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Name Role in Group Research Projects Background

Semiconductor Processing,

PhD, Physics, U. Chicago

Director, Institute for Systems Research Sensing, Optimization, and

Postdoc, Physics, Brown U.

Gary W. Rubloff Professor, Dept. of Materials & Nuclear Control;

IBM Research, Yorktown Hts, NY

Engineering Semiconductor Manufacturing

Ctr. For Adv. El. Mat's. Proc., N.C. State Univ.

Education

Postdoc Semiconductor Processing,

John Kidder ISR and Materials Eng. Sensing, Optimization, and PhD, MSE Dept., U. Washington

U. Maryland Control

Simulation Lab Manager, ISR Semiconductor Manufacturing MS, MBA

Mansour Oveissi

U. Maryland Education Teaching, NJIT

MS student

Semiconductor Process Sensing

Nayanee Gupta Materials Engineering MS, Chemistry, N. C. State Univ.

and Simulation

U. Maryland

PhD student

Semiconductor Process Sensing

Yiheng Xu Materials Engineering MS, MSE, CSUT, China

and Simulation

U. Maryland

PhD student

Semiconductor Process Sensing

Rock Shi Electrical Engineering MS, Biomedical Eng., Tulane

and Simulation

U. Maryland

PhD student

Brian Conaghan Materials Engineering Coop, Intel Corporation BS, Chemical Eng., Cornell

U. Maryland

BS student

Semiconductor Manufacturing

David Eckard Electrical and Computer Engineering

Education

North Carolina State University

MBA student

Semiconductor Manufacturing

Yatin Sankholkar College of Business & Mgmt.

Education

U. Maryland

MS student

Semiconductor Manufacturing

George Ziets Psychology

Education

U. Maryland

Manager, Human-Computer Interactions Semiconductor Manufacturing

Ann Rose MS, Industrial Eng., Penn State

Lab, U. Maryland Education

Name Current Position Research Projects Background

Semiconductor Processing,

PhD, Physics, U. Chicago

Director, Institute for Systems Research Sensing, Optimization, and

Postdoc, Physics, Brown U.

Gary W. Rubloff Professor, Dept. of Materials & Nuclear Control;

IBM Research, Yorktown Hts, NY

Engineering Semiconductor Manufacturing

Ctr. For Adv. El. Mat's. Proc., N.C. State Univ.

Education

Postdoc Semiconductor Processing,

John Kidder ISR and Materials Eng. Sensing, Optimization, and PhD, MSE Dept., U. Washington

U. Maryland Control

Simulation Lab Manager, ISR Semiconductor Manufacturing MS, MBA

Mansour Oveissi

U. Maryland Education Teaching, NJIT

MS student

Semiconductor Process Sensing

Nayanee Gupta Materials Engineering MS, Chemistry, N. C. State Univ.

and Simulation

U. Maryland

PhD student

Semiconductor Process Sensing

Yiheng Xu Materials Engineering MS, MSE, CSUT, China

and Simulation

U. Maryland

PhD student

Semiconductor Process Sensing

Rock Shi Electrical Engineering MS, Biomedical Eng., Tulane

and Simulation

U. Maryland

PhD student

Brian Conaghan Materials Engineering Coop, Intel Corporation BS, Chemical Eng., Cornell

U. Maryland

BS student

Semiconductor Manufacturing

David Eckard Electrical and Computer Engineering

Education

North Carolina State University

MBA student

Semiconductor Manufacturing

Yatin Sankholkar College of Business & Mgmt.

Education

U. Maryland

MS student

Semiconductor Manufacturing

George Ziets Psychology

Education

U. Maryland

Manager, Human-Computer Interactions Semiconductor Manufacturing

Ann Rose MS, Industrial Eng., Penn State

Lab, U. Maryland Education

Former Group Members

Subsequent or Current

Name Former Position in Group Background

Position

Postdoc Postdoc, Chemistry, U. Pittsburgh

Guangquan Lu Novellus Systems Center for Adv. El. Mat's. Proc. PhD, Chemistry

North Carolina State University U. Calif. San Diego

Postdoc

Asst. Dir. For Education PhD, Chemistry

Laura L. Tedder Center for Adv. El. Mat's. Proc.

NSF ERC, U. Colo. Boulder U. Calif. San Diego

North Carolina State University

MS, 1996

MS, ECE Dept.

Nabil Rabbani Intel Corporation Electrical and Computer Engineering

North Carolina State U.

North Carolina State University

MS, 1996

BS, MSE Dept.

Peter Joshua Wolf Intel Corporation Materials Science and Engineering

North Carolina State U.

North Carolina State University

MS, 1996

Monalisa Bora Actel Corporation Electrical and Computer Engineering

North Carolina State University

PhD, 1994

MS, Mechanical Eng.

Iqbal Shareef Watkins-Johnson Chemical Engineering

IBM, engineer

Rensselaer Polytechnic Institute



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