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Sheet1 - Fab-Finder

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Sheet1 - Fab-Finder Powered By Docstoc
					                                                                                                                                                                                                                                         Tool
Item   FF #    Module              Type                    Model             Manufacture    Vintage   Fab Tool ID   Serial Number                                   Configurations, short summary
                                                                                                                                                                                                                                        Rating
                                                                                                                                     HTO-ONO-HTO process, missing quartz ring boat, has quartz profile TC, SiH4, N2O, Si2CL2, N2,
 1      44       Diff      VERTICAL CVD FURNACE           α-808SC                TEL         1995        w205       A00009510004                                                                                                          B
                                                                                                                                                                  UPS, dry pumps, scrubber, SW=english
                                                                                                                                    HTO-ONO-HTO process, ALL quartz incl. ring boat, has quartz profile TC, SiH4, N2O, N2, UPS, dry
 2      45       Diff      VERTICAL CVD FURNACE           α-808SC                TEL         1994        w206       A00009430005                                                                                                          A
                                                                                                                                                                       pumps, scrubber, SW=english
                                                                                                                                     Process Kits A, B, C, ESC, EPD, turbo, DSQ strip, dry pumps (Ebara A30W,AA40W) RF Gen: AE
 3      72      Etch            Metal Etcher            TCP9600SE            Lam Research    2002       W3761          42138                                                                                                              B
                                                                                                                                                         RGF 1250 X 3, chiller, exhaust trap, all cables. SW=eng
                                                                                                                                     Process Kits A, B, C, ESC, EPD, turbo, DSQ strip, dry pumps (Ebara A30W,AA40W) RF Gen: AE
 4      73      Etch            Metal Etcher            TCP9600-SE           Lam Research    2002       W3760          42137                                                                                                              B
                                                                                                                                                         RGF 1250 X 3, chiller, exhaust trap, all cables. SW=eng
                                                                                                                                        Complete system, twin monitors, printer, data collection system,work table, turbo controller,
 5     145      Metro             FE SEM                 JSM-6340F              JEOL         1997       TQ102       SM168010-35                                                                                                           B
                                                                                                                                                        vibration isolation, compressor, dry pumps, UPS, SW=Eng
 6     213      Metro           Ellipsometer               FE-4D               Rudolph       1995       W721           10616                Complete system, twin cassette stage atuo loading, PC monitor, printer, SW=Eng                A
 7     230      Metro          X-RAY FLUORE                S3630                Rigaku      1997        W295          2W0465          Complete system, auto loader, PC, monitor, dry pump, chiller, trans/UPS, power box, SW=Eng          A
 8     324      Test         Spectro-photometer          HP8452A                 HP          1994       W248        3104G02964                                 Main body, PC, monitor, parts set, SW=Eng                                  A
                                                                                                                                     Combo Mark 8 track 1C, 1CP, chemical cabinet, temp and humidity control system, mini furnace
 9     331    Thin Film      SOG-Cure SYSTEM        CT MK-8+mini furnace         TEL        1994        W310         MD-814174                                                                                                            B
                                                                                                                                                            cure, quartzware, chiller, 2 UPS units, SW=Eng
                                                                                                                                    3chbr SiO2 - cool chamber, front and rear monitors, SMC Chiller, RF generators (ENI OEM 12B x3),
10     336    Thin Film           Centura         Centura DxL (PECVD SiO2)      AMAT         2000       w4407          317809                                                                                                             B
                                                                                                                                             Ebara Dry Pumps (A30W x2, A70W x3, 5 total), Process Kits, English Software

                                                                                                                                      3 PECVD chbrs (SiO2-SiON-SiO2-ARC), has gas box, remote monitor, RF gen ENI OEM 12B,
 1      2     Thin Film            CVD               CENTURA 5200 DxL           AMAT         1997        avail         E-7222
                                                                                                                                      remote AC power rack, HE , ebara A30X2, Kashiyama SD600PV-31-50X3,all cables SW=Eng
                                                                                                                                    3 PECVD chbrs (SiO2/SiON-ARC), has gas box, remote monitor, RF gen ENI OEM 12B, remote AC
 2      3     Thin Film            CVD              CENTURA(3CHB) DxL           AMAT         1999        avail      C996/E-9240
                                                                                                                                          power rack, HE , ebara A30X2, Kashiyama SD600PV-31-50X3,all cables SW=Eng
                                                                                                                                      3 PECVD chbrs (SiH4, SiO2), has gas box, remote monitor, RF gen ENI OEM 12B, remote AC
 3      4     Thin Film            CVD              CENTURA(3CHB) DxL           AMAT         2000        avail          CA98
                                                                                                                                        power rack, HE , KashiyamaHC250X2, Kashiyama SD600PV-31-30X3,all cables SW=Eng
 4      26     Thin Film            CVD                    P-5000               AMAT         2000        avail          6948
 5      28      Metro           Review SEM            SEMVISION_CX              AMAT         2001        avail         W-863                                                upon request
 6      34    xBack End            Grinder               DFG-82IF/8             Disco        1990        avail        GG0126                                            upon request, parts tool
 7      35    xBack End            Grinder               DFG-82IF/8             Disco        1991        avail        GG0175                                                upon request
 8      41       Litho             Coater              SC-W80A-AVG               DNS         1995        avail       54700-2808                                             upon request
 9      42    Wet Clean       Spin Processor             SP-W813-U               DNS         1997        avail       56530-2539                                             upon request
10      56       Etch              Etcher              ALLIANCE9100          Lam Research    2000        avail          8788                                                upon request
11      58       Ash                Asher                 ASPEN2               Mattson       1996        avail           263                                                upon request
12      61      Metro           Microscope             X6PDER-UBD               Nikon        1990        avail         265868                                               upon request
13      62      Metro           Microscope             X6PDER-UBD               Nikon        1990        avail         265233                                               upon request
14      63      Metro           Microscope             X6PDUW-UBD               Nikon        1990        avail         264948                                               upon request
15      64      Metro           Microscope             X6PDUW-UBD               Nikon        1990        avail                                                              upon request
16      73      Metro                FIB                  SMI8800                 SII        1995        avail       089P0703                                               upon request
17      83       Litho             Coater                 CT MK-7                TEL         1996        avail      MD-715692
18      84       Litho             Coater                 CT MK-7                TEL         1997        avail      MD-7171115
19      89      Metals             LPCVD                  MB2-730                TEL         2000        avail       MCJ-181                                                  upon request
20      90      Metals             Sputter             MB2-830(TI/C)             TEL         1995        avail        MPJ-09                                                  upon request
21      91      Metals             Sputter            MB2-830(TI/TIN)            TEL         1997        avail        MPJ-023                                                 upon request
22      92      Metals             Sputter              MB2-830(TIN)             TEL         1996        avail        MPJ-016                                                 upon request
23      94       Etch           Dry Etching            TE-8600STRIE              TEL         1996        avail        K86447                                                  upon request
24      95       Etch          Oxide Etching              UN85DI                 TEL         2000        avail        U01128                                                  upon request
25      96       Etch          Oxide Etching              UN85DI                 TEL         2000        avail        U01400                                                  upon request
26      97       Etch          Oxide Etching              UN85DI                 TEL         2000        avail        U00973                                                  upon request
27      98       Etch          Oxide Etching              UN85DI                 TEL         2000        avail        U01133                                                  upon request
29     120       Litho            UV Cure            UMA-1002-HC93FW            Ushio        1996        avail        9511003                                                 upon request
30     127      Metro         Wafer Inspecsion             IS2600               Hitachi      2006        avail         12675                                                  upon request
32     130       Litho             Coater               SC-W80A-AV               DNS         1995        avail      54700-2811                                                upon request
33     133      Metro         Surface Analyzer        SURFSCAN 7600           KLA-Tencor     1995        avail       0295-494                                                 upon request

				
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