School of Electrical, Computer and Energy Engineering
M.S. Final Oral Defense
MICROFABRICATION OF HIGH THROUGHPUT OPTICAL SENSOR SYSTEMS
FOR SINGLE CELL ANALYSIS
by
Shivani Bhushan
February 16, 2010
3:00 pm
ERC 490
Committee:
Dr. Deirdre R. Meldrum (Chair)
Dr. Michael Goryll
Dr. Shih-Hui Chao
Abstract
This thesis addresses the key issues related to the process
development and characterization of optical oxygen and pH sensors, which
have been fabricated using the conventional microfabrication techniques of
photolithography and dry etching to achieve high throughput pattern
fabrication in the micro meter size scale compatible with the size of single
cell.