Design _ Fabrication_ Microfluidic Multi-Patch
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Microfluidic Multi-Patch Recording
Unit
Kachi Odoemene
Physiological Sensing Facility
Purdue University
Patch Clamp Technique
• Measure intracellular Closed
current from single ion Open
channels of excitable
cells
Glass electrode
• Glass micropipette 1-
2um in diameter Ion channel
• Giga-ohm seal
Cell Membrane
formation between
glass electrode and cell
membrane
Hamil, O et al 1981
Neher and Sakman 1992
Limitations of Traditional Patch
• Operation requires high
skill level
• Low throughput
– Approximately 10
cells/day
• Impossible to record
from population of
neurons in local
network
http://www.farma.ku.dk/uploads/pics/PatchClamp.jpg
Conceptual Design
Backside
microfluidic
Circular Patch Site channels
Access port
for electrode
and suction PDMS
tubing chamber
Patch Substrate Design
Top side Back side
Patch pores
1-2 um diameter
• Double sided processing on either glass or silicon
substrate
– Backside: Tapered microfluidic channels
• From 10 um wide to 500 um wide
– Topside: Patch pores and microtubing access port
• Holes aligned to mate with with channel
• Application dependent array size and spacing
Proof of Device Concept in Silicon
• Implement chip design
using Deep Reactive Ion
Etching (DRIE)
– Fast etch rate (>8
um/min)
SEM micrographs of microchannels
• Wet oxidation to create
glass-like layer and
shrink patch pores
• Integration with PDMS
Confocal micrograph of narrow channels
Glass Fabrication
• High aspect ratio glass
DRIE requires hard
mask
– Thick electroplated
nickel (>5 um) Nickel hard mask patterned with photoresist
• Very slow etch rate
– 0.5 um/min
• Currently laser
micromachining
channels and pores
Channels etched via DRIE, with NI hard mask
Potential Commercial Advantages
• Overall unique chip design in glass
• Embedded microfluidic channels
– Isolated studies of channels of single cell or cells in a
network
• Glass substrate allowing giga-seal formation &
electrical isolation
• Recordings from adherent cells in tissue culture
and cells with native ion channels
• Device automation will lead to high throughput
drug screening applications
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