GE Research      $.5B)
                                                                                                     DoD R&D               • Litho ($40M)
                                                                                                      Programs             • Moletronics($10M)
                                                                   Applied Research
                                                                                                             Exploratory Research
                                           N                   N+1                     N+2                     N+3         N+4
                                                                         Product Generation

                                                                              SWEEDA WORKSHOP Sedona, AZ
                                                                   External Research Group, Marie Burnham   16Nov01
           SWEEDA WORKSHOP Sedona, AZ
External Research Group, Marie Burnham   16Nov01
 Motorola’s Intern/Co-op Program
The Motorola Intern/Co-op Program is a strategic college-recruiting tool.
The goal of the program is to identify and attract critical talent for regular
full-time employment.




Tera Martinez
Regional University Relations Manager
Tera.martinez@motorola.com
(817) 245-2976
Pager: 1800SKYTEL2 PIN# 1332302

                                     SWEEDA WORKSHOP Sedona, AZ
                          External Research Group, Marie Burnham   16Nov01
      Motorola’s Intern/Co-op Program

Give students real experience
Internships and Co-ops are intended to give the student a way to gain experience in
his/her field of study. It is also a tremendous opportunity for the student to work with
cutting edge technology and to gain “real” work experience. Students can also see what
classes and experiences will be needed to be successful in the industry they choose.


Pre-evaluation
The business has the opportunity to see how well the student works in a particular work
environment. A manager will also be able to see how the student adapts to change and
how quickly they pick up the new technology.

                                          SWEEDA WORKSHOP Sedona, AZ
                               External Research Group, Marie Burnham   16Nov01
      Motorola’s Intern/Co-op Program

Bring in fresh perspectives
Technology and innovation are dependent upon fresh ideas and creative minds. Some
of these creative minds are currently on the campuses of the colleges and universities.
The Intern/Co-op Program is a way to bring these creative minds into Motorola and
benefit from their innovative thinking.


Promote Motorola on campus
Students that have a positive work experience promote Motorola’s image and products
on campus.


                                         SWEEDA WORKSHOP Sedona, AZ
                              External Research Group, Marie Burnham   16Nov01
    Benefits of the Intern/ Co-op Program


                                         To Company

 Early exposure to women and underrepresented groups
 Special projects for interns often have unexpected positive return
 Has available students who might return for expanded assignments
 Has opportunity to develop the intern for possible future employment
 Has intern as an Mbassador to share experience with other students
 Engineering Rotation Program



                                       SWEEDA WORKSHOP Sedona, AZ
                            External Research Group, Marie Burnham   16Nov01
  Benefits of the Intern/ Co-op Program


                                To Intern/Co-ops

 Gains meaningful experience which enhances education development


 Enhances ability to obtain future employment


 Obtains experience and knowledge




                                    SWEEDA WORKSHOP Sedona, AZ
                         External Research Group, Marie Burnham   16Nov01
             Benchmarking Data
Job Content remains the essential element among effective internship
factors. Of those who have accept or will accept employment, the top
Conclusions. will join the company where they intern are:
three reasons they
Job content; Cultural “fit”; and the Quality of management and staff.
The corresponding reason students have or decline are: Job content,
Cultural “fit”; and Compensation.




                                SWEEDA WORKSHOP Sedona, AZ
                     External Research Group, Marie Burnham   16Nov01
Intern / Coop Program Timeline

Early February
 Deadline for extension of summer intern/coop offers.
April-June
 Summer interns/coops start
Late June
 Extension of fall intern/coop offers
August through September
 Processing of returning intern/coop and returning full-
  time new graduate offers
Early November
 Deadline for extension of spring intern/coop offers


                             SWEEDA WORKSHOP Sedona, AZ
                  External Research Group, Marie Burnham   16Nov01
Panel Session on IP
    ISPD 2001

        3/2/2001
      Jeff Parkhurst
    Intel Corporation
       Level of Difficulty               Direct Industry/University Relationships that
 Industry                     Industry   require different Intellectual Property Rights
Researcher                   LEGAL arm   (IPR) Agreements: agreements take months
       ...                       4          •Centers or Large Collaborative Efforts
       ...                       2-3        •Endowed Chairs
       3                         3          •Government/Industry ERCs
       4                         3          •Sponsored Research Agreements
       2                         2          •Industrial Consortia Memberships
       2                         2          •Bilateral Research Agreements
       1                         2          •Grants
       1                         1          •Consulting Contracts
       0                         1          •Student Internships
 ISPD IPR Panel   3April, 2001
       IPR, the Semiconductor Industry, and Universities
   •    Objective of university research for industrial researcher:
   1) research 2) students 3) relationship with professor(s).
   •    Role of IPR to industrial researcher: protect the company.
   • Role of IPR to semiconductor companies: historically
   defensive, commercialize product not make money from IPR.
   • Semiconductor companies understand IPR relationships and
   how to do business with each other.
   •    IPR relationship with universities is changing, infinite variety:
            –IPR policy and objectives changes with each university, each
            professor at each university, sometimes with students, technical
            topic, and research contract type.
            –Legal overhead becoming unmanageable.
            –Contamination of industrial IPR hampering relationships,
            research.
ISPD IPR Panel   3April, 2001
  Successful Negotiation: an Industry Point-of-View

 • The industrial and university researchers know how future
 IPR might be related to the research and what university
 background IPR might be relevant to the research -
 absolutely necessary for negotiation.
 • Industry notifies professor (and vice versa) when last
 proposal from industry is sent to university Technology
 Transfer. Professor checks on proposal 1-2 weeks later.
 • Industry researcher has easy access to industry contracts
 person or lawyer to assist with the process.
 • University researcher is interested in contractual issues,
 especially if the University is.
 • If professor, student, or university want the future IPR, then
 the professor must understand how to protect both the IPR
 and the industrial collaborator over time.

ISPD IPR Panel   3April, 2001
Backup




            SWEEDA WORKSHOP Sedona, AZ
 External Research Group, Marie Burnham   16Nov01
    Embedded System Design: Proposal

          Specification
Domains




                                                                              Verification
                                           Abstract
                                         Representation

          Refinement
   Compilation/Synthesis/Configuration
                                         Architectural Implementation
                                          Platforms      Platforms


                                         * Small aspects within
       Implementation                    GSRC


    Embedded System                                  Source: Ted Vucurevich
                                                     Chief Architect

       (HW/SW)                                       Cadence Design Systems
           DARPA University Optoelectronics
                      Centers




                                     Entry of SRC and
                                         MARCO

                                        VLSI Today , Gigahertz Clocking (2000)

                                  Limits to CMOS, ~100Gahertz Clocking (2015?), Gigahertz Clocking (2000)

                         Transition to Molecular & Quantum Devices, Densities to 1011 cm2, Clocking @ ??
Adapted from B. Leheny – 6/01
           Academic R&D Sources By Discipline




                           Engineering
                             Down
                              40% Physics
                                     Down
                                                        Math
                                      20%
                                                        Down
                                                         20%




The Federal Government Must Balance Its Basic Research Portfolio to
Support the ‘Hard Science-based’ Information Technology Engine That
Produces the Annual Productivity Increases to Drive the U.S. Economy
                                                Size Drive Defense Capabilities.
and Whose Performance, Cost and Marie Burnham AZ 16Nov01
                                  SWEEDA WORKSHOP Sedona,
                       External Research Group,
Approaching a “Red Brick Wall”
Challenges/Opportunities for Semiconductor R&D


 Year of Production:         1999              2002              2005                   2008       2011      2014

 DRAM Half-Pitch [nm]:       180              130                100                    70         50        35

 Overlay Accuracy [nm]:      65               45                 35                     25         20        15

 MPU Gate Length [nm]:       140              85-90              65                     45         30-32     20-22

 CD Control [nm]:            14               9                  6                      4          3         2

 TOX (equivalent) [nm]:      1.9-2.5          1.5-1.9            1.0-1.5                0.8-1.2    0.6-0.8   0.5-0.6

 Junction Depth [nm]:        42-70            25-43              20-33                  16-26      11-19     8-13

 Metal Cladding [nm]:        17               13                 10                     0          0         0

 Inter-Metal Dielectric K:   3.5-4.0          2.7-3.5            1.6-2.2                1.5       <1.5       <1.5




                                                SWEEDA WORKSHOP Sedona, AZ
                                     External Research Group, Marie Burnham   16Nov01
                 From Ralph Cavin, SRC
           SWEEDA WORKSHOP Sedona, AZ
External Research Group, Marie Burnham   16Nov01
     Emerging Technology Sequence                                                               Tech
                                                                                               Vectors

                             Defect                                  CNN       Quantum
                                              molecular                        computing       Architecture
                            Tolerant
                QCA

      3D
  Integration
                                          RSFQ                       QCA         Molecular        Logic
                      SET
   RTD-FET

Magnetic RAM    Phase Change
                                         Nano FG                 SET Mem        Molecular        Memory
    FD SOI

                  Strained
                     Si                                                                            Non-
                                            Vertical                                             classical
                                              TR                     FinFET       Planar dbl
                                                                                  gate            CMOS

                                From Ralph Cavin, SRC                                Time


                                       SWEEDA WORKSHOP Sedona, AZ
                            External Research Group, Marie Burnham   16Nov01
             From Ralph Cavin, SRC
           SWEEDA WORKSHOP Sedona, AZ
External Research Group, Marie Burnham   16Nov01

				
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