What is Thin Film Deposition?

							        What is
Thin Film Deposition?
            Ms. Crystal J. Woods
Emmett J. Conrad STEM Academy High School
                 Dallas, TX
  Dr. Haiyan Wang, Assistant
  Professor, Electrical and
  Computer Engineering
Education
 Ph.D., North Carolina State University, Raleigh, NC, 2002
 M.S., Institute of Metal Research, Shenyang, China, 1999
 B.S., Nanchang University, Nanchang, China, 1998
Previous Appointments
 Jan.05-Dec.05 - Technical Staff Member, Los Alamos National Laboratory
 Jan.03-Dec.04 - Director Funded Postdoctoral Fellow, Los Alamos National
   Laboratory
Research Interests
 Nanostructured nitride and oxide thin film heterostructures for microelectronics,
   optoelectronics, magnetic, high temperature superconductors, solid oxide fuel
   cells, radiation tolerance and structural applications;
 High temperature superconductors: coated superconductor scale-up and
   architectures; flux-pinning mechanisms of nanoparticles and defects
 Microstructural characterizations with transmission electron microscopy (TEM),
   high resolution TEM, Scanning transmission electron microscopy (STEM) and
   XRD.
Patents
 8 patents in the areas of thin film architecture and high temperature
   superconductors
 Selected journal publications (105 journal articles and 70 conference
   proceedings and presentations by January 2008)
 H. Wang, R. Araujo J.G. Swadener, Yongqiang Wang, X. Zhang, E. G. Fu and T.
   CaginIon Irradiation Effects in Nanocrystalline TiN Coatings, Nuclear Instruments
E3 Research Topic: Thin
Film Deposition (Growth)
      w/ Dr. Wang        Dr. Haiyan Wang,
                            Assistant Professor,
                            Electrical and
                            Computer
                            Engineering, TAMU
                           David Mortimer,
                            Physics Teacher,
                            Del Rio High School
                           Crystal J. Woods,
                            Algebra Teacher,
                            Emmett J. Conrad
                            STEM Academy
                            High School
Use of Thin Film Deposition
                 Thin Film Growth or Deposition:
                  It is a thin layer of coating on a
                  substrate or template. It serves
                  one or multiple physical purposes
                  including protection, decoration,
                  conducting, reflection, data
                  storage, insulation, etc.
                 Examples: Colorful coatings on
                  cars, golden watches and many
                  others;
                 Corrosion resistive coatings and
                  superhard coatings (petroleum
                  industry, chemical factories, etc.);
                 Semiconductor industry (Pentium
                  processors, microchips,
                  memories, iPod, etc.);
                 “Sunscreen” : a protective
                  coating on your skin.
Thin Film: How does it grow?
   Kinetic Energy of molecules impact the growth of Thin Film.
   Pressure affects the momentum of the molecules.
   The energy of the molecules impacts how the molecules find their way to the target,
    so they can form layers.
   The following Parameters will result in a desired epitaxial layer (organized, carefully
    placed, high quality layer of thin film):
    Temperature
    Pressure
    Laser Energy
    Laser Frequency
    Type of material (Metals)
    Type of Substrate (Base layer:
    Metal or Ceramic)
 Understanding Thin Film Growth
 Dr. Wang explains thin film
  growth as “laying of apples”
 A high quality thin film growth
  must be layered in an
  organized pattern. Molecules
  must be laid on the target in
  non-disruptive pattern.
 No traffic jams, “no rush hour”
  free flowing traffic.
                                    High Quality
                                    Growth:

                                •Ordered foundation
                                •Same size
                                •Same pattern
                                •Right time
                                •Right condition
Understanding Thin Film Growth
 Atoms must be able to move
  around on the substrate until they
  find the right spot. This results in
  the growth layer.
  Understanding Thin Film Growth
 Congruency is a key component of thin film growth.
 Similar shapes and/or congruent shapes prevents gaps
  or defects in growth layers.
Deposition: What takes place inside
Chamber?
Deposition: What takes place
inside Chamber?
Summer Research: My Exposure of Thin Film




   Joon Hwan Lee, Ph.D. Candidate
   Research: Transmittance of Light within Thin Film
   Tools: Spectrophometer, measures transparency of material using wavelengths.
      Wavelengths are used to determine absorption of life.
   Focus: Compare/Contrast Transmittance when Parameters have been altered
Summer Research: My Exposure of Thin Film
Jie (Joyce) Wang, Ph.D. Candidate
Research: High Temperature Superconductor
Tools: Transmission Electron Microscopy, JEOL JEM-2010 (TEM)
Focus: Compare/Contrast Attachment Layer of Growth when temperature
   has been changed . The key is to find nice layers of growth.
Summer Research: My Exposure of Thin Film




Zhenxing Bi, Ph.D. Candidate
Research: Growth of Vertical Patterns of Thin Film
Tools: Transmission Electron Microscopy, JEOL JEM-2010 (TEM)
Focus: Compare/Contrast Thickness and/or Mircostructural Changes when
   Parameters have been changed. Goal to create high quality vertical
   patterns.
 My experience of Thin Film Research
 Designing a high quality thin film growth that
  demonstrates an organized pattern of the same and/or
  similar shape with various parameters.
 Continue exploring results when different parameters
  of the thin film process have been changed.
Ms. Woods @ TAMU’s E3 Summer                      E3 Summer Research
Research Program                                  Program




                               High Quality Education
             Thin Film vs. Algebra
                                Patterns producing:

High Quality thin film growth   Equations
                                Linear Functions
  Ordered foundation
  Same size                     Exponential Functions
  Same pattern
                                Scatter Plots
  Right time
  Right condition               Quadratic Functions
                                Factoring
    Examples of Patterns in Algebra




 The powers of 11 also form a sequence:
 110 = 1
  111 = 11
  112 = 121
  113 = 1331
  114 = 14641
  115 = 161051
  116 = 1771561
  117 = 19487171
Examples of Patterns in Algebra
Using Patterns of Tiles with
Quadratic Functions and Factoring
Data Used to create
Functions




  Exponential
                Linear Functions
  Functions
 Kudos! to my wonderful
Thin Film Research Team
                                                                            Big Thanks to the
                                               Ick-Chan Kim,                National Science
        Roy Araujo,
        Ph.D.
                      Jongsik Yoon, Ph.D.      Ph.D. Candidate              Foundation!
                      Candidate
        Candidate



                Joon Hwan Harrison Tsai,
                Lee, MS   MS Candidate
                Candidate
 Jie (Joyce)                           Zhenxing Bi,
 Wang, Ph.D.                                             Sungmee Cho,
                                       Ph.D. Candidate
 Candidate                                               Ph.D Candidate




                                                                          Dr. Haiyan Wang