Roll to Roll RAON1300 English

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Roll to Roll RAON1300 English Powered By Docstoc
					                                                                                 The Agent of The Great China
                                                                            LINETEC ENGINEERING CO., LTD.
                              2F.,No. 13, Alley 11,Lane 327, Sec. 2, Chung Shan Rd., Chung Ho City, Taipei Hsien, Taiwan
                                               Tel : 886-2-22402166    Fax : 886-2-22406777    http://www.linetec.com.tw
Product Name       Roll to Roll Sputtering System
Model No.          RaON1300SC
Maker / Supplier   VTS Corporation


    Item No.                                              Specification
 Total system      ◆ Application
configurations       This system is designed for SiO2/ITO sputtering processes on one side of
                     flexible materials, especially PET.




                   ◆ Total System Configurations
                    1. Main process system
                    2. Re-Winding / Un-Winding system
                    3. Vacuum pumping system
                    4. Pre-heating unit
                    5. Pre-treatment unit
                    6. Sputtering system
                    7. Electric control system
                    8. Utility


                                                   1
     Item No.                                     Specification
                    ◆ System Configurations
                      1. System space
                      2. Basic web specification
                      3. Winding system
                      4. Vacuum Pumping System
                      5. Pre-heating Units
                      6. Pre-treatment Units (Ion Beam Unit)
                      7. Sputtering System
                      8. Electrical Control System
                      9. System Utility and Sales Term
                      10. Vacuum Test
                      11. Coating

1. System Space     ◆ Dimension
                      4.37(Width) x 7.05(Length) x 2.60(Height)M

2. Basic Web        ◆ Specification
   Specification      Product : touch panel application
                      Web material : optical hard coated PET film
                      Web thickness : 25 ~ 200um
                      Web width : 1,340mm
                      Coated width : 1,300mm
                      Effective coated width : 1,250mm
                      Web length (Film Roll Diameter) : 1,000M (Ø600mm)@188um
                      Configuration : PET / SiO2 /ITO

3. Winding System   ◆ Composition
                      Web speed range : 0.5 ~10m/min (step 0.1m/min)
                      Web speed stability : Within + 0.1% (at 10m/min)
                      Web tension range : 24 ~ 180N Load cell
                      Web tension stability : Within + 5N (at stopped state)
                      Working speed : > 3m/min
                      Web speed direction : Normal / Reverse Winding (3m/min)
                      Cooling System Temperature : use temperature 10℃ ~ room temperature
                          Cooling time : 15 min. @Room Temp.            10℃
                          Heating time : 15 min. 10℃             Room Temp.
                      Drive motor : Servo motor system (UW, MR, RW)
                      Slip, Dent, Wrinkles, Scratch : Free
                      Web shifting : + 0.5mm




                                             2
     Item No.                                      Specification
4. Vacuum          4.1 Main Pumping System
Pumping System           Cryo pump, 2,400 liter/sec : 8 ea
                         Mechanical booster pump, 30,000 liter/min : 2 ea
                         Rotary pump, 4,000 liter/min : 7ea
                         Poly cold 100,000 liter/sec (unwinding zone, cathode zone) : 1 ea
                   4.2 Vacuum Gauge Units
                         Pirani gauge : 8 ea
                         Baratron vacuum gauge : 4 ea
                         Full range gauge : 6 ea
                   4.3 Gas Supply Units
                         MFC for pre-treatment : Ar gas/range 1,000sccm : 1 ea
                                                O2 gas/range 200sccm : 1 ea
                         MFC for ITO sputtering : Ar gas / range 1,000sccm : 8 ea
                                                  O2 gas/range 200sccm : 8 ea
                         MFC for SiO2 sputtering : Ar gas / range 1,000sccm : 3 ea
                                                  O2 gas/range 200sccm : 3 ea
                                                  O2 gas/range 50sccm : 3 ea

5. Pre-heating     ◆ Composition
     Units           Halogen lamp : Approx. 12mm x 1,450mm (L) .. 1 sets
                     PID control unit : PLC control (temp. control) … 1 sets
                     SCR unit : 1 Phase, 110 Vac, Approx, 15KW
                     Temperature range : Max. 200℃

6. Pre-treatment   6.1 Operation Specification
     Units               Ion source type : Ion accelerator with anode layer …1 ea
                         Ion energy : 400 ~ 2,500eV
                         Anode voltage : 0.7 ~ 5KV
                         Discharge current : 4.2mA/sm slit
                         Ion current : 1.1 ~ 1.3A
                         Working pressure : 5 x 10¯4 torr
                         Typical gas flow : Ar :1,000sccm / O2:200sccm … 1 ea
                   6.2 Water Cooling
                         Minimum water flow : 5 liter/min
                         Maximum inlet temperature : Min. 15℃
                         Maximum water resistance : 50 kΩ-cm




                                              3
     Item No.                                        Specification
7. Sputtering       7.1 Operational Specification
    System               7.1.1 Power supply
                                ITO : Pulse DC 12KW … 4 sets
                                SiO2 : MF 40KW … 1 set
                         7.1.2 Target materials
                                ITO : In203/SnO2 (90/10wt%)
                                SiO2 : Si target
                         7.1.3 Power density
                                ITO : 1~5 W/c㎡
                                SiO2 : 1~7 W/c㎡
                         7.1.4 Target size : Approx.125mm(W) X 1,650mm(L) X 6mm (t)
                         7.1.5 Target utilization : 25~30% both of Si and ITO
                         7.1.6 Cathode Q’ty
                                ITO : single magnetron cathode …4 sets
                                SiO2 : dual magnetron cathode …1 set
                         7.1.7 Working Pressure : ~2 x 10¯3 torr
                         7.1.8 Typical gas flow
                                ITO : Ar :1,000sccm / O2:100sccm
                                SiO2 : Ar :1,000sccm / O2:100 + 50sccm
                    7.2 All Operation Modes
                          Source Insolation : > 500V in vacuum (Anode – Cathode-Ground)
                          Maximum inlet water pressure : 3Kgf/c㎡
                          Maximum inlet water waer temp. : Min. 15℃
                          Water Resistance : 50kΩ-cm

8. Electrical       8.1 Interface Method
                         Machine – PLC : Digital I/O, Analog I/O, RS232C,RS485
Control System           PLC – GUI (Touch screen) : Mitsubishi controller
                         PLC – PC : Ethernet
                         PLC – Remote PC : Ethernet (Option)
                    8.2 Merits of Electrical Control
                         Manual / Semi-Auto / Auto run
                         Interlock for safety
                         Standalone recipe program supplied
                         Real – time monitoring in process
                         Process data Feed-back & Graph drawing function
                         Prevention of operation miss
                         Easy electric wiring CC-link
                         Winding control mode (4 modes :Un/W and Re/W)
                         Individual control of tension (Un/W and Re/W)
                    8.3 Measurement Unit
                         In-situ sheet resistance measurement unit (Guide roll contact type)
                         Real time monitoring and graph for measured data

9. System Utility   9.1 Utilities
                         Main power              : 380V or 220V, 3 phase, 60Hz or 50Hz
and Sales Term           Power consumption : approx. 400KW
                         Air                    : 3 ~ 4.5Kg/c㎡, 100 liter/min
                         Water                  : 3Kg/ c㎡, more than 400 liter/min, min.15℃
                    9.2 Delivery : 5 months after contract (shipping)
                    9.3 Warranty
                         Provides 12 months of warranty after FAT
                         Maintenance contract available at the end of 12 month period

                                                4
     Item No.                                        Specification
10. Vacuum Test      10.1 Ultimate Pressure
                           System dry, clean, empty
                           < 5.0 x 10¯6 torr in sputter zone, pumping down time 12hr
                     10.2 Pumping Speed
                           System loaded with one roll (1,300mmW x 1,000mL x 188umT) of
                               PET-web
                           Pressure in sputtering < 5.0x10¯5 torr in less than 60min.
                     10.3 Leak test : less than 5.0x10¯8 torr liter/sec (He leak detector)

11. Coating Test     11.1 ITO material
                          Coated PET, 188um thick, coating width 1,250mm, coating thickness
                          uniformity +5%; coating with one single magnetron cathodes, coating speed
                          3m/min for minimum 250A, surface resistance approx. 400Ω/cm²
                          transmittance -4% than transmittance of bare film.
                     11.2 SiO2 material
                          Coated PET, 188um thick, coating width 1,250mm, coating thickness
                          uniformity +5%; coating with one dual magnetron cathodes, coating speed
                          3m/min for minimum 120A.
                     11.3 Adhesion test
                          100% (1mm Step 10 x 10 cut, 3M 610. Cross cut tape test (JIS))

                Sputter, E-beam/Thermal Evaporator, Thermal CVD, PECVD,
                         RTA, PLD, MBE, Etcher, IBAD, System Upgrade, CVD
                         Gas Line, Vacuum Component etc.
                     VTS is your partner for Vacuum Technology & Service!




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posted:5/21/2012
language:English
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