MEMS in Space by 8iyctnC3

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									         MEMS in Space

                 Jan H. Hales
               jhh@mic.dtu.dk
MIC – Department of Micro and Nanotechnology
    Technical University of Denmark, DTU

Space Technology Education Conference 2005
       Session 7: “ACDS and Orbit Control 2”




         STEC2005 – Jan H. Hales – 8th of April 2005
         Micro Electro Mechanical System
                       MEMS


   Integration of devices on micrometer scale
    based on IC batch processing




               STEC2005 – Jan H. Hales – 8th of April 2005
               Space Relevance

   Enhanced device performance by down-
    scaling
       Low mass and power consumption
       Robustness and redundancy
       Batch production – reducing device cost




                STEC2005 – Jan H. Hales – 8th of April 2005
                  Space Applications
   Sensors/detectors
       Sun sensor
       Magnetometer
       Particle/radiation detector
   Actuators
       Thrusters/micro valves
       Reaction wheels
       Magnetotorquers
       Micro valves
   Communication devices
       Optical
       RF
   Other
       Thermal control
       Lab-on-a-Chip
                   STEC2005 – Jan H. Hales – 8th of April 2005
              Projects at MIC

   Sun Sensor
   Electron Emitter
   Ion Thruster
   Nano Environment Monitoring Unit
                   (NEMU)




              STEC2005 – Jan H. Hales – 8th of April 2005
                                   Sun Sensor
                                                Two-Axis Triagular Slit Sensor
                     a


                     i
      b                                         FOV ±70° (>55°),
c            i O        l
                                                 resolution<0.1°
                                                PCB size: 39mm  50mm
                                                Sub System Mass: 7.1g
               2e



    Pyrex   SiO2          Sensor area           Power act./standby: 10mA/65µA
    Si      Cr/Au




                              STEC2005 – Jan H. Hales – 8th of April 2005
Sun Sensor on SSETI




  STEC2005 – Jan H. Hales – 8th of April 2005
Electron Emitter
                          Electrons

         E-field
                                    Gate


                                              Oxide layer


 Silicon with spikes




STEC2005 – Jan H. Hales – 8th of April 2005
                Electric Propulsion
   Electro thermal
   Electromagnetic
   Electrostatic
       Field Emission Electric
        Propulsion (FEEP)




                   STEC2005 – Jan H. Hales – 8th of April 2005
Ion Thruster - FEEP
Rh
                                    Design Goals
               de                        100 times better than
                                          comparable thrusters
     Ga/In                               1cm2 chip producing 1mN
                                          of thrust with a resolution
      2rc
                                          of 3.9µN
              Va
                                         Integrated neutralizer
                                    Applications
                                         Charge control
                                         Station keeping
                                         Fine pointing - formation
                                          flying
                                         Main propulsion system


      STEC2005 – Jan H. Hales – 8th of April 2005
          Ion Thruster - FEEP



  200µm




200µm

                                                    8µm


            STEC2005 – Jan H. Hales – 8th of April 2005
                        Outlook

   Obtain a larger student involvement
   Better packaged sun sensor
   Fabrication of final batch of e-emitters
   Optimised version of Ion thruster
   Initiation of the NEMU project



              STEC2005 – Jan H. Hales – 8th of April 2005
   MEMS in Space


Thank you for your attention



         Any questions?



   STEC2005 – Jan H. Hales – 8th of April 2005

								
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