Valves
Data summary 420
Pipeline isolation valves
SP Speedivalve manual operation isolation valves -
NW flanges 421
SP manual operation isolation valves - NPT and BSP 422
IBV series vacuum ball valves 423
PVMK manual operation isolation valves 424
PVPK pneumatic operation isolation valves 425
PVEK solenoid operation isolation valves 427
LCPVEK solenoid operation isolation valves 429
SIPVP soft-start isolation valves 430
BRV backing/roughing valves 431
GV manual and pneumatic gate valves 432
GVA and AVA series aluminum gate and angle valves 435
Industrial quarter swing butterfly valves manual and
pneumatic 437
QSB quarter swing butterfly valves 439
Electropneumatic control valves 441
Air admit valves 10
PAGE
AV5A manual operation air admit valve 442 417
AV10K manual operation air admit valve 442
IPVA10EK solenoid operation air admittance valve 443
Needle valves
LV10K fine control needle valve 444
FCV10K extra fine control needle valve 444
shop online: www.bocedwards.com
The dimension drawings in this section display both metric and imperial measurements. Imperial measurements are shown in brackets.
Selection guide
VALVES FOR VACUUM SYSTEMS
When you design a vacuum system, your choice of valves will be deter-
mined by the need for certain operating parameters. The table on page 420
summarizes the essential performance data of the BOC Edwards vacuum
valves. When you choose a valve for your vacuum system, consider all of
the parameters listed in the left hand column of the table as described
below.
Actuation The choice is manual, solenoid or pneumatic, which will be
determined by your system design and what facilities are available to the
machine.
Leak tightness This is the maximum leak rate for the valve overall and
across the seat, and the choice of valve will be determined by the vacuum
operating level in your system.
Dirty system tolerance Vacuum valves have a differing ability to
remain leak tight in ‘dirty’ vacuum systems. If your system generates or
contains dust or other particulates, choose a valve with a high tolerance.
Size Choose a valve which complements the size of your vacuum pipe-
line. To maintain high pumping speeds and throughputs, do not reduce the
size of your pipeline to accommodate a smaller valve.
Cost If cost is the limiting factor in your system design, look for the valve
with the lowest cost which gives you the maximum performance.
Pressure range Both the maximum and minimum pressure rating are
important, particularly if the vacuum system is occasionally pressurized to
above atmospheric pressure.
Port configuration Depending on the location of the valve, you may
need either an in-line or a right angle valve.
Maximum baking temperature This is important if you intend to
Complete range bake your system or if it operates at high temperature.
Whatever the application, BOC Edwards has the right solution to meet Life The mean time to failure is important for solenoid and pneumatic
your process requirements. Well known for its innovation in pump design, valves in rapid cycle duties, or where you have extended maintenance
BOC Edwards applies the same energy and commitment to its valves. The intervals.
result is an extensive range of valves, with a choice of actuation methods, Relative conductance Choose a high conductance valve when high
materials and size. Materials of construction have been uncompromisingly flow or throughput conditions exist or when pumpdown time is important.
selected for performance in high vacuum. Position indication You may need local or remote indication of valve
Confidence in BOC Edwards valves begins early in the design process. We position as part of your control system.
use techniques such as Finite Element Analysis to optimize the design of Closure speed Use either a solenoid valve or pneumatic valve if you
the valve. An arduous testing program in our environmental testing labo- must have rapid valve closure.
ratory prior to release to production ensures that every valve we supply
Corrosion resistance Valves are available in stainless steel for those
will meet the needs of your application. Once in production, all valves are
applications that process corrosive gases.
10 subject to stringent quality control and are individually tested with a helium
mass spectrometer leak detector.
PAGE
418 Bellows sealed pipeline valves are manufactured with 100% grease free ‘O’
rings exposed to vacuum delivering unrivalled low contamination levels.
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
Solenoid operation isolation Pneumatic bellows sealed
valve isolation valve
• MTTF up to 500,000 cycles • 5,000,000 cycle MTTF
• Circuit protection against transient low • Stainless steel or aluminum bodies
voltages available
• Low energy consumption and operating • ‘O’ ring shaft seal option
temperature • In-line or right-angle versions
• In-line or right-angle versions See page 425.
See page 427.
Soft-start isolation valve Pneumatic ‘O’ ring sealed
• High reliability 5,000,000 cycles isolation valve
• Fast acting typically 41 ms (PV25) • Fast acting - 20 ms to close (PV16)
• Position indicating microswitch standard • Electrical and visual indication of valve
• Bellows sealed for clean operation status
See page 430. • Optional integral solenoid valve
• Lightest valve and smallest envelope
See page 425.
SP Speedivalve diaphragm Gate valve
isolation valve • Electropolished inside and out
• Extremely rugged and ‘dirty’ system • High reliability - 1,000,000 cycle option
tolerant • Optional 3 position operation
• Will withstand 9 bar overpressure • Vacuum brazed to 1100°C to eliminate
(with Co-Seal) virtual leaks
• Easily serviced with choice of diaphragm See page 432.
VALVES
materials
• Visual indication of valve open
See page 421.
QSB Quarter swing butterfly Air admittance valve
valves • Normally open or normally closed 10
version PAGE
• Pneumatic or manual operation 419
• High conductivity • Small envelope
• Resists atmosphere in either direction • IP65 protection with wide voltage
• Compact and quick acting options
• MTTF 100,000 cycles
See page 439.
See page 443.
Industrial butterfly valves IBV ball valves
• Rugged and dirty system tolerant • High conductance full bore pumping
• Manual or pneumatic options • Rugged and dirty system tolerant
• Optional position indicators • Corrosion resistant construction
• MTTF 30, 000 cycles • NW flanges or BSP threaded versions
See page 423.
see page 437.
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
420
PAGE
10
BOC EDWARDS VACUUM VALVES: DATA SUMMARY
BELLOWS SEALED BELLOWS SEALED ‘O’ RING SEALED SOFT - START DIAPHRAGM SEALED BALL VALVES BACKING - GATE VALVES INDUSTRIAL SWING QUARTER SWING AIR ADMITTANCE NEEDLE
PARAMETER ALUMINUM STAINLESS STEEL ALUMINUM ROUGHING VALVES VALVES VALVES VALVES VALVES
Page reference 424, 425, 427 424, 425, 427 425, 435 430 421 423 431 432, 435 437 439 442 444
Actuation1 m, e, p m, e, p p p m m m, p m, p m, p m, p m, e m
Leak tightness (mbar l s -1)/ 5 000 0008 >5 000 000 & >5 000 000 & >5 000 000 - 30 000 100 000 100 000/30 000 30 000 150 000 100 000 -
100 0008 100 0008
Relative medium medium medium medium low high low very good good good not not
conductance applicable applicable
Position yes yes yes yes yes yes yes yes yes yes no yes
indication
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
Rapid/controlled closure rapid (e, p) rapid (e, p) rapid rapid controlled controlled rapid (p) rapid, damped (p) either either rapid (p) not
controlled (m) controlled (m) controlled (m) controlled (m) controlled (m) applicable
Corrosion no yes yes no no yes no yes yes yes no no
resistant
1 m = manual; e = solenoid; p = pneumatic 5 Not solenoid operated valves
2 Scale is 1 - 5; tolerance higher than 1 indicates an increasing ability to tolerate dirty systems 6 Without actuator
3 Above atmospheric pressure, use Co-Seal or trapped ‘O’ ring 7 MTTF - mean time to failure
4 With Co-Seal 8Depends on valve size
SP10K, SP16K, SP25K AND SP40K
SP SPEEDIVALVE MANUAL OPERATION
ISOLATION VALVES - NW FLANGES
4 x M4 x G
A
B
C
F
D
E
A B C D E F G
MODEL OPEN CLOSED
SP10K 71 64 33.5 42 60 NW10 8
SP16K 71 64 33.5 42 80 NW16 8
SP25K 123 111 51 67 100 NW25 12
SP40K 130 - - 105 130 NW40 -
ORDERING INFORMATION
PRODUCT DESCRIPTION ORDERING NUMBER
• Easy to operate with visual indication of valve open (SP10K to SP25K) Speedivalve SP10K
• Leak tight to better than 10-6 mbar l s-1 / 8 x 10-7 Torr l s-1 Nitrile diaphragm C331-05-000
• Diaphragm completely isolates mechanism from vacuum system Fluoroelastomer diaphragm C331-55-000
• Extremely rugged and ‘dirty’ system tolerant Speedivalve SP16K
• Will withstand 9 bar overpressure (SP10K to SP40K, with Co-Seal) Nitrile diaphragm C332-05-000
BOC Edwards SP Speedivalves are diaphragm sealed in-line, isolation Fluoroelastomer diaphragm C332-55-000
valves available in nominal bore sizes of 10, 16, 25 and 40 mm. They are all
Speedivalve SP25K
similar in construction and consist essentially of a flexible elastomer dia-
phragm which is sealed onto a lightly polished seat by a screw thread
Nitrile diaphragm C333-05-000
mechanism. The mechanism is isolated from the system by the diaphragm Fluoroelastomer diaphragm C333-55-000
resulting in an extremely rugged and system tolerant valve. Speedivalve SP40K
The valve body is made from aluminum and the complete valve is leak tight Nitrile diaphragm C334-05-000
to better than 10-6 mbar l s-1 / 8 x 10-7 Torr l s-1 at 1 bar differential. Dia- Fluoroelastomer diaphragm C334-55-000
phragms are available in nitrile and fluoroelastomer. The valves terminate
VALVES
SPARES ORDERING NUMBER
in NW flanges and the SP10K, SP16K and SP25K valves can be pipeline sup- SP10K and SP16K diaphragm
ported or panel mounted. These valves have indicators to show the ‘open’
Nitrile C331-05-800
position. The SP40K is suitable for pipeline mounting only.
Fluoroelastomer C331-55-800
TECHNICAL DATA SP25K diaphragm
Nitrile C333-05-800
Construction materials Fluoroelastomer C333-55-800 10
Body Aluminum alloy to BS1490 SP40K diaphragm PAGE
Handwheel and bonnet Glass reinforced plastics 421
Diaphragms Nitrile or fluorelastomer
Nitrile C334-05-800
Leak rate (1 bar / 14.5 psi differential) Fluoroelastomer C334-55-800
Valve (overall and across seat) 10- 6 mbar l s- 1 / 8 x 10-7 Torr l s-1
Coupling 10- 7 mbar l s- 1 / 8 x 10-8 Torr l s-1
Molecular conductance
SP10K, SP16K 1.7 l s- 1
SP25K 9.0 l s - 1
SP40K 23.3 l s- 1
Pressure rating using Co-Seal
SP10K, SP16K, SP25K, SP40K 9 bar / 131 psi
Panel thickness 3 mm / 0.117 in maximum
Weight
SP10K 230 g / 8.1 oz
SP16K 240 g / 8.4 oz
SP25K 760 g / 26.6 oz
SP40K 2300 g / 80.5 oz
Baking temperature 60 °C
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
SP MANUAL OPERATION ISOLATION ORDERING INFORMATION
VALVES - NPT AND BSP
PRODUCT DESCRIPTION ORDERING NUMBER
SP25T Speedivalve
1/2" BSP Nitrile C333-05-100
1/2" NPT Nitrile C333-05-200
1/2" BSP Fluoroelastomer C333-55-100
1/2" NPT Fluoroelastomer C333-55-200
3/4" BSP Nitrile C333-05-300
3/4" NPT Nitrile C333-05-400
3/4" BSP Fluoroelastomer C333-55-300
3/4" NPT Fluoroelastomer C333-55-400
SP40T Speedivalve
3/4" BSP Nitrile C334-05-100
3/4" NPT Nitrile C334-05-200
3/4" BSP Fluoroelastomer C334-55-100
3/4" NPT Fluoroelastomer C334-55-200
1" BSP Nitrile C334-05-300
1" NPT Nitrile C334-05-400
The Speedivalve range of isolation valves has been extended to include
NPT and BSP variants.
1" BSP Fluoroelastomer C334-55-300
• Leak tight to better than 10-6 mbar l s-1 / 8 x 10-7 Torr l s-1 1" NPT Fluoroelastomer C334-55-400
• Diaphragm completely isolates mechanism from vacuum system
• Extremely rugged and ‘dirty’ system tolerant
• Will withstand 9 bar overpressure (with Co-Seal)
The valve body is made from aluminum and the complete valve is leak tight
to better than 10-6 mbar l s-1 / 8 x 10-7 Torr l s-1 at 1 bar differential. Dia-
phragms are available in nitrile and fluoroelastomer. The SP25T can be
both pipeline supported or panel mounted. The SP40T is suitable for pipe-
line mounting only.
SP25T and SP40T
4 x M4 x G
A
B
C
F
10 D
PAGE E
422
A B C D E F G
MODEL OPEN CLOSED
SP25T 120 108 51 67 100 ½" & ¾" BSP/NPT 12
SP40T 130 - - 105 130 ¾" & 1" BSP/NPT -
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
IBV SERIES VACUUM BALL VALVES
H
L/2
M
L
E
Ball valves are popular in applications where fast action and full bore pump-
ing are needed. The new BOC Edwards IBV series valves combine these
practical everyday features plus ease of use and economy in a high specifi-
cation design. Manufactured in 316L stainless steel with PTFE seats they MODEL E H L M FLANGE
deliver robust performance in a wide variety of vacuum duties. IBV16MKS 120 56 92.5 NW10/16
The precision engineered ball and PTFE cups contribute to reliable flow IBV16MS ½" BSP 120 56 59.7 ½" BSP
control in a high quality construction. This makes them ideal for applica- IBV25MKS 148 70 118.5 NW25
tions spanning simple vacuum pump isolation to vacuum control in a pro- IBV25MS 1" BSP 148 70 82.8 1" BSP
duction, OEM, or industrial laboratory environment. IBV40MKS 164 84 166.5 NW40
‘O’ ring sealed NW flanged models, used with the unique BOC Edwards IBV40MS 1½" BSP 164 84 111 1½" BSP
Co-Seal, are rated for pressure duties up to 7 bar absolute. Threaded ver- IBV50MKS 164 94 175.5 NW50
sions are also available for easy connection into rough vacuum applications. IBV50MS 2" BSP 164 94 125 2" BSP
Benefits
• Low capital cost ORDERING INFORMATION
• Convenient NW16, 25, 40, 50 sizes
VALVES
PRODUCT DESCRIPTION ORDERING NUMBER
• Optional BSP threaded versions
IBV16MKS C360-00-100
• Easy to use manual operation
• High conductance full bore pumping IBV16MS ½ " BSP C360-00-110
• Rugged design for dirty system use IBV25MKS C360-00-200
• Corrosion resistant construction IBV25MS 1" BSP C360-00-210
• Leak tight to better than 1 x 10-6 mbar I s-1 / 8 x 10-7 Torr l s-1 IBV40MKS C360-00-300
• Wide operating range 10-6 mbar to 7 bar / 8 x 10-7 - 5250 Torr (102 psi) IBV40MS 1½ " BSP C360-00-310 10
IBV50MKS C360-00-400 PAGE
TECHNICAL DATA 423
IBV50MS 2" BSP C360-00-410
Construction materials
Body AISI 316L stainless steel
Ball AISI 316L stainless steel
Cups PTFE
Leak rate 1 x 10-6 mbar I s-1 / 8 x 10-7 Torr l s-1
Molecular conductance
IBV16MKS 5.3 I s-1
IBV25MKS 15.9 I s-1
IBV40MKS 46.5 I s-1
IBV50MKS 86.0 I s-1
Pressure rating (bar absolute) using NW Co-Seal
IBV16MKS 7 bar / 102 psi
IBV25MKS 7 bar / 102 psi
IBV40MKS 7 bar / 102 psi
IBV50MKS 7 bar / 102 psi
Ambient operating temperature range 5 to 65 °C
Reliability MTTF 30,000 cycles
Weight MKS MS
IBV16 1200 g / 2.6 lbs 750 g / 1.7 lbs
IBV25 1750 g / 3.9 lbs 1500 g / 3.3 lbs
IBV40 3100 g / 6.8 lbs 2600 g / 5.7 lbs
IBV50 4300 g / 9.4 lbs 3600 g / 7.9 lbs
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
Dimensions in mm
PVMK MANUAL OPERATION ISOLATION
MODEL A B C D E F G H
VALVES IPV/PV10MK 30 76.5 105 38 38 NW10 - -
IPV/PV16MK 40 85.6 114 38 38 NW16 70 99
IPV/PV25MK 50 120 149 51 51 NW25 112 141
IPV/PV40MK 65 169 222 86 77 NW40 155 208
PV50MK 70 186 239 86 89 NW50 - -
Dimensions in inches
MODEL A B C D E F G H
IPV/PV10MK 1.17 2.98 4.1 1.48 1.48 NW10 - -
IPV/PV16MK 1.56 3.34 4.45 1.48 1.48 NW16 2.73 3.86
IPV/PV25MK 1.95 4.68 5.81 1.99 1.99 NW25 4.37 5.5
IPV/PV40MK 2.54 6.59 8.66 3.35 3.0 NW40 6.05 8.11
PV50MK 2.73 7.25 9.32 3.35 3.47 NW50 - -
The PVMKA (aluminum body) and PVMKS (stainless steel body) are quick
acting, lever operated valves. The lever, connected to a self-lubricating
plastic cam-piston, actuates the valve stem and valve plate through PTFE
ORDERING INFORMATION
bearings. The valve plate ‘O’ ring groove is vented to prevent gas bursts. PRODUCT DESCRIPTION ORDERING NUMBER
The valves are designed to operate down to 10- 9 mbar / 8 x 10-10 Torr IPV16MKA in-line C412-18-000
and up to a pressure of 2100 mbar / 1575 Torr (30 psi). IPV25MKA in-line C413-21-000
• Right angle and in-line versions available IPV40MKA in-line C414-20-000
• Bellows sealed grease free vacuum
IPV16MKS in-line C412-19-000
• Aluminum or stainless steel options
IPV25MKS in-line C413-22-000
IPV40MKS in-line C414-21-000
TECHNICAL DATA
PV10MKA right-angle C311-05-000
Construction material PV16MKA right-angle C312-05-000
Body HE30TF grade aluminum PV25MKA right-angle C313-05-000
or AISI 304 grade stainless steel PV40MKA right-angle C314-05-000
Bellows AISI 316L stainless steel PV16MKS right-angle C312-15-000
‘O’ ring Fluoroelastomer
Leak rate 7 x 10-3 mbar l s-1 /
• High conductance full bore pumping 8 x 10-4 Torr l s-1
• Corrosion resistant construction Molecular conductance
• Leak tight to better than 1 x 10-3 mbar l s-1 / 8 x 10-4 Torr l s-1 QVA025 250 l s-1
• ASA flanges QVA040 680 l s-1
2300 l s-1
VALVES
QVA060
• Integral flange seals
Ambient operating temperature range -18 to 100 °C
• Manual and pneumatic actuation options
Reliability MTTF 30,000 cycles
• Optional position indicators
• Easily replaced vacuum seals Actuators
Modern industrial vacuum systems often generate a cocktail of process The actuators are rack and pinion opposed-piston units available in spring
conditions that present designers with difficult design choices. Abrasive return or double acting versions. The spring return models employ a
particulates in the gas stream can be detrimental to good sealing tech-
niques whilst corrosive gases can destroy vacuum integrity leading to rapid
unique cartridge system that offers safety, simplicity and compactness.
Manual operation is also available.
10
PAGE
valve leakage and poor lifetime. 437
Microswitch position sensors
To control external vacuum process management and detect valve status
two microswitches detect valve open/closed status. A pointer also gives a
visual warning. The microswitch box is suited to switching higher current
To combat these aggressive conditions BOC Edwards now offers well signals.
proven design solutions from the process chemical industry optimized for
vacuum applications. The QV series industrial butterfly valves are ideal for TECHNICAL DATA
industrial process where conventional vacuum valves fail through particu-
late contamination or corrosive attack. Enclosure rating NEMA4,4X.IP65
Switch contacts SPDT 15A 120 / 250 V ac
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
Proximity position sensors Dimensions in mm
A B C D E F H J K L
QVA025 106 46 64 85 152 90 10 32 49 59
QVA040 154 52 102 131 178 90 11 32 91 87
QVA060 206 56 146 178 203 90 13 32 138 120
G = 20, H = 10, J = 40, K = 88, L = 19, M = 59
Lug bolting data
PCD 145 180 240
No holes 4 8 8
Threads MI6 MI6 M20
ORDERING INFORMATION
These provide reliable valve status sensing using solid state inductive :
devices. They are ideal for interfacing to computer controlled vacuum Valve seat material
installations giving bounce free contacts with no moving parts. Integral 0 Viton seat
LED’s provide visual status indication and a yellow pointer shows local 1 Nitrile seat
valve travel position. Supplied with a cable pigtail and user-wired plug and 2 EPDM seat
socket.
Valve solenoid
TECHNICAL DATA 0 No solenoid valve
1 24 V ac solenoid
Supply voltage AC SENSOR DC SENSOR 2 110 V ac solenoid
Supply voltage 20-250 Vac 1- 30 Vdc 3 220 V ac solenoid
Line frequency 40-60 Hz - 4 24 V dc solenoid
Load current 500 mA 200 mA
Inrush current 0.7A / 2 cycled (33 ms) Valve size
Leakage current 1.7 mA 20 A 0 QVA020 (2 in)
Voltage drop 6V 1.8 V
1 QVA025 (2.5 in)
Output status 2 LED red 2 LED red
Output function normally open normally open 2 QVA040 (4 in)
Switching frequency 20 Hz 1000 Hz 3 QVA060 (6 in)
Temp range -25 °C - +70 °C -25 °C - +70 °C 4 QVA030 (3 in)
Protection class IP67 IP67 7 QVA080 (8 in)
8 QVA100 (10 in)
A range of pneumatic control solenoids is available, correctly pre-wired 9 QVA120 (12 in)
into the valve and any position sensor circuit specified.
To select a valve use the ordering matrix. BOC Edwards uses this to
assemble a pre-tested valve ready for installation.
- -
10 Larger sizes are available on request. C 3 6 0 0
PAGE
438
Valve actuation
1 Manual valve
2 Single acting cylinder spring return
3 Single acting cylinder spring return with microswitches
4 Single acting cylinder spring return with ac proximity
5 Single acting cylinder spring return with dc proximity
6 Double acting cylinder
7 Double acting cylinder with microswitches
8 Double acting cylinder with ac proximity
9 Double acting cylinder with dc proximity
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
QSB QUARTER SWING BUTTERFLY ØA
VALVES MANUAL AND PNEUMATIC Cx
Ø9 (0.35) (63, 100)
Ø11 (0.43) (160, 250) ØB
1
K ØL E
J* F
The QSB quarter swing valves are compact, quick acting, high conductance
isolation valves. The QSB valves have a polished, stainless steel, ISO flanged
G H
body with fluoroelastomer ‘O’ ring sealed valve plate and shaft. The valve
plate ‘O’ ring groove is vented to help maintain a stable high vacuum. The
valve shaft ‘O’ rings and bearings are lubricated with Fomblin grease to I
prevent gas bursts from behind the shaft seals.
1 Actuator cylinder support bracket (QSB63P, QSB100P and QSB160P only).
The pneumatic operation valves each have microswitches to indicate when
the valve is open or closed. The QSB63P, QSB100P and QSB160P valves Dimensions in mm
have a double acting actuator to open and close the valve. The QSB250P VALVE A B C E F G H I J K L
valve has a single acting actuator to open the valve and a spring to close QSB63 130 63 4 111 130 23.5 24.5 19 - - 110
the valve. The actuator link of all pneumatic operation valves is enclosed QSB63P 130 63 4 105 - 23.5 24.5 19 235 108 110
by a safety cover. Electropneumatic control valves are available as optional QSB100 165 96 8 125 130 26 41 33 - - 145
accessories (see page 441): use 5-port control valves for the double acting QSB100P 165 96 8 123 - 26 41 33 238 126 145
actuator on the QSB63P, QSB100P and QSB160P valves and use 3-port QSB160 225 142.5 8 170 180 43.5 55 48.5 - - 200
control valves for the single acting actuator on the QSB250P valve. Use QSB160P 225 142.5 8 166 - 43.5 55 48.5 263 166 200
Co-Seals for flange sealing. QSB250 335 250 12 242 215 57 104.5 95.5 - - 310
QSB250P 335 250 12 230 - 57 104.5 95.5 -3371 224 310
TECHNICAL DATA 1 QSB250P pneumatic actuator is to the right of the valve shaft
Valve plate material AISI 304 stainless steel Dimensions in inches
Operating pressure range 10-9 - 3000 mbar / 8 x 10-10 - 2250 Torr
VALVES
VALVE A B C E F G H I J K L
Maximum pressure differential 1000 mbar / 750 Torr
QSB63 5.07 2.46 0.16 4.33 5.07 0.92 0.96 0.74 - - 4.29
Operating temperature range 5 - 40 °C
Maximum baking temperature 200 °C (without actuator) QSB63P 5.07 2.46 0.16 4.10 - 0.92 0.96 0.74 9.17 4.21 4.29
Leak rate 1.5 105 cycles QSB160P 8.78 5.56 0.31 6.47 - 1.70 2.15 1.89 10.26 6.47 7.80
Pneumatic connectors !/8 in BSP, for 6mm OD tube QSB250 13.07 9.75 0.47 9.44 8.39 2.22 4.08 3.72 - - 12.09 10
Number of connectors QSB250P 13.07 9.75 0.47 8.97 - 2.22 4.08 3.72 -14.70 8.74 12.09 PAGE
NuQSB63, QSB100, QSB160 2 439
NuQSB250 1 1 QSB250P pneumatic actuator is to the right of the valve shaft
Microswitch rating 5 A at 48 V
Microswitch connectors
NuQSB63, QSB100, QSB160 Solder tags
NuQSB250 Screwed connector
QSB63 QSB100 QSB160 QSB250
VALVE QSB63P QSB100P QSB160P QSB250P
Flange size ISO63 ISO100 ISO160 ISO250
Conductance1 (l s- 1) 420 1250 2700 13000
Operating torque2 (Nm) 4 5.4 7.5 19.5
Pneumatic pressure3(bar)
Recommended 2.8 to 4.2 4 to 6
Minimum 2.4 3.8
Maximum 7
Pneumatic pressure3(psi)
Recommended 40.6 to 61 58 to 87
Minimum 34.8 55
Maximum 101.5
1 Conductance of equivalent tube length
2 manual operation
3 pneumatic operation
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
ORDERING INFORMATION
PRODUCT DESCRIPTION ORDERING NUMBER
QSB63 manual operation1 B424-02-000
QSB63P double pneumatic operation1 B424-03-000
QSB100 manual operation1 B426-02-000
QSB100P double pneumatic operation1 B426-03-000
QSB160 manual operation1 B428-02-000
QSB160P double pneumatic operation1 B428-03-000
QSB250 manual operation2 B430-02-000
QSB250P single pneumatic operation2 B430-03-000
1
Supplied with 1 Co-Seal
2 Supplied with 1 trapped ‘ O’ ring
SPARES ORDERING NUMBER
QSB63/QSB63P valve
Butterfly plate ‘ O’ ring (fluoroelastomer) H021-06-161
Shaft seal ‘ O’ ring (5) (fluoroelastomer) H021-06-010
QSB100/QSB100P valve
Butterfly plate ‘ O’ ring (fluoroelastomer) H021-06-055
Shaft seal ‘ O’ ring (5) (fluoroelastomer) H021-06-010
QSB160/QSB160P valve
Butterfly plate ‘ O’ ring (fluoroelastomer) H021-06-208
Shaft seal ‘ O’ ring (5) (fluoroelastomer) H021-06-011
QSB250/QSB250P valve
Butterfly plate ‘ O’ ring (fluoroelastomer) H021-06-095
Shaft seal ‘ O’ ring (2) (fluoroelastomer) H021-06-121
For information about electropneumatic control valves, see page 441. Use
5-port control valves for QSB63P, QSB100P and QSB160P valves; use
3-port control valves for the QSB250P valve. For information about suit-
able Co-Seals, ‘O’ rings and spacers, see section ‘Vacuum system compo-
nents’ on page 445.
10
PAGE
440
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
ELECTROPNEUMATIC CONTROL ORDERING INFORMATION
VALVES
PRODUCT DESCRIPTION ORDERING NUMBER
Electropneumatic control valves can be used to control the operation of EUROPE N. AMERICA
pneumatically activated vacuum valves. Control valves are available in !/8 inch BSP 3-port control valves
3-port, 4-port and 5-port versions and with different electrical supply 24 V dc H062-00-124 H062-00-124
voltages and frequencies to suit your application. 48 V dc N/A H062-00-130
24 V ac 50/60 Hz H062-00-125 H062-00-125
RECOMMENDED 48 V ac 50/60 Hz H062-00-129 H062-00-129
CONTROL VALVE FIGURE
VALVE VALVE TYPE CONFIGURATION NUMBER 100 V ac 50/60 Hz H062-00-131 H062-00-131
GV gate valves Double-acting 1 5-port lw 3 110 V ac 50/60 Hz H062-00-126 H062-00-126
cylinder with no 220 V ac 50/60 Hz H062-00-127 H062-00-127
spring return 240 V ac 50/60 Hz H062-00-128 H062-00-128
PVPK pipeline valves Single-acting 1 3-port 1 WITHOUT BRACKET WITH BRACKET
soft start cylinder with spring 6 mm BSP 5-port lightweight control valves
return
24 V ac 50/60 Hz B287-03-030 U300-03-426
QSB 250P Double-acting 2 5-port lw 21 24 V dc N/A U300-05-035
BRV backing/ cylinder with
roughing valve spring return to the 1 5-port 42
100 V ac 50/60Hz B287-03-045 U300-04-034
mid-position (that is, 110 V ac 50/60 Hz B287-03-031 B287-03-022
isolated position) 230 V ac 50/60 Hz B287-03-032 B287-03-025
QSB63/100/160 Double-acting 1 5-port 4 !/4 inch BSP 5-port control valves
quarter swing cylinder with no 110/120 V ac 50/60 Hz H062-00-104 H062-00-104
butterfly valves, spring return 220/225 V ac 50/60 Hz H062-00-105 H062-00-105
Diffstak isolation-valves
230/250 V ac 50/60 Hz H062-00-106 H062-00-106
1 This configuration allows the use of the isolated position of the vacuum valve.
2 This configuration only allows the use of the roughing and backing positions of the vacuum valve.
Key to diagrams: 1 Control valve 2 Vacuum valve
2
1
1 1
VALVES
2
Figure 1 - Pneumatic circuit for 3-port
control valve
Figure 2 - Pneumatic circuit for two 5-port
lightweight control valves
10
PAGE
441
1
1
2 **
2 2*
Figure 3 - Pneumatic circuit for 5-port Figure 4 - Pneumatic circuit for 5-port
lightweight control valve control valve
1 QSB valve fail-safe closed
2 QSB valve fail-safe open
TECHNICAL DATA
We recommend that you fit a shut-off valve, filter and pressure regulator to the
pneumatic supply. In addition, the 5-port valves require a lubricator.
BOC Edwards does not supply these items.
3-PORT 5-PORT lw 5-PORT
Pneumatic supply pressure
bar gauge 2.1- 8 3.4-4.8 2.4-7
psig 30-115 50-70 35-100
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
AV5A MANUAL OPERATION AIR ADMIT AV10K MANUAL OPERATION AIR ADMIT
VALVE VALVE
The AV5A is manufactured in aluminum alloy. It has a control knob The AV10K is manufactured in aluminum alloy. It has a control knob
attached to a screw-actuated plunger: turn the control knob clockwise to attached to a screw-actuated plunger: turn the control knob clockwise to
close the valve. A nitrile ‘O’ ring seals the plunger to the valve body. close the valve. A nitrile ‘O’ ring seals the plunger to the valve body.
The valve can be connected directly, pipeline supported or panel mounted, The valve can be pipeline supported only, and is connected to the vacuum
and is connected to the vacuum system with the BOC Edwards SC5 cou- system with an NW10 fitting.
pling (supplied).
TECHNICAL DATA
TECHNICAL DATA
Materials of construction
Materials of construction Body HE30 aluminum
Body HE30 aluminum / nickel plated brass Control knob Nylon 6
Plunger HE30 aluminum Seal Nitrile
Seal Nitrile Leak rate across seat 10-7 mbar l s-1 / 8 x 10-8 Torr l s-1
Leak rate across seat 10-7 mbar l s-1 / 8 x 10-8 Torr l s-1 Leak rate through body 10-1 mbar l s-1 / 8 x 10-2 Torr l s-1
Leak rate through body 10-1 mbar l s-1 / 8 x 10-2 Torr l s-1 Vacuum connections NW10
Panel mounting Ø 17 mm / Ø 0.66 in hole, 3 mm / 0.117 in Weight 100g / 3.5 oz
maximum thickness
Vacuum connections SC5 couplings or £/8 inch BSP threaded body Ø26 (1.02)
and bonded seal
Weight 85g / 3 oz
37.5 - 42 (1.48 - 1.65)
Ø26
10
PAGE
23.5 - 28
442
Ø30 (1.18)
53 - 57.5
ORDERING INFORMATION
PRODUCT DESCRIPTION ORDERING NUMBER
27
AV10K air admit valve C351-03-000
Spare ‘ O’ ring H021-25-115
ORDERING INFORMATION
PRODUCT DESCRIPTION ORDERING NUMBER
AV5A air admit valve C350-03-000
Spare ‘ O’ ring H021-25-115
Spare bonded seal H021-04-003
Valve supplied with one coupling nut, screwed body, ‘ O’ ring carrier and ‘ O’ ring
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
IPVA10EK SOLENOID OPERATION AIR 64.5 (2.54) 32 (1.26)
ADMITTANCE VALVE
(0.27)
16
7
15 (0.63)
(0.59)
29 (1.14)
53 (2.09)
29 (1.14)
(0.59)
15
34 (1.34)
60 (2.36)
ORDERING INFORMATION
PRODUCT DESCRIPTION ORDERING NUMBER
IPVA10EK valve, normally open
240 V ac C417-21-000
110 V ac C417-22-000
24 V dc C417-23-000
24 V ac C417-24-000
12 V dc C417-25-000
The IPVA10EK is a solenoid operated valve designed for automatic admit-
IPVA10EK valve, normally closed
tance of air or vent gas into a vacuum system. The valve has two ports with
240 V ac C417-31-000
NW flanges. One of the valve ports is connected to the vacuum system,
the other port can be left open to atmosphere or connected to a vent gas 110 V ac C417-32-000
supply. The vacuum system is isolated from atmosphere (or the vent gas 24 V dc C417-33-000
supply) by a fluoroelastomer pad on the base of the valve plunger, which 24 V ac C417-34-000
seals against the body of the valve. 12 V dc C417-35-000
Normally open and normally closed versions of the valve suitable for use
with different electrical supplies are available to suit your application.
VALVES
TECHNICAL DATA
Operating temperature range -20 to 55 °C
Vent gas temperature range -10 to 130 °C
Venting rate 10 liters in 12 s
Response time
Maximum cycle frequency
30 ms
100 min-1
10
PAGE
Reliability (MTTF) 105 cycles 443
Leak rate 1 x 10-9 mbar l s-1 / 8 x 10-10 Torr l s-1
Electrical supply 12 V, 24 V, 110 V, 240 V ac
1-phase 50 / 60 Hz, or 12 V, 24 V dc
Power
ac supply 9.3 VA inrush 6.3 VA hold
dc supply 5W
Enclosure rating IP65
Weight 310 g / 11 oz
Materials of construction
Body Aluminum
Valve seal Fluoroelastomer
Actuator Stainless steel
Coil insulation Class F
The air or vent gas path through the valve is free from heavy metals.
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800
LV10K FINE CONTROL NEEDLE VALVE FCV10K EXTRA FINE CONTROL NEEDLE
VALVE
The LV10K needle valve provides fine control of gas bleed into a vacuum
chamber or a regulated leak to control pressure in a vacuum system and
is suitable for gas admission down to 10- 5 mbar / 8 x 10-6 Torr. Suitable
for pipeline or panel mounting.
This needle valve is suitable for accurately controlled gas admission in the
range 10- 3 to 10- 6 mbar / 2 x 10-3 - 8 x 10-7 Torr. It is fitted with a 20-
turn ‘counting dial’ control knob to allow repeatable flow rates to be set
when required. Linear actuation of the needle within the orifice results in
Ø62 (2.44)
a high degree of control with prolonged needle and orifice life. The
FCV10K is suitable for pipeline or panel mounting.
We recommend the use of an in-line filter on the inlet side of the valve to
prevent damage to the valve by dust or grit
31
(1.22)
Ø46 (1.81)
88.5 (3.48)
57 (2.24)
54
(1.77)
1.6 (0.06)
(2.13)
45
30 (1.18)
4 x M3
30 (1.18) NW10
19 (0.75)
107 (4.21)
Ø9.6
(0.38)
TECHNICAL DATA
77 (3.03)
Materials of construction
37.7 (1.48)
Body Aluminum HE30
Seat Brass BS2784 C2112
10 Needle Martensitic stainless steel EN56AM
Ø3 (0.12)
PAGE
444
Filter Brass BS249
22 (0.87)
Maximum flow rate (approx)* 0.1 l s-1
Maximum inlet pressure 2000 mbar / 1500 Torr
Maximum leak rate, across seat 10-7 mbar l s-1 / 8 x 10-8 Torr l s -1
Maximum leak rate, across body 10-7 mbar l s-1 / 8 x 10-8 Torr l s -1
TECHNICAL DATA
Vacuum connection NW10
Materials of construction in vacuum
Weight 138 g / 4.8 oz
Body Stainless steel 303
1 Flow rate relates to a pressure differential across valve of one bar. Seat Ceramic filled PTFE / fluoroelastomer
Needle Stainless steel 316
ORDERING INFORMATION Maximum flow rate 0.015 l s-1 at a pressure differential of 1 bar
Vacuum leak rate, across body < 10-7 mbar l s-1 / 8 x 10-8 Torr l s-1
PRODUCT DESCRIPTION ORDERING NUMBER Vacuum leak rate, across seat < 10-7 mbar l s-1 / 8 x 10-8 Torr l s-1
Model LV10K fine control needle valve C371-02-000 Maximum inlet pressure 2000 mbar / 1500 Torr
Vacuum connection NW10
LV10K valve seat service kit C371-02-812
Weight 278 g / 9.8 oz
ORDERING INFORMATION
PRODUCT DESCRIPTION ORDERING NUMBER
Model FCV10K extra fine control needle valve C371-01-000
For North American orders shop online: www.bocedwards.com or call: 1-800-848-9800