"MEMS03 II applications"
F.L. Lewis, Assoc. Director for Research Moncrief-O’Donnell Endowed Chair Head, Controls, Sensors, MEMS Group Automation & Robotics Research Institute (ARRI) The University of Texas at Arlington Bruno Borovic MEMS Modeling and Control With Ai Qun Liu, NTU Singapore T Thermal Model Rtcd Ct Rtcv Mechanical Model Rtr T s Rttot T q d 2x m 2 c m x k m x f t dx qs 1 sCRttot T Trm dt dt Electrical Model Optical Model 1/ 2 2 t 2 s2 U (t , s ) exp 2 I s V s sCe C w0 2 w0 L R s 2 LC e sCe Re T 1 Z(s)=R+sL+1/sC FEA Experiment 160 140 120 Rttot[K/W] 100 80 60 40 1 2 3 4 5 6 7 8 9 V[V] MEMS Power Generation Permanent magnet Vibrating body S with the coil N MEMS Chip N S Non- - ferromagnetic Ferromagnetic material material Vibration-driven E-Mag generator Fab Layout of Coils with Folded Beam Suspension Pressure Sensors for Pulmonary Ventilator Control Load-deflection relation for square membrane Et 3 Et 3 t P C1 4 w0 C 2 4 C3 2 w0 a a a Maximum membrane slope occurs at Optical Pressure Sensor (x,y)= (a,a/2), (a,3a/2), (a/2,a), (3a/2,a). maximum slope is FEA of membrane deflection 1/ 3 w0 Pa 4 0 Fig. 2. Relation between intensity loss and beam offset. s m ax 2a 2 C1 Et -0.5 -1 intensity loss (db) -1.5 -2 -2.5 -3 0 0.05 0.1 0.15 0.2 0.25 0.3 0.35 0.4 0.45 0.5 relative beam offset theta/theta0 Fiber intensity loss vs. beam offset with Wendell McCulley- InterMEMS, Inc. MEMS process Fab layout Testing and Calibration of Optical Pressure Sensors Array of membranes with different dimensions MicroFAB, Inc. - fiberoptics Optical micro-lenses David Wallace Optical Pressure Sensor Calibration Facility Flow Sensors for Pulmonary Ventilator Control Au mirror w Out of 2D- Flow V plane assembly Thermal Actuator movement D Self-assembled Fixed support L stanchions Linear slide movement k Self-Assembly Sequence Optical Si fiber springs Drag Force FD 1 V 2C D A Hinges FEA 2 Optical Flow Sensor For a wide range of Reynolds numbers, CD= 1.28 Vd Reynolds Number R Drag torque about the hinged bottom L 2 L2 2 D C D w V (r )r dr C D wV0 1 2 1 2.6 2 2 0 2 2 Where a Cermak flow velocity profile is assumed Steady-state tilt angle is C D wV0 2 2 L2 2 1 2.6 2 k 2 Surface Micromachined Design Flow Sensor based on von Karman Vortices No moving parts! x z flow d Optical fiber V w t Bluff Vibrating Body beam MicroFluidics for VLSI Chip Cooling Number of transistors on a chip is now limited by heat dissipation. Fabricate micro-channels on the back of the chip for cooling. With Dereje Agonafer, Director UTA Packaging Center Intellisuite simulation showing dry (RIE) etching of 110 Si to get Micro Channels. Channels are more than 100 microns high (ARRI). Biochemical Monitoring • MEMS sensors for biochemical species including anthrax, nerve gases, NOx, organophosphorus • Wireless Sensor Networks for remote site biochemical monitoring 1. BCW Detectors Molecular Recognition and Supramolecular Chemistry - D. Rudkevich In miniaturized supramolecular devices – VISUAL RESPONSE sensors, surfaces, and membranes - communication between the analyte-guests and GAS GAS their receptors on a molecular level is transformed to measurable macroscopic SUPPORT SUPPORT effects RECEPTORS SENSING MATERIALS SENSORS calixarenes as unique, specific NO2-sensing species these interactions are reversible, unique, and specific 1. BCW Detectors Proteins (enzymes and antibodies) and aptamers as BCW sensors – R. Gracy, UNT Health Science Center Functional protein microarrays bind specific capture molecules to solid matrix materials Immunoassay for oxidized Fibrinogen isoforms as biomarkers for Alzheimer’s disease Oligonucleotide aptamers bind selected molecules Anti-ricin Aptamer as potential Biosensor for ricin 2. Thin Films for BCW Detector Support template-directed growth of thin films and composites. Structured chemically-active nanosphere thin films- K. Rajeshwar Deposit chemically active agent and dissolve nanospheres PS ball B Si Metal or TiO2 or CdS , Semiconductor Electrostatically self-assembled polystyrene IT nanospheres To improve sensitivity to challenge agents down to ppb, it is necessary to improve charge separation to prevent recombination of electron/hole photogenerated charges. Site-proximity mechanism in a Ni/TiO2 composite film illustrating the complementary roles of the Ni and TiO2 components. 3. MEMS Platforms for BCW Detection Agents Interdigitated Finger Gate Electrode FET Uses induced resistivity changes 3x3 IGEFET sensor micro-array – E. Kolesar Microcantilever MEMS sensor array- Kolesar DSP and C&C User Interface for Uses induced mass changes wireless networks- Lewis Neural network classification for unique signatures Microassembly Station Vertical Camera Focusing Resolution: NTSC Stage IMAGE AQUISITION CARD MP-285 Analog / Digital Input XYZ degree of freedom - output CARD Motorized probe Resolution: 40 nm LabView MOTION & CONTROLLERS Windows CVI Rotational stage Resolution: 0.01 deg Table Microscope RS-232 XY Stage mounted on rotational stage Resolution: 3 m, 0.01 deg Camera Resolution: NTSC Vertical Focusing Stage IMAGE AQUISITION CARD Micro Manipulator MP-285 XYZ degree of freedom Analog / Digital Input Motorized probe - output CARD Resolution: 40 nm MP-285 LabView MOTION & CONTROLLERS Windows CVI Rotational stage Resolution: 0.01 deg Table XY Stage mounted on Microscope RS-232 Probe Controller rotational stage Resolution: 3 m, 0.01 deg Manual Control Automatic Probe MP-285 Vertical NI Hardware Camera Focusing Resolution: NTSC Stage IMAGE AQUISITION CARD * Already in use MP-285 XYZ degree of freedom Analog / Digital Input - output CARD Motorized probe Resolution: 40 nm LabView **Ideally, PXI system + SCXI signal conditioning MOTION & CONTROLLERS Windows CVI Rotational stage Resolution: 0.01 deg Table Microscope RS-232 XY Stage mounted on rotational stage Resolution: 3 m, 0.01 deg • NI 1411 IMAQ card (Image Acquisition)* • NI6711 PCI card (Data Aquisition)* • NI 485/8 Serial Port Card (serial com. with controlller) • SCXI – Signal conditioning (thermocouple,…etc.) Vision & Automatic Probe Front Panel IMAGE AQUISITION CARD Analog / Digital Input - output CARD LabView MOTION & CONTROLLERS Windows CVI RS-232 Vision Vision Feedback info Stored map Map From MEMS-Pro 3D info Feature-based Localization With 3D info Based or pre-programmed behaviours OpenGL LabWindows /CVI IMAGE AQUISITION CARD Analog / Digital Input - output CARD LabView MOTION & CONTROLLERS Windows CVI RS-232 MEMS Packaging with Wendell McCulley Dereje Agonafer Packaging for MEMS Pressure Sensor- W. McCulley Piet Mondrian Pantographs for Position & Force Scaling