Design Your Own Process
Instructions: Select desired Category, General Process, Tool, and Material from the drop-down menus. Enter your desired process parameters in the red boxes. For example, when it s
corresponding red box at the bottom of the section. If two desired property measurements are required, enter the first number in the first red box, and the second number in the seco
parameters, measured results, and calculations for the desired process will appear in the Parameters section. If no parameters appear, consult lab staff for necessary equipment inform
height or column width. Repeat this process for each step. Printer friendly version is available on seperate tab below.
GENERAL PROCESS
STEP CATEGORY TOOL MATERIAL PARAMETERS
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he red boxes. For example, when it says Enter desired film thickness (nm), enter the thickness in the
, and the second number in the second red box, leaving any unneeded spaces blank. The process
staff for necessary equipment information and process parameters. You may have to adjust row
ACTUAL
VERIFICATION NOTES
PARAMETERS
#REF! Deposition Etching Furnaces Lithography
#REF! ALD RIE LPCVD Spinners
#REF! Sputter DRIE Oxidation_Diffusion Aligners
#REF! Evaporation Dry_Isotropic Vapor_Prime
#REF! Parylene Wet_Etch Ovens
#REF! PECVD Hotplates
#REF! PR_Lift_Off
#REF!
#REF!
#REF! Chemical Wet_Bench RCA
#REF! Piranha
#REF! Solvent Solvent_Hood Acetone
#REF! Solvent_Hood IPA
#REF! Solvent_Hood Methanol
#REF! Spin_Rinse_Dryer diH2O
#REF! Plasma Oxford_80 O2_Plasma
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Packaging Cleaning CATEGORY GENERAL PROCESS TOOL
Dicing Chemical Deposition ALD Cambridge_Fiji_F200
Wirebonding Solvent Deposition Sputter Denton_Discovery_18
Wafer_Bonding Plasma Deposition Sputter TMV_Super
Laser_Ablation Deposition Evaporation Denton_SJ20C
Deposition Evaporation CHA_SEL600
Deposition Parylene SCS_PDS_2010
Deposition PECVD Oxford_80Plus
Etching RIE Lam_590_Poly Contact_Staff
Etching RIE Lam_590_SiO2_SiN Contact_Staff
Etching RIE Technics_PE_II_A Contact_Staff
Etching RIE Oxford_Plasmalab_80
Etching RIE Oxford_100_ICP
Etching DRIE Oxford_100_ICP_DRIE
Etching DRIE STS_ICP_ASE Contact_Staff
Etching Dry Isotropic XACTIX_X2_XeF2 Wet_Etch_Soln
Furnaces LPCVD Canary_3_SiN
Furnaces LPCVD Canary_4_Poly_Si
Furnaces Oxidation / Diffusion Canary_1_Oxidation
Furnaces Oxidation / Diffusion Canary_2_Diff_Annl
Lithography Spinners Solitec_5100_LVT
Lithography Spinners Solitec_5110_CND
Lithography Spinners Headway_EC101
Lithography Spinners CEE_100
Lithography Spinners APT_Polos
Lithography Aligners Suss_MA1006
Lithography Aligners EV_420
Lithography Aligners OAI_200_1
Lithography Aligners OAI_200_2
Lithography Vapor Prime YES_HMDS1
Lithography Vapor Prime YES_LP_III
Lithography Ovens Blue_M_1 N_A Process
Lithography Ovens Blue_M_2 N_A Paramete
Lithography Ovens Blue_M_3 N_A
Lithography Ovens Blue_M_4 N_A
Lithography Hotplates PR8_1 N_A
Lithography Hotplates PR8_2 N_A
PR8_3 N_A
PR8_4 N_A
Lithography Hotplates EMS_1000_1 N_A
Lithography Hotplates EMS_1000_2 N_A
Lithography Hotplates EMS_1000_3 N_A
Lithography Hotplates
Lithography Hotplates
Lithography PR_Lift_Off Lift_off_pre_dep
Lithography PR_Lift_Off Lift_off_post_dep
Packaging Dicing Disco_DAD3220
Packaging Dicing Disco_DAD641
Packaging Wirebonding MEI_Wedge Silicon
Packaging Wafer Bonding EVG_520_IS Polymer Contact_Staff
Packaging Laser Ablation Laser_Mark_4000_Nd_YAG Please contact lab staff
Packaging Laser Ablation Optec_Micromaster_KrF
for information regarding this tool.
Please contact lab staff
Please contact lab staff for information regarding this tool.
Contact_Staff
Enter time (min):
Enter temperature (°C):
Contact_Staff
for information regarding this tool.
Name: Project Name 11/7/2011
GENERAL ACTUAL
STEP CATEGORY TOOL MATERIAL PARAMETERS VERIFICATION
PROCESS PARAMETERS
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Name: Project Name 11/7/2011
GENERAL ACTUAL
STEP CATEGORY TOOL MATERIAL PARAMETERS VERIFICATION
PROCESS PARAMETERS
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Name: Project Name 11/7/2011
GENERAL ACTUAL
STEP CATEGORY TOOL MATERIAL PARAMETERS VERIFICATION
PROCESS PARAMETERS
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Name: Project Name 11/7/2011
GENERAL ACTUAL
STEP CATEGORY TOOL MATERIAL PARAMETERS VERIFICATION
PROCESS PARAMETERS
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GENERAL ACTUAL
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PROCESS PARAMETERS
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GENERAL ACTUAL
STEP CATEGORY TOOL MATERIAL PARAMETERS VERIFICATION
PROCESS PARAMETERS
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