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					 SEMICON West 2006 STEP
Methods to Measure/Improve
  Equipment Productivity

         Improving Equipment Performance
          Tracking Using SEMI Standards



                     Lisa Pivin
                        Intel

               lisa.m.pivin@intel.com
                            Agenda
      1. Drivers for Automated Data Collection for Equipment
         Performance
      2. Methods of Automated Data Collection for Equipment
         Performance
      3. Issues Seen with Using E5/E30/E58 for Equipment
         Performance Data Collection
      4. How E116 Can Help Fix These Issues
      5. How Factories Can Leverage E116 for Equipment
         Performance
      6. Conclusion



July 12, 2006           SEMICON West 2006 STEP                 2
                Why Care About Equipment
                     Performance?
    • Equipment Performance is key to factory output
    • Factory Output is limited to Performance of Bottleneck
      Equipment
                                                Individual Equipment
                                                      Capacities




                                                    Factory
                                                    Capacity

            Bottleneck Equipment Performance =                 Factory Output

July 12, 2006              SEMICON West 2006 STEP                               3
                                       Competitive Semiconductor Manufacturing (CSM)
                                       Survey 28 Factories Surveyed & Best Practices Identified (’97 – ’02)
                                                                   Stepper Productivity (all types of steppers)
                                       1100

                                       1000        M1
Wafer operations per stepper per day




                                        900
                                                   M2
                                                   M3
                                                   M4
                                                                                                                                                                                            • Equipment throughput
                                        800        M5
                                                   M6
                                                   M7
                                                                                                                                                                                              performance is highly
                                        700

                                        600
                                                   M8
                                                   M9                                                                                                                                         divergent among
                                                   M10
                                        500                                                                                                                                                   competing fabs.
                                        400
                                                                                                                                                                                                       Integrated Stepper Throughput
                                        300


                                        200




                                                                                                                                    Equiv. full wafer operations per stepper per
                                                                                                                                                                 900
                                                                                                                                                                                            M1
                                        100
                                                                                                                                                                                            M2
                                                                                                                                                                 800                        M3
                                          0
                                                                                                                                                                                            M4
                                              95              96             97            98            99         00         01
                                                                                                                                                                 700                        M5
                                                                                         Time                                                                                               M6
                                                                                                                                                                                            M7
                                                                                                                                                                 600                        M8
                                                                                                                                                                                            M9


                                                                                                                                                        day
                                                                                                                                                                 500                        M10

                                          • Even among leaders, there                                                                                            400

                                            is significant improvement                                                                                           300

                                            potential.                                                                                                           200


                                                                                                                                                                 100


                                                                                                                                                                                   0
                                                                                                                                                                                       95         96      97           98          99   00       01
                                       Source: Dr. Robert Leachman, UC Berkeley                                                                                                                                      Time

                                              July 12, 2006                                               SEMICON West 2006 STEP                                                                                                             4
                                                Source: Dr. Robert Leachman, UC Berkeley

            Best Practices (from CSM Survey)
• The Leading Fabs:
   – Rigorously measure OEE of their processing equipment,
     identify losses in throughput and prioritize needed
     improvements.
   – Automatically capture equipment status using SECS-II
     interfaces.
   – Automatically monitor actual processing time and compare
     against engineering standards; alarms are triggered when
     elapsed times are excessive.
   – Provide automated notification to operators or technicians
     when equipment are about to become idle or when they
     require maintenance or attention.
   – Have instilled participation on continuous improvement teams
     focusing on equipment productivity.
  July 12, 2006        SEMICON West 2006 STEP                                       5
     To Improve Equipment Performance

• Collect Equipment Data to Measure Current
  Performance
• Analyze Data to Identify Performance Losses
• Determine Reasons for Performance Losses
• Address Reasons for Performance Losses
   – Implement cross-functional teams to improve operational
     issues
   – Work with supplier to address equipment design issues to
     improve performance
  Need to Start with Accurate Measurement of Current Performance
            BUT…Issues Exist with Collecting This data


  July 12, 2006         SEMICON West 2006 STEP                     6
                     Collecting E10 Data

       Automated Data Collection
         via Standard Interface
                                       Host
                                     Controller




                                           Standard E5 SECS-II
                                           Interface



                                                                        Non-Standard
                                                                        Analog Signals

                                                                                           Host
                                                                                         Controller
      Manual Recording
     of Equipment States
                                                     Hardwiring into Equipment
                             Production                to Get Analog Signals
                             Equipment
July 12, 2006               SEMICON West 2006 STEP                                              7
              Equipment Automation Standards
                  Used for Data Collection
• SEMI E5 – Semiconductor Equipment Communication Standard
  (SECS-II)
• SEMI E30 – Generic Equipment Model (GEM)
• SEMI E58 – Automated Reliability, Availability, and
  Maintainability (ARAMS)




  July 12, 2006       SEMICON West 2006 STEP             8
            Using E5 (SECS-II) for Equipment
                   Performance Data
Event Reporting
                                                     Processing Started

                                                          Alarm Set
                                                          Alarm Clear
                       Host Controller             Processing Complete
                                                                                                E5 Compliant
                                                                                                 Equipment
Alarm Reporting
                   8       7      6      5            4        3        2   1   Alarm Code:
                                                                                0 = Not Used
                                                                                1 = Personal Safety
                                                                                2 = Equipment Safety
                                                                                3 = Parameter Control Warning
            Bit 8       Bits 7-1 Alarm Code                                     4 = Parameter Control Error
                                                                                5 = Irrecoverable Error
            1 = Set                                                             6 = Equipment Status Warning
            0 = Cleared                                                         7 = Attention Flags
                                                                                8 = Data Integrity
              Alarm codes 1, 2, and 5 are used in some performance tracking systems (e.g.,
                  SEMATECH’s TP2) to detect a failure or processing stopped situation.

   July 12, 2006                             SEMICON West 2006 STEP                                        9
                 Using E30 (GEM) for Equipment
                       Performance Data
• E30 proposes a
  Processing State
  Model for
  semiconductor
                                                  IC Makers can
  equipment                                       use E5 SECS-II
• Includes standard                               messages to get
  automated messages                              E30 Processing
                                                  State changes &
  to receive equipment                            to get Alarm
  processing data                                 Set/Clear
• Requires alarm set /                            messages for
                                                  performance
  clear messages to be                            tracking data
  provided by equipment
• Downside: Does not
  require alarm codes
 July 12, 2006           SEMICON West 2006 STEP                10
         Using E58 (ARAMS) for Equipment
                Performance Data
        • E58 States are identical to E10.
        • Equipment reports E10 state changes to host computer via E5
          SECS-II messages.
                  – Includes E58 substate codes to indicate substates of E10
        • Equipment supports User Interface (UI) for manual state
          changes entered by user at equipment console.
                                                                                TOTAL TIME

                                                                      OPERATIONS TIME


                                                               MANUFACTURING     UPTIME
                                                                   TIME

                   E10 / E58                                    PRODUCTIVE       ENGINEERING

                    States                                                                        NON-
                                                                                               SCHEDULED
                                                                 STANDBY
                                                                                                  TIME




  Host                                                         UNSCHEDULED
                                                                DOWNTIME
                                                                                 SCHEDULED
                                                                                 DOWNTIME
Controller
                                                      E58
                                                   Compliant                 E58 States
                                                   Equipment
  July 12, 2006                    SEMICON West 2006 STEP                                                  11
              Using E116 (EPT) for Equipment
                     Performance Data
 • E116 supports only the basic states the equipment knows, without
   requiring manual input
        – BUSY
        – IDLE
        – BLOCKED
 • States are reported for major modules (e.g., processing chambers)
   of the equipment, as well as the overall equipment
 • Equipment reports E116 state changes to host computer via E5
   SECS-II messages
                                                      E116 States

                  E116
                  States


  Host
Controller
                                            E116
                                          Compliant
                                          Equipment
  July 12, 2006            SEMICON West 2006 STEP                      12
                Issues with Automated Data
                Collection using E5/E30/E58
      • Lack of standardized messages, state
        models, equipment behavior for equipment
        performance tracking
      • Inability to consistently obtain performance
        data for individual chambers of a multi-
        chamber equipment
      • No standard “failure” message
      • Dependency on manual input from a
        human operator
July 12, 2006          SEMICON West 2006 STEP          13
    Lack of Standardized Messages, State Models,
    Equipment Behavior for Performance Tracking

                        “Processing Started”                Equipment   11 state transitions
                                                              Type 1

                         “Batch Started”                    Equipment   15 state transitions
                                                              Type 2

                         “Wafer Started”                    Equipment
                                                                        18 state transitions
                                                              Type 3
                         “Implant Started”
                                                            Equipment   41 state transitions
                                                              Type 4
                     Different equipment types report different events.
                Only 1 equipment studied used exact GEM Processing Model
                        – all others had custom states & transitions.
   Impact: Need to customize Host software to analyze specific messages;
   Longer System Integration Time
July 12, 2006                      SEMICON West 2006 STEP                                      14
        Lack of Ability to get Module-Level Data
                            Dual-Arm Robot
  Process Module                                                Process Module



              UP                                                      DOWN

                                                                   Cool Plate
     Align Module                                                                  E30 GEM Processing
                                                                                 State model / events only
                                                                                      apply to overall
                                                                                      equipment, not
                                                                Multiple Wafer     individual chambers.
                                                                  Airlocks

 In Situ                                                                          Equipment availability
Metrology                                                    User                       tracked as
                                                            Console
                                                                                    either 0% or 100%

  Single-Arm        Load   Load    Load       Load                                Need ability to track at
                    Port   Port    Port       Port
    Robot                                                                               partial %


      Impact: Over- or Under-estimated Availability due to inability to get
      “Partial Availability” data
   July 12, 2006                   SEMICON West 2006 STEP                                                15
                 No Standard Failure Message
                 Using E30, you get Alarm Set & Alarm Cleared messages

                                          Alarm Set
                   Host                                   Equipment
                                          Alarm Clear


                             But no “failure” message!!

            As a result, need to determine which of 100’s (or 1000’s!)
            of equipment alarms cause failures! It is not feasible to
            characterize every single alarm, so often guesses are
            made to pick which alarms should be tracked as failures.
  SEMATECH’s TP2 approach: Use E5 alarm categories 1 (Personal
   Safety), 2 (Equipment Safety), 5 (Irrecoverable Error) as failures.
     But, E30 does not require Alarm Category to be supported!

Impact: Missed Failures; Overestimated Equipment Performance; Missed
Opportunities for Performance / Productivity Improvements
 July 12, 2006                  SEMICON West 2006 STEP                   16
                  Dependency on Manual Input
                  E58-compliant
                  equipment           Manual Input
                                       Required to
                                  Indicate Equipment’s
                                        E10 State
                                  (e.g., equip. doesn’t know
                                     it is Scheduled Down
                                         unless it is told)



                Now the equipment has a mix of manually input
                data and automatically tracked equipment states
                 the entire mix of data is at risk of human error!
Impact: Mixing of Manual Data + Automatically Provided Data  incorrect
E10 states; Over- or Under-estimated equipment performance; Manual
input at equipment not acceptable in 300mm highly automated factory
July 12, 2006                     SEMICON West 2006 STEP              17
    Study – Issues with Data Collection (1)
Equipment Type      Data Reporting Issue                 Impact
Photolithography    •   Alarm codes not                  •       No failures recorded due to Host Controller software
Equipment P1            implemented (50 alarms;                  relying on alarm codes to determine failures.
                        no alarm codes)                          Availability reported as 16% higher than actual value.
Photolithography    •   No alarms actually halt the      •       Utilization is high; quality may be comprised if
Equipment P2            equipment                                equipment does not failure processing when needed.
                    •   Non-standard                     •       Equipment characterization and host-control software
                        implementation of GEM                    customization required to determine equipment
                        Process State model                      operating states based on GEM Processing states.
                    •   Module-level data not            •       Partial availability cannot be accurately tracked (e.g.,
                        reported                                 data reflects equipment is 100% down when it is only
                                                                 50% down). Impacts supplier payment and run rate.
Photolithography    •   Alarms don’t indicate                •   Failures not accurately tracked.
Equipment P3            failures (~775 alarms; 4             •   Equipment characterization and host-control software
                        alarm codes)                             customization required to determine equipment
                    •   Non-Standard                             operating states based on GEM Processing states.
                        implementation of GEM                •   Partial availability cannot be accurately tracked (e.g.,
                        Process State Model (41                  data reflects equipment is 100% down when it is only
                        state transitions)                       50% down). Impacts supplier payment and run rate.
                    •   Module-level data not
                        reported




    July 12, 2006                      SEMICON West 2006 STEP                                                             18
      Study – Issues with Data Collection (2)

Equipment Type        Data Reporting Issue                     Impact
Implant               •   No failure “clear” events            •      Availability data is inaccurate; failures cannot be
Equipment I1              sent by equipment                           accurately tracked. Data shows equipment is
                      •   Non-standard                                constantly in failure state.
                          implementation of GEM                •      Equipment characterization and host-control software
                          Process State model (18                     customization required to determine equipment
                          state transitions)                          operating states based on GEM Processing states.
CMP                   •   Alarms do not indicate               •      Inaccurate failure tracking. Availability reported as
C1                        equipment failures (240                     higher than actual; missed opportunity for
                          alarms; 1 alarm code)                       performance improvement.
Diffusion             •   Non-standard                         •      Equipment characterization and host-control software
Equipment DF1             implementation of GEM                       customization required to determine equipment
                          Process State model (11                     operating states based on GEM Processing states.
                          State Transitions)                   •      Availability data is inaccurate; failures are not
                      •   Alarms do not indicate                      accurately tracked.
                          failures (400 alarms, 4 alarm        •      Partial availability cannot be accurately tracked (e.g.,
                          codes)                                      data reflects that equipment is 100% down when it is
                      •   Equipment does not publish                  only 50% down). Impacts supplier run rate and pay-
                          chamber-level EPT data                      for-performance incentives.




      July 12, 2006                          SEMICON West 2006 STEP                                                           19
 Study – Issues with Data Collection (3)

Equipment Type    Data Reporting Issue                     Impact
Polish            •   Host Control software not            •   Actual availability is lower than reported due to
Equipment PL1         receiving data on equipment              missed tracking of failures. Impacts supplier
                      failures                                 payment and run rate. Missed opportunities for
                                                               improving throughput and equipment
                                                               performance.
Deposition        •   Alarms do not indicate               •   Inaccurate failure tracking. Availability reported
DP1                   equipment failures (~50                  as higher than actual; missed opportunity for
                      alarms; no alarm codes)                  performance improvement.
                  •   Non-standard                         •   Equipment characterization and host-control
                      implementation of GEM                    software customization required to determine
                      Process State model (11                  equipment operating states based on GEM
                      state transitions)                       Processing states.
                  •   Note: Chamber-level data is
                      reported
Deposition        •   Non-standard                         •   Equipment characterization and host-control
DP2                   implementation of GEM                    software customization required to determine
                      Process State model (15                  equipment operating states based on GEM
                      state transitions)                       Processing states.
                  •   Events on module-level data          •   Partial availability cannot be accurately tracked.
                      reporting not available              •   Failure tracking is inaccurate.
                  •   Alarm information not
                      available


  July 12, 2006                   SEMICON West 2006 STEP                                                            20
      Cost Impacts of Over- or Under-Estimating
         Equipment Performance - Example                                                                  Missed
                                                            Actual                       Unneeded        Revenue
                                              # Equipment Availability   Total Capital     Capital       per week
                                                 Needed       (%)            ($M)       Purchase ($M)      ($M)
                Run Rate:          45                   10     71.00%               120             $0        $6.8
        Capital Cost ($M):         12                   10     72.00%               120             $0        $6.0
                 # Steps:           9                   10     73.00%               120             $0        $5.3
Wafer per Week Loading:         5500                    10     74.00%               120             $0        $4.5
              Utilization:       74%                     9     75.00%               108             $0        $3.8
  Estimated Availability:        80%                     9     76.00%               108             $0        $3.0
              Range (+/-)        10%                     9     77.00%               108             $0        $2.3
 (A - U) Gap to Maintain:         6%                     9     78.00%               108             $0        $1.5
  Est Revenue per wafer      $10,000                     9     79.00%               108             $0        $0.8
                                                         9     80.00%               108             $0        $0.0
                                                         9     81.00%               108             $0        $0.0
                                                         9     82.00%               108             $0        $0.0
                                                         9     83.00%               108             $0        $0.0
                                                         8     84.00%                96            $12        $0.0
                                                         8     85.00%                96            $12        $0.0

      If actual availability of the equipment is 4% higher than estimated:
      • The inaccurate data indicates that an additional equipment is required
      • When planning new factory, this is an additional capital cost of $12 million
      If actual availability of the equipment is less than estimated:
      • Missed opportunities for performance improvements & missed revenue

  July 12, 2006                         SEMICON West 2006 STEP                                                       21
                   What IC Makers Need

          • IC Makers need accurate equipment data to measure OEE
            and utilization
             – Total Time that Equipment is IDLE
             – Total Time that Equipment is BUSY processing
             – Total Time that Equipment is BLOCKED from
                processing
             – Reasons why Equipment is BLOCKED from
                processing
             – Run Rate / Throughput Information
          • IC Makers need standard events and state model to get
            this data
          • IC Makers need fully automated equipment operations (No
            Manual Intervention) to track equipment states
July 12, 2006              SEMICON West 2006 STEP                     22
                           How E116 Can Help
    • Lack of standardized messages, state models, equipment
      behavior for equipment performance tracking.
                – E116 defines standardized state model, messages, and
                  equipment behavior for reporting performance data.
    • Inability to obtain performance data for individual chambers of
      a multi-chamber equipment.
                – E116 requires the state model and associated data to be
                  reported for individual processing chambers of an equipment, as
                  well as the overall equipment.
    • No standard “failure” message.
                – E116 provides an event to indicate when the equipment is
                  blocked from processing, and provides details on why
                  equipment is blocked from processing.
    • Dependency on manual input from a human operator.
                – E116 relies on equipment data only; no manual input.
July 12, 2006                     SEMICON West 2006 STEP                            23
        “What if” Study - E116 Improvements (1)
Equipment Type      EPT Data Reporting Issue      How Issue Is Fixed
Photolithography    •   Alarm codes not           •        Failures accurately tracked via standard messages from
Equipment P1            implemented. (50                   equipment indicating “Blocked” state. Host control
                        alarms; no alarm                   software does not need alarm codes to determine if
                        codes)                             equipment has a failure.
Photolithography    •   Alarms do not halt        •        None – E116 does not require that the equipment halt; it
Equipment P2            the equipment                      only requires that failures are reported in a standard
                    •   Non-standard GEM                   manner.
                        Process State model       •        Key operational states (Idle, Busy, Blocked) are reported
                    •   Module-level data                  in standard messages. Host control software does not
                        not reported                       need to be customized for non-standard GEM Process
                                                           State model.
                                                  •        Key operational states (Idle, Busy, Blocked) are reported
                                                           for modules and partial-availability metrics.
Photolithography    •   Alarms don’t              •        Failures are accurately tracked via standard messages
Equipment P3            indicate failures                  from equipment indicating “Blocked” (Unscheduled
                        (~775 alarms; 4                    Down) state. Host control software does not need alarm
                        alarm codes)                       codes to determine if equipment has a failure.
                    •   Non-Standard              •        Key operational states (Idle, Busy, Blocked) are reported
                        implementation of                  in standard messages. Host control software does not
                        GEM Process State                  need to be customized for non-standard GEM Process
                        Model (41 state                    State model in order to determine equipment states.
                        transitions)              •        Key operational states (Idle, Busy, Blocked) are reported
                    •   Module-level data                  for modules of the equipment, enabling ability to
                        not reported                       determine partial-availability metrics.


    July 12, 2006                 SEMICON West 2006 STEP                                                          24
       “What if” Study - E116 Improvements (2)
Equipment Type      EPT Data Reporting Issue       How Issue Is Fixed
Implant             •   No failure “clear”         •        Failure ‘clears’ are accurately tracked via standard
Equipment I1            events sent by                      equipment messages indicating transition out of
                        equipment                           “Blocked” state. Host control software is able to detect
                    •   Non-standard                        when equipment recovers from failure.
                        implementation of          •        Key states (Idle, Busy, Blocked) reported in standard
                        GEM Process State                   messages. Host control software does not need to be
                        model (18 state                     customized for non-standard GEM Process State model.
                        transitions)
Diffusion           •   Non-standard               •        Key operational states (Idle, Busy, Blocked) are reported
Equipment DF1           implementation of                   in standard messages. Host control software does not
                        GEM Process State                   need to be customized for non-standard GEM Process
                        model (11 State                     State model in order to determine equipment states.
                        Transitions)               •        failures are accurately tracked via standard messages
                    •   Alarms do not                       from equipment indicating “Blocked” (Unscheduled
                        indicate failures (400              Down) state, including reason. Host control software
                        alarms, 4 alarm                     does not need alarm codes to determine if equipment
                        codes)                              has a failure.
                    •   Equipment does not         •        Key operational states (Idle, Busy, Blocked) are reported
                        publish chamber-                    for modules of the equipment, enabling ability to
                        level EPT data                      determine partial-availability metrics.
Polish              •   Host Control               •        All equipment failures are reported via “Blocked” state
Equipment PL1           software not                        change events.
                        receiving data on
                        equipment failures

    July 12, 2006                  SEMICON West 2006 STEP                                                             25
  “What-If” Study – E116 Improvements (3)
Equipment Type         EPT Data Reporting Issue      How Issue Is Fixed
Deposition Equipment   •   Alarms do not             •        Failures are accurately tracked via standard messages
DP1                        indicate equipment                 from equipment indicating “Blocked” (failure) state.
                           failures (~50 alarms;     •        Key operational states (Idle, Busy, Blocked) are reported
                           no alarm codes)                    in standard messages. Host control software does not
                       •   Non-standard                       need to be customized for non-standard GEM Process
                           implementation of                  State model in order to determine equipment states.
                           GEM Process State
                           model (11 state
                           transitions)
                       •   Chamber-level data
                           is reported
Deposition Equipment   •   Non-standard              •        Key operational states (Idle, Busy, Blocked) are reported
DP2                        implementation of                  in standard messages. Host control software does not
                           GEM Process State                  need to be customized for non-standard GEM Process
                           model (15 state                    State model in order to determine equipment states.
                           transitions)              •        Key operational states (Idle, Busy, Blocked) are reported
                       •   Events on module-                  for modules of the equipment, enabling ability to
                           level data reporting               determine partial-availability metrics.
                           not available             •        Failures are accurately tracked via standard messages
                       •   Alarm information                  from equipment indicating “Blocked” (Unscheduled
                           not available                      Down) state, including reason.
CMP Equipment          •   Alarms do not             •        Failures are accurately tracked via standard messages
C1                         indicate equipment                 from equipment indicating “Blocked” (Unscheduled
                           failures (240 alarms;              Down) state, including reason.
                           1 alarm code)


    July 12, 2006                    SEMICON West 2006 STEP                                                           26
                    Building the E10 States
 • Keep Manual data separate from Equipment data to sustain
   equipment data accuracy
 • Use data from MES & Equipment to produce E10 metrics

                  Data on NON-SCHEDULED TIME

                  Data on ENGINEERING TIME                         NON-SCHEDULED TIME


                  Data on MANUFACTURING TIME                       ENGINEERING TIME
  MES
                  Data on SCHEDULED DOWNTIME                       PRODUCTIVE TIME
                                                            E10
                  Data on UNSCHEDULED DOWNTIME             State   STANDBY TIME
                                                           Logic
                                                                   SCHEDULED DOWNTIME
                  Equipment is BUSY
                                                                   UNSCHEDULED DOWNTIME
                  Equipment is IDLE
Equipment
                  Equipment is BLOCKED


  July 12, 2006                   SEMICON West 2006 STEP                                27
                         Mapping the States
                   MES based and equipment based E116 Data

     NON-SCHEDULED (MES) AND ANY STATE* (E116)



                                                                 E10 States
      MANUFACTURING (MES) AND BLOCKED (E116)
         ENGINEERING (MES) AND BLOCKED (E116)                NON-SCHEDULED
UNSCHEDULED DOWN (MES) AND ANY STATE* (E116)                     TIME
                                                               UNSCHEDULED
                                                                DOWNTIME
                                                                 SCHEDULED
  SCHEDULED DOWN (MES) AND ANY STATE* (E116)                     DOWNTIME
                                                               ENGINEERING
                                                                  TIME
                                                                  STANDBY
                   ENGINEERING (MES) AND BUSY (E116)                TIME
                   ENGINEERING (MES) AND IDLE (E116)
                                                                PRODUCTIVE
                                                                   TIME

                 MANUFACTURING (MES) AND IDLE (E116)

                                                             *ANY STATE (E116) means that
                 MANUFACTURING (MES) AND BUSY (E116)         the E116 state is not a factor in
                                                             determining the E10 state.



 July 12, 2006                     SEMICON West 2006 STEP                                  28
         Using E116 to Pareto Reasons for
               Blocked Processing
                                               90
                        Number of Failures     80
                                               70                            Equipment 8
                                               60
                                               50                            Equipment 7
                                               40                            Equipment 6
                                               30                            Equipment 5
                                               20
                                                                             Equipment 4
                                               10
                                                0                            Equipment 3
                                                                             Equipment 2
                                                 i l u Ty 4
                                                 i l u Ty 6
                                                 i l u Ty 8
                                                 i l u Ty 1
                                                 i T 2
                                               ilu T 3

                                                 ilu y p 5


                                                         Ty 7
                                                              9
                                                 i l u Ty 0
                                              Fa r e e 1
                                              Fa r e pe
                                              Fa r e pe
                                              Fa r e pe
                                              Fa r e pe
                                              Fa r e pe
                                             Fa lur e ype

                                              Fa e T pe


                                                      r e pe
                                                           pe
                                                                             Equipment 1
                                                 i l u Ty




                                                    r y
                                              Fa r e
                                                 ilu
                                              Fa




                Without E116: IC Maker must analyze alarms to determine which alarms
                cause equipment to be BLOCKED from processing.

                With E116: A BLOCKED event and a BLOCKED REASON are sent when
                equipment is BLOCKED from processing. Data can be analyzed to determine
                failures that impact processing.
July 12, 2006                                       SEMICON West 2006 STEP                 29
Using E116 to Measure Detailed Processing

                                                                Use Case 1:           Source: SEMATECH
                                              300mm Product-material Tasks for Equipment
                                              without Internal Buffer and with Two Loadports




                                                                                                                         Productive
                                                                                                Productive
                                                                                     Standby                  Standby                  Standby
                                                                                     Waiting                  Waiting                  Waiting
                                                     Productive                     for AMHS                 for AMHS                 for AMHS Productive
                         for Mat’l




                                      Carrier-2
                         Waiting




                                                                                            Carrier-2                                    Waiting




                                                                                                                         Unload
                                                    Carrier-2          Carrier-2
                                      Loading       Waiting for       Processing             Waiting                                     for new
                                      & Prep.       Resource                               for Unload                                    Material

                     Carrier-1                                              Carrier-1                           Waiting                    Carrier-3




                                                                                               Unload
                                                   Carrier-1
                     Loading                      Processing                 Waiting                            for new                    Loading
                     & Prep.                                               for Unload                           Material                   & Prep.

                    t0               t1 t2    t3                  t4 t 5            t6     t7 t 8                       t9 t10 t11                   t12
                                                                      Event Timestamp

•           E116 provides events when equipment transitions to BUSY state, when
            equipment begins new task in BUSY State, and when equipment is
            BLOCKED waiting for external source (e.g., material handling for unload).
•           Timestamps can be tracked to analyze details of equipment processing.
    July 12, 2006                                          SEMICON West 2006 STEP                                                                           30
                      Using E116 to Compare Processing Task
                       Durations Across Identical Equipment
                      80.00%
                                                                                                                               16 identical chambers
                                                                                                                               performing the same
% of Task Instances



                      70.00%


                      60.00%                                                                                                   task (same recipe)
                      50.00%                                                                                                   exhibit a wide range of
                      40.00%
                                                                                                                               performance.
                      30.00%


                      20.00%

                      10.00%

                       0.00%
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                                               Task Processing Duration (hh:mm:ss.000)
July 12, 2006                                                             SEMICON West 2006 STEP                                                                                          31
      Using E116 to Compare Actual Processing
        Times vs. Expected Processing times
                Should            Actual                  Should                 Actual
                 Start             Start                  Finish                 Finish

                         Start                Efficient            Inefficient
                         Lag                 Processing            Processing


                                     Theoretical Duration

      • Actual-Start and Actual-Finish collected via E116

      • Should-Start = Max{precedent Actual-Finish times}

      • Should-Finish = Actual Start +Theoretical Duration

July 12, 2006                    SEMICON West 2006 STEP                                   32
                    Implementing E116 in Factories

• Add E116 standard to
  purchase specifications for                      Equipment
                                                 Performance
  equipment
                                                     System
• Modify host control software                 (calculates & maintains
                                                      E10 State)
  to accept E116 messages
                               Equipment State                   Equipment State
• Modify Equipment                                                          E116 Data
  Performance systems to
                                                                  Host
  accept E116 data & combine           MES
                                                              Controller
  with MES equipment states to
  calculate E10 states/metrics                                         E5/E30 Events/Alarms

                                                                           E116 Messages
                                                              E116-compliant
                                                                Equipment

    July 12, 2006                 SEMICON West 2006 STEP                                      33
            Using E116 to Improve Performance

•   Leverage E116 to improve implementation/development time
     – Use standard Host Controller framework based on collecting E116 standard
       messages to minimize development time
     – Leverage “BLOCKED” state to eliminate need to identify which alarms cause failures
•   Collect E116 data to measure:
     – Time Equipment was BUSY
               • What tasks it was busy doing
               • How long these tasks took
               • Variance in task processing time between products, equipment, sites, etc.
     – Time Equipment was BLOCKED
               •    How long equipment was BLOCKED overall
               •    How long equipment was blocked for high-level categories of Blocked time
               •    How long equipment was blocked for specific reasons
               •    Pareto top equipment why equipment was blocked
     – Time Equipment was IDLE
     – Module-level data
               • Partial Availability based on chamber-level uptime/downtime
•   Regularly review data to determine areas for improvements
•   Drive productivity improvement teams & feedback to OEMs for improvement

    July 12, 2006                         SEMICON West 2006 STEP                               34
                                 Summary
• Improved equipment performance is key for IC Makers.
       – Improving bottleneck equipment performance improves factory output
• First, accurate data is needed. Automated data collection is best.
• Without E116, IC Makers lack ability to easily collect automated,
  accurate equipment performance data.
       –     Lack of standardized messages, state models, equipment behavior
       –     Inability to report module-level performance data
       –     No standard “failure” message
       –     Dependency on manual input from a human operator
• Issues with data result in:
       –     Over or under estimates of equipment performance
       –     Increased system integration time / effort for performance tracking
       –     Missed opportunities for performance improvements
       –     Unnecessary capital purchases and/or missed revenue due to capacity
• The new E116 standard was designed to address these issues with
  automated data collection of equipment performance data.
• With E116, IC Makers can improve performance data collection and
  use data to drive performance improvements to improve output.

 July 12, 2006                 SEMICON West 2006 STEP                              35

				
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