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Angle and Straight Through Valves by dfgh4bnmu

VIEWS: 18 PAGES: 50

									Angle and Straight Through Valves

Item	                                                                           Page
Introduction to Vacuum Valves ...................................................130

Introduction to Modular High Vacuum Valve Range..............131

HV Manual In-line and Angle Valves ..........................................132

HV Pneumatic In-line and Angle Valves ....................................135

HV Pneumatic Valve Accessories ...............................................138

HV Electromagnetic In-line and Angle Valves ..........................139

Venting/Up To Air Valves .............................................................143

Introduction to UHV Modular Valve Range.............................146

UHV Viton® Right Angled Valves ...............................................148

Viton® Manual Valve Range VR and VRD Series.....................149

Viton® Sealed Gate Valves GV and GVP Series ......................152

Chemraz® Valve Range KR and KRD Series............................155

Spares and Accessories KR, KRD, VR and VRD Series ........157

Viton® and Chemraz® Pneumatic Valves Range ......................158

PTFE Viton® Sealed Pneumatic Valves PRP Series..................161

Viton® Manual Gas Handling Valves GH Series ......................163

All Metal Gas Handling Valves CRT Series ..............................164

All Metal Right Angled Valves CR and CRD Series ...............166

All Metal Manual Right Angled Valves .......................................167

All Metal Valves Spares and Accessories ..................................168

Older Style CR and CRD Series valves ....................................169

All Metal Line-Of-Sight Valve CSD Series ................................170

Introduction to Leak Valves .........................................................171

All Metal Right Angled Leak Valves MD5 Series .....................172

All Metal Right Angled Leak Valves LVM Series .....................173

Motorised LVM Version ................................................................175

Pressure Flow Controller ZPFC1 Series ..................................177




                                                                                            129
         Vacuum Valves

                                                             Right	Angled	Valves
                                                             This group can be subdivided into two basic
                                                             valve types; right angled all metal valves and
                                                             the right angled elastomer sealed valves. The all
                                                             metal valve uses the elastic deformation of a
                                                             softer metal pad by a hard metal seat to make the
                                                             seal. The elastomer sealed valve uses the elastic
                                                             properties of a range of elastomers such as
                                                             Viton®, Chemraz® or PTFE, to make the seal.

                                                             The choice of materials is dependent on the
                                                             bakeout temperature, operating environment,
Valves
                                                             lifetime and pressure requirements.

                                                             Gas	Handling	Valves
         Introduction	to	the	Valve	Range
                                                             Used where small dead volumes within the
         Valves are used on all types of vacuum equip-       valve are an advantage, these valves are high
         ment. They are available in many different sizes    quality stainless steel-bodied units available with
         and styles with a wide variety of specifications,   all metal or elastomer seals in a right angled
         to suit all applications.                           configuration. The valves can be supplied with
                                                             a range of different flange options, or are avail-
         There are several different types of material       able with weld tubes for direct integration into
         used to make the seal in vacuum valves, and         your pipework.
         these materials are used to provide a range of
         operational and lifetime properties.                Leak	Valves
                                                             This range of valves follows the right angled all
         At VG Scienta we produce a wide variety of          metal configuration and is used for gas introduc-
         valves that can be divided into the following       tion and pressure control in the vacuum system.
         categories.                                         With high accuracy control across a wide range
                                                             of pressures, these valves are a natural choice
         HV	Valve	Range                                      where process control is a requirement. The VG
         With high energy efficiency and low mainte-         Scienta range of high precision leak valves can
         nance costs the new High Vacuum valve series        be motorised in order to provide fully automated
         is the economical choice for HV applications.       pressure control, when used in conjunction with
         The series, which includes manually, pneumati-      a pressure measurement device.
         cally and electromagnetically operated valves
         offers an extremely compact body design, which      VG Scienta are happy to advise you on the type
         is available in both angle and in-line versions.    of valve suited to your specific application.

                                                             SoftShut	Gate	Valves
                                                             For full details of our SoftShut gate valve range
                                                             please see the next section.




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                                        Modular High Vacuum Valve Range

Introduction	to	the	Modular	HV	Valve	
Range
• Ultra long lifetime (up to more than
   10,000,000 cycles) with unique formed
   bellows and self-positioning valve seat
• Compact, lightweight, design offers system
   designers more choice and greater flexibility
• Modular construction allows easy and
   flexible installation
• Available in sizes from DN16 to DN50
• Choice of stainless steel or aluminium body
   material
• Guaranteed quality, durability and reliability
                                                                                                                       Valves
• Electromagnetically operated valves with
   energy efficient power consumption of
   300 W (max) and 8 W (holding) ensures low
   running costs.                                         The valves' unrivaled lifetime is due to the unique
                                                          self-positioning valve seats and the formed
Small in size, big on advantages, the new com-            bellows. By utilising a manufacturing process
pact High Vacuum valve series offers a flexible,          unique in the industry the valve range is con-
durable and energy efficient solution for high            structed using formed bellows, thereby reducing
vacuum applications.                                      mechanical stress and chance of failure. KF
                                                          flanges which include a protective recess ensure
With high energy efficiency and low mainte-               that no damage is made to any sealing surfaces.
nance costs the new High Vacuum valve series              A reed switch add-on position indicator can be
is the new economical choice for HV appli-                mounted on three sides of the valve body (not
cations. The series, which includes manually,             on the inlet part side).
pneumatically and electromagnetically operated
valves offers an extremely compact body design,
available in both angle and in-line versions.


                                            Basic	Technical	Data	
	             	                        KF	16	               KF	25	          KF	40	                   KF	50
	             	                    DIN	28	403	and	      DIN	28	403	and	 DIN	28	403	and	          DIN	28	403	and
	                                    ISO2861/1	           ISO2861/1	      ISO2861/1	               ISO2861/1
Orifice                                 16 mm                 25 mm             40 mm                 50 mm
Leak Rate Internal            <1x10-9 mbar. 1.s-1, He
Leak Rate External            <1x10-9 mbar. 1.s-1, He
Maximum Ambient Temperature   60 °C (with 100% duty rate of coil)
Minimum Ambient Temperature   0°C
Media Temperature             Gasses 0 to +150 °C as long as surface temperature on metal valve body is below +80 °C
Maximum Baking Temperature
for Assembled Valve           80 °C
Material:
Aluminium Body                AlMgSi1
Stainless Steel Body          316L stainless steel (1.4404)
Bellows                       304L stainless steel (1.4306)
O-rings                       FKM
Declaration                   CE




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         HV Manual Valve - In-line and Angle Configurations

                                                                        Introduction	to	HV	Manual	Angle	Valve	
                                                                        Range
                                                                        • Compact, lightweight, design offers system
                                                                           designers more choice and greater flexibility
                                                                        • Modular construction allows easy and
                                                                           flexible installation
                                                                        • Available in sizes from DN16 to DN50
                                                                        • Choice of stainless steel or aluminium
                                                                           versions
                                                                        • Laser engraved marking for traceability
                                                                        • Protective recess on flange
                                                                        • Ultra long lifetime 100,000 cycles achievable
 HV	                                                                       before maintenance
Valves                                                                  • Choice of actuator position
                                                                        • Weld-free bellows minimise risk of leaks


                                                     HV	Manual	Valve	In-line	and	Angle
          	          	                          	               Aluminium	Variant	                Stainless	Steel	Variant
          	 Angle	Valve	Variant	          Orifice,	mm	             Order	Code	                         Order	Code	
                    DN16                      16                    ZHAK16AM                            ZHAK16SM
                    DN25                      25                    ZHAK25AM                            ZHAK25SM
                    DN40                      40                    ZHAK40AM                            ZHAK40SM
                    DN50                      50                    ZHAK50AM                            ZHAK50SM
          	   In-Line	Variant
                    DN16                      16                    ZHIK16AM                            ZHIK16SM
                    DN25                      25                    ZHIK25AM                            ZHIK25SM
                    DN40                      40                    ZHIK40AM                            ZHIK40SM
                    DN50                      50                    ZHIK50AM                            ZHIK50SM




                                                         HV	Manual	Valve	Accessories
          	      Position	Sensors	etc.	                            Order	Code	
          Position Sensor including 2.5 m cable                       ZHPSC
          Position Sensor including 0.3 m cable*                     ZHPSCC
                 Extension Cable 2.5 m*                               ZHPSEC


          	             Seal	Kits	                                       	
                          DN16                                        ZHSK16
                          DN25                                        ZHSK25
                          DN40                                        ZHSK40
                          DN50                                        ZHSK50
         * Supplied including connector




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                                                            HV Manual Valve Technical Data

Function
Hand lever in closed position: When the hand
lever (1) is depressed no force is applied to the
eccentric (2) and the valve spindle (4). Therefore
the valve is kept closed by the spring (5), which
presses the valve plate (7) with the seat gasket
(8) against the valve orifice (9). The valve will
be closed for as long as the hand lever is kept in
the closed position, which is indicated at the top
of the valve.

Hand lever in open position: When the hand
lever (1) is activated clock-wise as indicated on                                                                                          HV	
the functional sketch, the eccentric (2) is rotated                                                                                       Valves

and presses against the underlay (3). Hereby a
force is applied to the valve spindle (4). The
force from the spindle is via the bellows (6)
applied to the valve plate (7), which together
with the seat gasket (8) is raised from the valve
orifice (9). Hereby the valve is opened with or
against the pressure of the medium. The valve
will be open for as long as the hand lever is posi-
tioned in the open position, which is indicated at
the top of the valve.

As an additional feature the manual valve can be
positioned partly open in fixed steps (see techni-
cal data).


 	      Technical	Data		                 DN16		                      DN25		                       DN40		                 DN50
      Differential Pressure
       Closing Direction              4 bar (abs)                  4 bar (abs)                  2 bar (abs)            2 bar (abs)
      Differential Pressure
      Opening Direction               2 bar (abs)                  2 bar (abs)                  2 bar (abs)            1.2 bar (abs)
 Operating Pressure Range        1x10-8 mbar to 5 bar         1x10-8 mbar to 5 bar          1x10-8 mbar to 3 bar   1x10-8 mbar to 3 bar
                                         (abs)                        (abs)                         (abs)                  (abs)
     Molecular Conductance
          Angle Valve                   5.5 1.s-1                   14.5 1.s-1                   49.5 1.s-1              77 1.s-1
     Molecular Conductance
          In-line Valve                 3.4 1.s-1                    7.2 1.s-1                   20.2 1.s-1             28.2 1.s-1
         Seal Material                    FKM                         FKM                          FKM                     FKM
           Endurance                >100,000 cycles              >100,000 cycles              >100,000 cycles        >100,000 cycles
        Type of Actuator               Hand lever:                 Hand lever:                  Hand lever:            Hand lever:
         Opening Steps        10 %, 20 %, 30 %, 50 %, 100 % 10 %, 20 %, 30 %, 50 %, 100 %    10 %, 50 %, 100 %      10 %, 50 %, 100 %




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         HV Manual Valve Dimensional Data




 HV	
Valves




          	         	            	            	            	            	          	         	          	   Weight
                                                                                                               kg
          	      	               	             	          	             	         	         	     Body Material Body Material
          	    Size	             A	           B		         C	           C1		       D	        F      Aluminium      Stainless Steel
               KF16              40           40          167          106        157       60        0.27              0.51
               KF25              50           50          209          128        209       75        0.51              0.91
               KF40              65           65          299          167        324       97        1.07              1.80
                KF50          70            80            300          169        324       110       1.55              2.85
         All dimensions in mm unless otherwise stated.




          	     	            	           	           	           	            	        	     	          	   Weight
                                                                                                               kg
          	     	            	           	          	            	           	         	    	     Body Material Body Material
              Size	         A	          B		         C	          C1		         D	        F	   H      Aluminium      Stainless Steel
              KF16          80          40          136         84          149    58       151       0.28              0.55
              KF25         100          50          179         108         198    74       199       0.56              1.07
              KF40         130          65          264         144         310    123      291       1.23              2.26
              KF50         140          80          269         153         310    123      307       1.94              4.00
         All dimensions in mm unless otherwise stated.




134                                                                                         www.vgscienta.com
     HV Pneumatic Valve - In-line and Angle Configurations

Introduction	to	HV	Pneumatic	Angle	
Valve	Range
• Compact, lightweight, design offers system
   designers more choice and greater flexibility
• Modular construction allows easy and
   flexible installation
• Available in sizes from DN16 to DN50
• Weld free bellows minimise risk of leaks
• Laser engraved marking for traceability
• Protective recess on flange
• Ultra long lifetime:
   DN16 and DN25: 10,000,000 cycles
   DN40 and DN50: 5,000,000 cycles                                                                               HV	
• Stainless steel and aluminium bodies                                                                          Valves

   available
• Visual position sensor
• Reed sensor and solenoid options available

	             	                          	    HV	Pneumatic	Valve	In-line	and	Angles
	          	                           	                  Aluminium	Variant	          Stainless	Steel	Variant
	 Angle	Valve	Variant	           Orifice,	mm	                Order	Code	                   Order	Code
           DN16                          16                   ZHAK16AP                      ZHAK16SP
           DN25                          25                   ZHAK25AP                      ZHAK25SP
           DN40                          40                   ZHAK40AP                      ZHAK40SP
           DN50                          50                   ZHAK50AP                      ZHAK50SP
	     In-Line	Variant
           DN16                          16                   ZHIK16AP                      ZHIK16SP
           DN25                          25                   ZHIK25AP                      ZHIK25SP
           DN40                          40                   ZHIK40AP                      ZHIK40SP
           DN50                          50                   ZHIK50AP                      ZHIK50SP



                                              HV	Pneumatic	Valve	Accessories	
 	 Solenoid	Valve	Kit	Variant	                               Order	Code	        	
                  24 VDC                                      ZHS24DC
                  24 VAC                                      ZHS24AC
              115 VAC                                         ZHS115AC
              230 VAC                                         ZHS230AC


 	     Position	Sensors	etc.	                                      	
 Position Sensor including 2.5 m cable                          ZHPSC
 Position Sensor including 0.3 m cable*                        ZHPSCC
       Extension Cable 2.5 m*                                  ZHPSEC


 	            Seal	Kits	                                           	
                  DN16                                         ZHSK16
                  DN25                                         ZHSK25
                  DN40                                         ZHSK40
                  DN50                                         ZHSK50
* Supplied including connector




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         HV Pneumatic Valve Technical Data

                                                                              the spring (5), which presses the valve plate (7)
                                                                              with the seat gasket (8) against the valve orifice
                                                                              (9). The valve will be closed for as long as the
                                                                              control pressure is disconnected.

                                                                              The magnet (10) built in at the control piston
                                                                              makes it possible to indicate the closed position
                                                                              of the valve with an optional position sensor.

                                                                              Control connection pressurised (valve open):
                                                                              When the air pressure to the control connection
                                                                              (3) is connected, the cylinder (1) is pressurised
 HV	                                                                          and thus the pressure at the control piston (2)
Valves                                                                        moves the valve spindle (4).

                                                                              The force from the spindle is via the bellows (6)
                                                                              applied to the valve plate (7), which together with
                                                                              the seat gasket (8) is raised from the valve orifice
                                                                              (9). Hereby the valve opens with or against the
                                                                              pressure of the medium. The valve will be open
                                                                              for as long as the control pressure is connected.
                                                                              The magnet (10) built in at the control piston
                                                                              makes it possible to indicate the open position
         Function                                                             of the valve with an optional position sensor.
         Control connection un-pressurised (valve
         closed): When the air pressure to the control                        As an additional feature the open and closed
         connection (3) is disconnected, the cylinder (1)                     valve position is visually indicated by the moving
         is un-pressurised and the valve is kept closed by                    valve spindle at the top of the valve.


          	     Technical	Data	                DN16		                      DN25		                  DN40		                DN50
          Max Differential Pressure
            Closing Direction                   4 bar                      4 bar                    2 bar                 2 bar
          Max Differential Pressure
            Opening Direction                   2 bar                      2 bar                    2 bar                1.2 bar
          Operating Pressure Range      1x10-8 mbar to 5 bar       1x10-8 mbar to 5 bar     1x10-8 mbar to 3 bar   1x10-8 mbar to 3 bar
                Time to Open(1)                100 ms                     100 ms                   200 ms                200 ms
                Time to Close(1)               200 ms                     200 ms                   200 ms                200 ms
                Supply Pressure        4 - 7 bar overpressure     4 - 7 bar overpressure   4 - 7 bar overpressure 4 - 7 bar overpressure
          Molecular Conductance
               Angle Valve                     5.5 1.s-1                 14.5 1.s-1               49.5 1.s-1             77 1.s-1
          Molecular Conductance
               In-line Valve                   3.4 1.s-1                  7.2 1.s-1               20.2 1.s-1            28.2 1.s-1
                 Seal Material                  FKM                         FKM                     FKM                   FKM
                   Endurance            DN16 and DN25: 10,000,000 cycles
                                        DN40 and DN50: 5,000,000 cycles
                Type of Actuator       Pneumatic, direct controlled or by optional solenoid valve kit
              Actuator Connection      M5 for air hose fitting
               Position indicator
                   Standard                    Visual
                   Optional            Proximity (reed) sensor
         (1) At 5 bar supply pressure for the actuator with recommended solenoid valve




136                                                                                            www.vgscienta.com
                                            HV Pneumatic Valve Dimensional Data




                                                                                                                              HV	
                                                                                                                             Valves




 	         	         	           	              	          	        	        	         	         	   Weight
                                                                                                        kg
 	      	             	           	          	             	        	        	      	      Body Material Body Material
      Size	          A	          B		         C	           C1	      D		       E	    F        Aluminium      Stainless Steel
      KF16           40          40          115          108      117       15    60          0.26              0.50
      KF25           50          50          128          125      131       15    75          0.48              0.88
      KF40           65          65          151          162      154       15    97          0.94              1.67
      KF50           70          80          159          181      167       15   110          1.64              2.94
All dimensions in mm unless otherwise stated.




 	     	        	           	           	            	         	        	    	     	              	  Weight
                                                                                                        kg
 	     	        	           	          	             	      	           	     	    	       Body Material Body Material
     Size	     A	          B		         C	           C1	    D		          E	   F	   H         Aluminium     Stainless Steel
     KF16      80         40           114          81     92       15       32   129           0.27             0.54
     KF25      100        50           130          100    108      15       47   150           0.53             1.04
     KF40      130        65           150          128    128      15       63   178           1.10             2.13
  KF50        140        80         165             153    132      15       62   203           2.03             4.09
All dimensions in mm unless otherwise stated.




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         HV Pneumatic Valve Accessories - Solenoid Valve Kit

                                                                    Introduction	to	Solenoid	Valve	Kits
                                                                    • Used for electric control of pneumatically
                                                                       operated valves by fitting the kit directly to
                                                                       the vacuum valve
                                                                    • The kit consists of solenoid valve unit,
                                                                       o-ring, manifold, air silencer, two screws and
                                                                       plug for electric connection




 HV	
Valves                                                                                  Technical	Data
                                                                    Type	                  3/2 - way NC
                               	Solenoid	Valve	Kit
                                                                    Voltage                24 VDC, 24 VAC, 115 VAC, 230 VAC
         Pilot	Valve	Kit	Type		                        Order	Code   Frequency              50/60 Hz
                    24 VDC                              ZHS24DC     Pilot	Pressure         4 - 7 bar supply pressure
                    24 VAC                              ZHS24AC     Pressure	Connection M5
                   115 VAC                             ZHS115AC     Outlet	Connection      M5
                   230 VAC                             ZHS230AC     Approval               UL approved




         HV Pneumatic Valve Accessories - Position Sensor

                                                                    Introduction	to	Position	Sensor	Kits
                                                                    • Used for electrically monitoring the open
                                                                       and the closed position of the vacuum
                                                                       valve, when fitted in the external slots of
                                                                       the valve
                                                                    • Position sensors can be used for
                                                                       electromagnetically and pneumatically
                                                                       operated valves with build-in position
                                                                       magnet
                                                                    • The position sensor is a proximity (reed)
                                                                       switch with LED light for visual indication
                                                                       of the state of the switch
                                                                    • Nominal supply voltage is 24 VDC

         	                       Position	Sensor	Kit
         	            Type	                            Order	Code
             Position sensor including
                    2.5 m cable                          ZHPSC
          Position sensor including
         0.3 m cable and male connector                  ZHPSCC
           Extension cable 2.5 m
         including female connector                      ZHPSEC




138                                                                                  www.vgscienta.com
                               HV Electromagnetic Valve - In-line and Angle
                                                            Configurations
Introduction	to	HV	Electromagnetic	
Valve	Range
• Compact, lightweight, design offers system
   designers more choice and greater flexibility
• Modular construction allows easy and
   flexible installation
• Available in sizes from DN16 to DN50
• Laser engraved marking for traceability
• Protective recess on flange
• Ultra long lifetime before maintenance
   (varies according to valve, please see
   technical data)
• Stainless steel and aluminium bodies                                                                                                        HV	
   available                                                                                                                                 Valves

• 2/2 way servo/booster operated
• Optional normally closed (NC) and
   normally open (NO) function
• Low power consumption:
   300W/8W (maximum/holding)


                                                HV	Electromagnetic	Valve	In-line	and	Angle
    	              	                              	                     Aluminium	Variant	                         Stainless	Steel	Variant
    	 Angle	Valve	Variant	                Orifice,	mm	                      Order	Code	                                  Order	Code
                DN16                            16                           ZHAK16A*                                     ZHAK16S*
                DN25                            25                           ZHAK25A*                                     ZHAK25S*
                DN40                            40                           ZHAK40A*                                     ZHAK40S*
                DN50                            50                           ZHAK50A*                                     ZHAK50S*
    	    In-Line	Variant
                DN16                            16                            ZHIK16A*                                     ZHIK16S*
                DN25                            25                            ZHIK25A*                                     ZHIK25S*
                DN40                            40                            ZHIK40A*                                     ZHIK40S*
                DN50                            50                            ZHIK50A*                                     ZHIK50S*
*       Select coil option 1 to 6 from the table below, depending on the type of operation required.




                                                                   Coil	Options
    Coil	Number(*)		Coil	Type	          Supply	Voltage		 Control		            Function		               Description		           Weight	kg
            1            BN115CS             115 AC         Direct (115)         NC          Valve opens when line applied       0.64
            2            BN115CS             115 AC            24 VDC            NC         Valve opens with control signal      0.64
            3            BN115CS             115 AC            24 VDC            NO         Valve closes with control signal     0.64
            4            BN230CS             230 AC         Direct (230)         NC          Valve opens when line applied       0.64
            5            BN230CS             230 AC            24 VDC            NC         Valve opens with control signal      0.64
            6            BN230CS             230 AC            24 VDC            NO         Valve closes with control signal     0.64
(*) Includes coil with built-in power electronics and plugs.

Example
DN25 in-line valve with a stainless steel body and 24 VDC normally open (NO) operation would be ZHIK25S3.




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         HV Electromagnetic Valve Technical Data


                                                           HV	Electromagnetic	Valve	Accessories
          	     Position	Sensors	etc.	                                    	                                                Order	Code
          	Position Sensor including 2.5 m cable                                                                                  ZHPSC
          Position Sensor including 0.3 m cable*                                                                                 ZHPSCC
                Extension Cable* 2.5 m                                                                                           ZHPSEC


          	             Seal	Kits	                                        	
                          DN16                                                                                                   ZHSK16
                          DN25                                                                                                   ZHSK25
                          DN40                                                                                                   ZHSK40
                          DN50                                                                                                   ZHSK50
         * Supplied including connector.
 HV	
Valves

          	     Technical	Data	                       DN16		                        DN25		                DN40		                 DN50
          Max Differential Pressure
               Closing Direction                       1 bar                        4 bar                 2 bar                 1.2 bar
          Max Differential Pressure
              Opening Direction                         NA                           NA                    NA                     NA
                                                 -8                           -8                    -8                     -8
          Operating Pressure Range          1x10 mbar to 5 bar        1x10 mbar to 5 bar        1x10 mbar to 3 bar     1x10 mbar to 3 bar
                Time to Open                          100 ms                       100 ms                200 ms                 200 ms
                Time to Close                         200 ms                       200 ms                200 ms                 200 ms
          Molecular Conductance
                  Angle Valve                         5.5 l.s-1                    14.5 l.s-1            49.5 l.s-1              70 l.s-1
          Molecular Conductance
                  In-line Valve                       3.4 l.s-1                    7.2 l.s-1             20.2 l.s-1             25.7 l.s-1
                 Seal Material                         FKM                           FKM                   FKM                    FKM
          Direct / Servo Operated                     Direct           Servo Assisted Lift       Servo Assisted Lift    Servo Assisted Lift
                  Endurance                  >2,000,000 cycles
               Type of Actuator:                       Coil
                   Coil Type                          BN IP65
                    Voltage                 115 VAC or 230 VAC
              Power Consumption:
                Inrush/Holding                  300 W / 8 W
          Maximum cycle frequency             360 cycles/hour
                Control Signal:
                    Active                   9 - 30 VDC, 15 mA
                    Inactive                     0 - 4 VDC
          Position Sensor Optional         Proximity (reed) switch




140                                                                                                www.vgscienta.com
              HV Electromagnetic Valve - Operating Principles

Function	-	Electromagnetic	Operation	
(DN16	size)
Coil voltage disconnected (closed): When the
voltage to the coil (1) is disconnected, the com-
plete armature assembly with the valve plate (3)
including seat gasket (4) is pressed down against
the valve orifice (5) by the closing spring (6) and
the media pressure. The valve will be closed for as
long as the voltage to the coil is disconnected. The
magnet (7) built in with the armature assembly
makes it possible to indicate the closed position
of the valve with an optional position sensor.
                                                                                                                  HV	
Coil voltage connected (open): When the volt-                                                                    Valves

age is applied to the coil (1), the complete arma-
ture assembly with the valve plate (5) including
seat gasket (4) is lifted clear of the valve orifice
(5). The valve is now open for unimpeded flow
and will be open as long as the voltage to the coil       Electromagnetically operated valve type.

is connected. The magnet (7) built in with the
armature assembly makes it possible to indicate
the open position of the valve with an optional
position sensor.

Function	-	Electromagnetic	Servo	
Operation	(DN25-DN50	size)
Coil voltage disconnected (closed): When
the voltage to the coil (1) is disconnected, the
armature (2) with the pilot gasket (4) is pressed
down against the pilot orifice (6) by the closing
spring (3). The pressure across the servo piston
(5) is built up via the equalising orifice (8). The
servo piston with seat gasket (9) closes the main
orifice (10) as soon the pressure across the servo
piston is equivalent to the inlet pressure below,
due to the large diameter at the upper side of
the piston and the tension of the closing spring
(3). The valve will be closed for as long as the
voltage to the coil is disconnected. The magnet           Electromagnetically servo operated valve type.
(11) built in at the servo piston makes it possible
to indicate the closed position of the valve with
an optional position sensor.
                                                          orifice (10). If there is none or only a small dif-
Coil voltage connected (open): When the volt-             ferential pressure across the valve, the armature
age is applied to the coil (1), the armature (2)          (2) draws the complete servo piston (5) with seat
with the pilot gasket (4) is lifted clear of the pilot    gasket clear of the main valve orifice (10) using
orifice (6). If there is a differential pressure across   the assisted lift spring (7). The valve will be open
the valve, the pressure above the servo piston (5)        as long as the voltage to the coil is connected. The
drops as the pilot orifice is larger than the equal-      magnet (11) built in at the servo piston makes it
izing orifice (8). Therefore the servo piston and         possible to indicate the open position of the valve
the seat gasket (9) is lifted clear of the main valve     with an optional position sensor.


www.vgscienta.com                                                                                                141
         HV Electromagnetic Valve Dimensional Data




 	HV	
Valves




          	       	             	             	            	          	           	          	Weight	Without	Coil
                                                                                                      kg
          	      	             	               	          	          	           	     Body Material        Body Material
          	    Size	           A	             B		         C	         D		         E	     Aluminium           Stainless Steel
               KF16           40              40          140        138         68        0.33                   0.57
               KF25           50              50          173        148         68        0.56                   0.96
               KF40           65              65          202        163         68        1.37                   2.10
                KF50          70            80            212        168         68        1.62                   2.92
         All dimensions in mm unless otherwise stated.




          	       	             	        	           	     	    	           	     	          	Weight	Without	Coil
                                                                                                     (kg)
          	      	             	         	          	     	     	           	     	    Body Material        Body Material
          	    Size	           A	       B		         C	    D		   E	         F	    H	     Aluminium           Stainless Steel
               KF16           80       40           130   115   68         138   144       0.34                   0.61
               KF25           100      50           161   117   68         138   181       0.61                   1.12
               KF40           130      65           183   129   68         138   211       1.53                   2.56
                KF50         140       80       197       122   68         138   235       2.01                   4.07
         All dimensions in mm unless otherwise stated.




142                                                                                     www.vgscienta.com
                                                              Venting and Up to Air Valves

Introduction	to	Air	Admit/Venting	Valve:	
• Function normally closed (NC) and
   normally open (NO)
• Lifetime up to 500,000 cycles
• Connection: ISO 2861/1 KF10
• Leak Rate: <1x10-9 mbar.l.s-1
• Kv-values up to 0.21m3/hour
• Media temperature up to 120 °C
• Available as vertical type for failure venting
   option

The venting valve/air admit valves offer a flex-
ible, durable and energy efficient solution for
                                                                                                                           Vent
gas supply systems and applications. The direct
(bellows free) actuating systems offer extremely
short response opening and closing times.

The series is available as normally closed (NC)
and normally open (NO) types. Both versions
are solenoid actuated and offer extremely low
power consumption (maximum 9.5 W).


                                                         Technical	Data
 	                       Inline	Version	                                              Vertical	Version
            Valve: Valve type 2/2 way direct operated                      Valve: Valve type 2/2 way direct operated
     Function normally closed (NC) or normally open (NO)           Function normally closed (NC) or normally open (NO)
                 Connection ISO 2861/1 KF10                                      Connection ISO 2861/1 KF10
                      Medium: air/vacuum                                             Medium: air/vacuum
        Maximum opening differential pressure (MOPD)                  Maximum opening differential pressure (MOPD)
                  3.9 /1.8 bars (AC/DC)                                         2.9/1.8 bars (AC/DC)
          Minimum opening differential pressure 0 bar                     Minimum opening differential pressure 0 bar
                                      3
                     Kv-value 0.21 m /hour                                          Kv-value 0.21 m3/hour
                                                -9      -1
        Leak rate internal and external <1x10 mbar.l.s                Leak rate internal and external <1x10-9 mbar.l.s-1
                   Endurance 500,000 cycles                                       Endurance 500,000 cycles
      Medium temperature -10 to 120 °C/100 °C (AC/DC)               Medium temperature -10 to 120 °C/100 °C (AC/DC)
               Ambient temperature max 50 °C                                   Ambient temperature max 50 °C
                   Body material: Aluminium                                        Body material: Aluminium
                  Internal parts: stainless steel                                Internal parts: stainless steel
                Valve plate (armature seal) FKM                                Valve plate (armature seal) FKM
           Coil type: AL and AM, AC/DC 4.0 - 7.5 W                         Coil type: AL and AM, AC/DC 4.5 - 10 W




www.vgscienta.com                                                                                                          143
       Venting and Up to Air Valves - Inline Version




Vent




        	                                                         Inline	Version
        	        	            	             	           	            	              	            	         	          Weight	
        	      Size	         B		           C	          D		          E	             F	           H                      kg
        	     KF10          33            60           47           49         15               64                     0.17
       All dimensions in mm unless otherwise stated.


                                Inline	Variant
        	         	 Coil	Voltage	 	                    Order	Code
              24 VAC          50/60 Hz                  ZVIV24A
             110 VAC          50/60 Hz                  ZVIV110A
            220/230 VAC       50/60 Hz                  ZIVI220A
             240 VAC          50/60 Hz                  ZVIV240A
              12 VDC          (DC Coil)                 ZVIV12D
              24 VDC          (DC Coil)                 ZVIV24D




       Venting and Up to Air Valves Accessories


                                                                           Power	Connectors
                                                                           • For use with valve coils type AK, AL, AM,
                                                                             BA, BD and BB
                                                                           • Voltages up to 250 V
                                                                           • Enclosure up to IP65
       ZVVINDLO/ZVVINDHI Type                                              • Ambient temperature up to 60 °C/125 °C



                                                                                        Inline	Version
                                                 	                 Description	                           Voltage	        Order	Code
                                                             Standard Power Connector                                         ZVVPLUG
                                                 Power Connector with LED open/closed indicator          24 V AC/DC       ZVVINDLO
                                                 Power Connector with LED open/closed indicator           230 V AC            ZVVINDHI
       ZVV PLUG Type



144                                                                                             www.vgscienta.com
                        Venting and Up to Air Valves - Vertical Version




                                                                                                                        Vent




                                                              Vertical	Version
 	         	            	             	             	            	           	           	       	       Weight	
         Size	          B		           C	            D		          E	          F	          H                kg
       KF10          22             32             40            45         28           80                0.17
All dimensions in mm unless otherwise stated.


                         Vertical	Version
 	          	 Coil	Voltage	 	                       Order	Code
        24 VAC          50/60 Hz                     ZVVV24A
        110 VAC         50/60 Hz                     ZVVV110A
      220/230 VAC       50/60 Hz                     ZVVV220A
        240 VAC         50/60 Hz                     ZVVV240A
        12 VDC          (DC Coil)                    ZVVV12D
        24 VDC          (DC Coil)                    ZVVV24D




                                    Venting and Up to Air Valves Accessories

Power	Connectors
• For use with valve coils type AK, AL, AM,
  BA, BD and BB
• Voltages up to 250 V
• Enclosure up to IP65
• Ambient temperature up to 60 °C/125 °C
                                                                                               ZVVINDLO/ZVVINDHI Type




                                           Vertical	Version
 	                     Description	                              Voltage	         Order	Code
                 Standard Power Connector                                         ZVVPLUG
     Power Connector with LED open/closed indicator            24 V AC/DC         ZVVINDLO
     Power Connector with LED open/closed indicator             230 V AC          ZVVINDHI     ZVV PLUG Type



www.vgscienta.com                                                                                                       145
          UHV Modular Valve Range

                                                             Small in size, big on advantages, the new com-
                                                             pact UHV series offers a flexible, durable and
                                                             energy efficient solution for ultra high vacuum
                                                             applications. With high energy efficiency and
                                                             low maintenance costs the ultra high vacuum
                                                             valve series is the new economical choice for
                                                             UHV applications. The series, which includes
                                                             manually and pneumatically operated valves
                                                             offers an extremely compact body design, and is
                                                             available in both angle and in-line versions. The
                                                             valves' unrivaled lifetime is due to the unique
                                                             self-positioning valve seats and the formed
 UHV	
Modular
                                                             bellows. By utilising a manufacturing process,
 Valves                                                      unique in the industry the valve range is con-
                                                             structed without using any welded parts, thereby
          Introduction	to	UHV	Modular	Valve	Range	           reducing mechanical stress and chance of fail-
          • Ultra-long lifetime (up to more than             ure. The option of a reed switch as an add-on
             10,000,000 cycles) with unique formed           position indicator can be mounted on all sides
             bellows and self-positioning valve seat         of the valve body.
          • Compact, lightweight, design offers system
             designers more choice and greater flexibility   For information on dimensions, availability and
          • Modular construction allows easy and             ordering please contact the factory or your local
             flexible installation                           representative.
          • Available in size from DN16 to DN40
          • Guaranteed quantity, durability and
             reliability
          • Electromagnetically operated valves with
             energy efficient power consumption
             between 300 W (maximum activating power)
             and 8 W (maximum holding power) ensures
             low running costs




146                                                                        www.vgscienta.com
        UHV Modular Valve Range - Technical Specification


                  General	UHV	Specifications	for	Manual	and	Pneumatic	Operated	Vacuum	Valves
 Connection Type                                         Inlet and outlet: CF ISO 3667 – rotatable flange
 Valve Type                                                                Angle style
 Medium                                                         Air and gasses, non combustible
 Maximum Ambient Temperature                                                 150 ºC
 Minimum Ambient Temperature                                                  0 ºC
 Maximum Baking Temperature                                                  150 ºC
 Maximum Medium Temperature                                           Gasses up to 150 ºC
 Leak Rate Internal                                                   <1x10-9 mbar.l.s-1, He
 Leak Rate External                                                  <1x10-10 mbar.l.s-1, He
 Pressure Range                                                      1x10-10 mbar to 5 bar
 Material Housing Seal                                                 Metallic Cu/Al alloy
 Material of O-ring in Valve Seat                                             FKM                                                   UHV	
 Material of Housing                                              316L stainless steel (1.4404)                                    Modular
                                                                                                                                    Valves
 Material of Bellow                                                304L stainless steel (1.4306)
 Material of Seal in Pneumatic Actuator                                   FKM / HNBR
 Endurance Pneumatic Actuator                                          > 5,000,000 cycles
 Endurance Manual Actuator                                              > 100,000 cycles
 Position Indication                                 Visual or proximity up to 80 ºC body temperature
    Available Flange Size                 Orifice Size                A Dimension in mm              Max. Differential Pressure
          DN16CF                              16                               34                    < 2 bar in both directions
          DN25CF                              25                               50                    < 2 bar in both directions
          DN40CF                              40                               63                    < 2 bar in both directions
          DN63CF                              50                               105                  < 1.2 bar in both directions




www.vgscienta.com                                                                                                                   147
              UHV Viton® Right Angled Valves

                                                                    be limited to prevent the material becoming per-
                                                                    manently deformed. Excess bake temperature
                                                                    can cause deformation leakage when the valve is
                                                                    opened and closed and a new O-ring would need
                                                                    to be installed to restore valve performance.

                                                                    Chemraz®
                                                                    Chemraz is a perfluoroelastomer which has
                                                                    excellent chemical resistance and can be baked
                                                                    to higher temperatures than Viton. It does how-
                                                                    ever have the disadvantage of being expensive
                                                                    when compared to its Viton equivalent.
UHV	Viton
Right	Angle
   Valves                                                           Vacuum	Conditioning
                                                                    It is worth noting that before we use Viton in
              Introduction	to		O-ring	Sealed	Valves                 any of our valves, the Viton undergoes a vac-
              This type of valve uses the elastic deforma-          uum bake to remove any chemical residues left
              tion of an O-ring against a polished sealing          over from manufacturing. If you buy O-rings
              face to make a leak-tight seal. Compared to an        directly from a manufacturer they must always
              all metal valve, the elastomer valve will have a      be vacuum conditioned before use in another
              higher overall leak rate - the seal material itself   vacuum system as a precaution against introduc-
              being slightly permeable - and a lower bakeout        ing contamination.
              temperature capability, as the material begins to
              lose its elasticity at elevated temperatures. This,   User	Serviceable
              however, does not stop this type of valve being       All of our elastomer valves have been designed
              applicable for use in a wide variety of UHV and       so that it is easy for the user to service them, we
              HV applications. The two main sealing materi-         have a wide range of repair kits, replacement O-
              als used in the VG Scienta range of valves are        rings and movement assemblies.
              Viton® and Chemraz®.

              Viton®
              Viton is a well known and widely available                              Viton® is a
              elastomer material used in many different appli-           Registered Trademark of DuPont Ltd.
              cations. It can be baked to 200 °C without deg-
                                                                                    Chemraz® is a
              radation. If the material is compressed, such as
                                                                     Registered Trademark of Greene Tweed Ltd.
              when the valve is shut or when the bonnet seal
              uses Viton®, the maximum temperature must




  148                                                                              www.vgscienta.com
             Viton® Manual Valve Range - VR and VRD Series

Introduction	to	Viton®	Valve	Range
• All metal bonnet seals
• Viton® face seal
• 100,000 cycle service life
• Rising stem
• Rotatable CF flanges, Klein, ISO or
   unflanged port option
• Bakeable to 200 °C open or 150 °C closed
• Leak rate less than 10-9 mbar.l.s-1
• Pressure range from 1x10-9 mbar to 4 bar
• Bellows sealed actuation

These are general purpose UHV valves with a                                                                   UHV	Viton
                                                                                                              Right	Angle
good conductance in a range of styles. The bon-                                                                  Valves
net (top) seal of the valve is either welded or
demountable. The demountable valves allow the       valve must first be removed from the system,
whole movement mechanism to be removed and          and the o-ring carrier taken out and replaced
replaced with the valve remaining bolted to the     through the side port.
vacuum system, with a standard copper gasket
making the bonnet seal.

We would recommend that you use demount-            I
                                                    	 MPORTANT	PRODUCT	INFORMATION
able valves where it is difficult to remove the
complete valve from the system or where the         Spares and accessories - A full range of spares and
                                                    accessories is available for this and existing valves.
process or duty of the valve is harsh.              Please see the relevant tables in the spares and acces-
                                                    sories section. We can also offer a full factory repair
Valves with a welded bonnet eliminate the vacu-     and reconditioning service for most generations of this
um joint. To replace the elastomer seal the whole   type of valve.




www.vgscienta.com                                                                                                149
              Viton® Manual Valve Range - VR and VRD Series




UHV	Viton
Right	Angle
   Valves     VR Series                                                         VRD Series


                                                              Manual	Valves	-	VR	and	VRD	Series
               	 	      	     	                       	          	                	          	      	     	 Shipping	
               	 	 Flange	OD	 	                     Tube	 Conductance	            	          	      	     	 Weight	
               	 mm	    	   inch	                    OD	    litre/sec	      Construction	    A	     C	    D	   kg	    Order	Code
                      Unflanged                     41.3          34           Welded        58     116   76    2.0    ZVR40U
                      Unflanged                     41.3          34        Demountable      58     116   76    2.0    ZVRD40U
                 70               2.75              41.3          34           Welded        63     116   76    2.2    ZVR40R
                 70               2.75              41.3          34        Demountable      63     116   76    2.2    ZVRD40R
                          SKF40                     41.3          34           Welded        63     116   76    2.2    ZVR40K
                          SKF40                     41.3          34        Demountable      63     116   76    2.2    ZVRD40K
                      Unflanged                     63.5         100           Welded        97     172   114   6.0    ZVR60U
                      Unflanged                     63.5         100        Demountable      97     172   114   6.0    ZVRD60U
                114               4.50              63.5         100           Welded        105    172   114   6.4    ZVR60R
                114               4.50              63.5         100        Demountable      105    172   114   6.4    ZVRD60R
                  ISO-K 63 flanges                  63.5         100           Welded        103    172   114   6.4    ZVR60K
                  ISO-K 63 flanges                  63.5         100        Demountable      103    172   114   6.4    ZVRD60K
              All dimensions in mm unless otherwise stated.




  150                                                                                              www.vgscienta.com
         Repair and Replacement of Older Style VR and VRD
                                               Series Valves
There are a large number of the older style ver-
sions of the VR and VRD valves still in use. It
is still possible to get a wide range of spares and
accessories for these valves; all are listed in the
table below. Please note that as some of these
spares are for very early versions their availability
is limited, or they may be on longer than normal
deliveries. When you wish to replace an existing
valve with a new version, the valve comparison
table shows the body dimensions to indicate the
major differences.

                                                                                                                           UHV	Viton
                                                                                                                           Right	Angle
                                                                                                                              Valves



                                          VR	and	VRD	Series	-	Repair	and	Replacement
 F
 	 lange	      Old	Valve									 Axial					    Radial	               Spare	      New	Valve	    Axial	   Radial	
 	 OD	        Order	Code								 Port	           Port	               Seals	(*)	   Order	Code	   Port	     Port	    Notes
   70           ZVRD38R              55           55                 ZVR38VS       ZVRD43R       55        55       (2)
   70           ZVRD38R              55           55                 ZVR38VS        ZVR40R       63        63       (1)
   70           ZVRD38R              55           55                 ZVR38VS       ZVRD40R       63        63       (1)
   70           ZVRD38R              55           55                 ZVR38VS        ZKR40R       63        63       (1)
   70           ZVRD38R              55           55                 ZVR38VS       ZKRD40R       63        63       (1)
   114          ZVRD64F              97           89                 ZVR64VS        ZVR64R       105      105       (1)
   114          ZVRD64F              97           89                 ZVR64VS       ZVRD64R       105      105       (1)
   114          ZVRD64F              97           89                 ZVR64VS        ZKR64R       105      105       (1)
   114          ZVRD64F              97           89                 ZVR64VS       ZKRD64R       105      105       (1)
   152         ZVRD100F              97           89                 ZVR100VS           -          -        -        -

All dimensions in mm.
Table shows nearest neighbour equivalent or choice where possible.
(*) Seal kit comprises Viton® face seal and bonnet seal.
(1) Alternative valve with different port dimensions.
(2) Alternative valve with identical port dimensions.




www.vgscienta.com                                                                                                             151
            Viton® Sealed Valves - GV and GVP Series

                                                               GV Series valves are produced in several varia-
                                                               tions:

                                                               Conventional	Action
                                                               The valve open/close mechanism is screw oper-
                                                               ated through the whole travel range of the valve.
                                                               This gives a slow action, but can be safer if you
                                                               are worried about trapping things in the valve, or
                                                               wish to use the valve as a throttling mechanism.

                                                               Rapid	Action
                                                               The valve mechanism is only screw operated at
UHV	Viton                                                      the sealing point of its travel. The rest of the
  Gate                                                         movement is a simple pull with a locking mecha-
 Valves
                                                               nism to hold it in the open position. This allows
                                                               the valve to be opened and closed very quickly,
            Introduction	to	the	Viton®	Gate	Valves	
                                                               ideal for systems such as fast entry airlocks.
            Range	(GV	Series)
            • Clear internal bore                              Pneumatic	Valves
            • Demountable all-metal bonnet seal                These valves have a pneumatic cylinder to actu-
            • Conventional, rapid, or pneumatic operation      ate the valve mechanism instead of the manual
            • Range of operating mechanisms                    screw assembly. This means that the valve can be
            • Bakeable to 250 °C open or 140 °C closed         opened and closed by a switchable compressed
            • Slimline versions                                air supply enabling remote operation of the
            • Bellows sealed actuation                         valve. This can be useful if the valve is mounted
                                                               in a position which is hazardous or difficult
            This range of Viton® gate valves has a straight
                                                               to reach. It also allows automatic system con-
            and clear internal bore. This allows the passage
                                                               trol when used in conjunction with a top level
            through the valve of items such as transfer
                                                               controller. The GV28 valves come with micro-
            mechanisms. The bonnet (top) seal of the valve
                                                               switches (to indicate whether the valve is in the
            is fully demountable allowing the whole move-
                                                               open or closed position) as standard.
            ment mechanism to be removed and replaced
            with the valve body remaining bolted to the
            vacuum system.




 152                                                                         www.vgscienta.com
                                       Viton Gate Valves - GV and GVP Series




                                                                                                                         UHV	Viton
                                                                                                                           Gate
                                                                                                                          Valves




GV28 and GV28P Valves                                               GV50 and GV50P Valves



                                                      GV	and	GVP	Gate	Valves
 	 	 	     	    	        	      Conduct-	 	                     	        	      	       	    	     	 Shipping	
  F
 		 lange	OD	 Clear	 Operating	   ance	    	                    	        	      	       	    	     	 Weight	
 	 m	 	 inch	 Bore	 Mechanism	 litre/sec	 A	
 m                                                             B	       C	      D	     E	   F	    G	    kg	 Order	Code
   Unflanged        28      Rapid Action        42     189    227       48      89      -    -    -    3.0    ZGV28U
  70      2.75      28      Rapid Action        42     189    227       48      89      -    -    -    3.0     ZGV28
   Unflanged        52      Rapid Action        120    227    290       76     115      -    -    -    7.0    ZGV50U
 114      4.50      52      Rapid Action        120    227    290       76     130      -    -    -    7.0     ZGV50
  70      2.75      28      Conventional        42     189    227       48      89      -    -    -    3.0    ZGV28A
 114      4.50      52      Conventional        120    227    290       76     130      -    -    -    7.0    ZGV50A
   Unflanged        28       Pneumatic          42      -      -        48      89    323   184   51   5.0    ZGV28PU
  70      2.75      28       Pneumatic          42      -      -        48      89    323   184   51   5.0    ZGV28P
 114      4.50      52       Pneumatic          120     -      -        76     130    432   264   76   11.0   ZGV50P
All dimensions in mm unless otherwise stated.




www.vgscienta.com                                                                                                          153
            Viton® Gate Valves - GV and GVP Series

            Spares	and	Accessories

                                      Gate	Valve	Spares	and	Accessories	-	GV	and	GVP	Series
            	  Valve	      Spare	Viton®	   Bonnet	    Movement	         	    Mounting	Gaskets	  	        Nut	and	
            	Order	Code	    Face	seal	      Seal	     Assembly	      Copper	     Viton®	    Aluminium	   Bolt	Kit
              ZGV28U        ZGV28VS        ZCU38       SBGV28M          -            -          -           -
               ZGV28        ZGV28VS        ZCU38       SBGV28M       ZCU38         ZVIT38     ZAL38      ZM6B35
              ZGV50U        ZGV50VS        ZCU64        Z52IV           -            -          -           -
               ZGV50        ZGV50VS        ZCU64        Z52IV        ZCU64         ZVIT64     ZAL64      ZM8B45
              ZGV28A        ZGV28VS        ZCU38      SBGV28MA       ZCU38         ZVIT38     ZAL38      ZM6B35
              ZGV50A        ZGV50VS        ZCU64           -         ZCU64         ZVIT64     ZAL64      ZM8B45
              ZGV28PU       ZGV28VS        ZCU38      SBGV28MP          -            -          -           -
              ZGV28P        ZGV28VS        ZCU38      SBGV28MP       ZCU38         ZVIT38     ZAL38      ZM6B35
UHV	Viton
  Gate        ZGV50P        ZGV50VS        ZCU64           -         ZCU64         ZVIT64     ZAL64      ZM8B45
 Valves




 154                                                                             www.vgscienta.com
                  Chemraz® Valve Range - KR and KRD Series

Introduction	to	the	Chemraz®	Valve	
Range
• All metal bonnet seals
• Chemically resistant Chemraz face seal
• 100,000 cycle service life
• Rising stem
• Rotatable CF flanges, Klein, ISO or
   unflanged port option
• Bakeable to 250 °C open or 200 °C closed
• Leak rate less than 10-9 mbar.l.s-1
• Pressure range from 1x10-9 mbar to 4 bar
• Bellows sealed actuation
                                                                                                                 UHV	
                                                                                                               Chemraz	
                                                                                                              Right	Angle
KR and KRD series valves are very similar to                                                                     Valves
the VR and VRD valve range, except that the
Viton® seal is replaced by a high performance
Chemraz® version. This increases the bakeout      I
                                                  	 MPORTANT	PRODUCT	INFORMATION
temperature of the valve by +50 °C in both the
                                                  Spares and accessories - A full range of spares and
open and closed positions.                        accessories is available for this and existing valves
                                                  - please see the relevant tables in the spares and acces-
We would recommend that you use the demount-      sories section. We can also offer a full factory repair
able valves where it is difficult to remove the   and reconditioning service for most generations of this
                                                  type of valve.
complete valve from the system or where the
process or duty of the valve is harsh.




www.vgscienta.com                                                                                                155
              Chemraz® Right Angled Manual Valves - KR and KRD
              Series




   UHV	
 Chemraz	
Right	Angle                                                                       KRD Series
              KR Series
   Valves


                                                              Manual	Valves	-	KR	and	KRD	Series
              	 	       	    	               	             Tube	          	                 	      	    	     Shipping	
                  F
              		 		 lange	OD		             Tube	       Conductance	       	                 	      	     	    Weight	
              	 mm	     	  inch	            OD	          litre/sec	 Construction	          A	     C	    D	       kg	    Order	Code
                     Unflanged              41.3              34         Welded            58     116   76      2.0      ZKR40U
                     Unflanged              41.3              34       Demountable         58     116   76      2.0     ZKRD40U
                70               2.75       41.3              34         Welded            63     116   76      2.2      ZKR40R
                70               2.75       41.3              34       Demountable         63     116   76      2.2     ZKRD40R
                      SKF40                 41.3              34         Welded            63     116   76      2.2      ZKR40K
                      SKF40                 41.3              34       Demountable         63     116   76      2.2     ZKRD40K
                     Unflanged              63.5              100        Welded            97     172   114     6.0      ZKR60U
                     Unflanged              63.5              100      Demountable         97     172   114     6.0     ZKRD60U
               114               4.50       63.5              100        Welded           105     172   114     6.4      ZKR60R
               114               4.50       63.5              100      Demountable        105     172   114     6.4     ZKRD60R
                 ISO-K 63 flanges           63.5              100        Welded           103     172   114     6.4      ZKR60K
                 ISO-K63 flanges            63.5              100      Demountable        103     172   114     6.4     ZKRD60K
              All dimensions in mm unless otherwise stated.




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              Spares and Accessories - KR, KRD, VR,VRD Series




                                                                                                                                   UHV	
                                                                                                                                 Chemraz	
                                                                                                                                Right	Angle
                                                                                                                                   Valves


	     	                                 KR,	KRD,	VR	and	VRD	Series	-	Spares	and	Accessories
	 Valve	    Spare	Face	Chemraz®	            Bonnet	      Hand	       Movement	            	 Mounting	Gasket	 	   Nut	and	
	Order	Code	   Seal	   Face	Seal	            Seal	       Wheel	      Assembly	(1)	     Copper	 Viton	 Aluminium	 Bolt	Kit
  ZVR40U     ZVR40VS       -                  -         ZCRHW            -               -         -         -      -
    ZVR40R      ZVR40VS           -             -       ZCRHW               -          ZCU38      ZVIT38     ZAL38    ZM6B35
    ZVR40K      ZVR40VS           -             -       ZCRHW               -              -     ZSKF40IR      -      ZSKF40C
    ZVRD40U     ZVR40VS           -         ZCU38       ZCRHW        ZVRD40MA              -          -        -         -
    ZVRD40R     ZVR40VS           -         ZCU38       ZCRHW        ZVRD40MA          ZCU38      ZVIT38     ZAL38    ZM6B35
    ZVRD40K     ZVR40VS           -         ZCU38       ZCRHW        ZVRD40MA              -     ZSKF40IR      -      ZSKF40C
    ZKR40U           -       ZVR40KS            -       ZCRHW               -              -          -        -         -
    ZKR40R           -       ZVR40KS            -       ZCRHW               -          ZCU38      ZVIT38     ZAL38    ZM6B35
    ZKR40K           -       ZVR40KS            -       ZCRHW               -              -     ZSKF40IR   ZSKF40C
    ZKRD40U          -       ZVR40KS        ZCU38       ZCRHW        ZVRD40MA              -          -        -         -
    ZKRD40R          -       ZVR40KS        ZCU38       ZCRHW        ZVRD40MA          ZCU38      ZVIT38     ZAL38    ZM6B35
    ZKRD40K          -       ZVR40KS        ZCU38       ZCRHW        ZVRD40MA              -     ZSKF40IR    N/A      ZSKF40C
    ZVR60U      ZVR60VS           -             -       ZCRHW               -              -          -        -         -
    ZVR60R      ZVR60VS           -             -       ZCRHW               -          ZCU64      ZVIT64     ZAL64    ZM8B45
    ZVR60K      ZVR60VS           -             -       ZCRHW               -              -          -        -         -
    ZVRD6OU     ZVR60VS           -         ZCU64       ZCRHW        ZVRD60MA              -          -        -         -
    ZVRD60R     ZVR60VS           -         ZCU64       ZCRHW        ZVRD60MA          ZCU64      ZVIT64     ZAL64    ZM8B45
    ZVRD60K     ZVR60VS           -         ZCU64       ZCRHW        ZVRD60MA              -     KS60VCS       -      KS60DCS
    ZKR60U           -       ZVR60KS            -       ZCRHW               -              -          -        -         -
    ZKR60R           -       ZVR60KS            -       ZCRHW               -          ZCU64      ZVIT64     ZAL64    ZM8B45
    ZKR60K           -       ZVR60KS            -       ZCRHW               -              -          -        -         -
    ZKRD60U          -       ZVR60KS        ZCU64       ZCRHW        ZVRD60MA              -          -        -         -
    ZKRD60R          -       ZVR60KS        ZCU64       ZCRHW        ZVRD60MA          ZCU64      ZVIT64     ZAL64    ZM8B45
    ZKRD60K          -       ZVR60KS        ZCU64       ZCRHW        ZVRD60MA              -          -        -         -
          ®                             ®
(1) Viton seals as standard. If Chemraz seal is requested, this must be ordered as a separate item.




www.vgscienta.com                                                                                                                  157
              Viton® and Chemraz® Pneumatic Valve Range - VRDP,
              KRDP and KRKP Series
                                                      These valves can be opened by a relatively low
                                                      pressure compressed air supply enabling remote
                                                      operation of the valve. For hazardous or dif-
                                                      ficult to reach positions, it also allows automatic
                                                      system control when used in conjunction with a
                                                      top level controller.

                                                      All of the valves are based on their demount-
                                                      able counterparts, so that the whole pneumatic
                                                      movement mechanism can easily be removed
                                                      and replaced with the valve body remaining
                                                      bolted to the vacuum system.
   UHV	
Pneumatic	
Right	Angle
   Valves
                                                      There are three different types of valve (see next
                                                      page); they differ by the seals used in the valve
                                                      sealing mechanism and the pneumatic cylinder.
                                                      Ensure that you replace the same type of seal
                                                      should it be necessary to service your valve. All
                                                      of the o-rings in the system can be replaced, the
                                                      choice of service kit used depending on the type
                                                      of o-rings previously installed.

                                                      Interchangeable	Seals
                                                      Remember that it is possible to upgrade the
                                                      performance of your Viton® valve by fitting
                                                      the Chemraz seals instead, as the corresponding
                                                      seals are dimensionally interchangeable.

                                                      Microswitch	Options
                                                      As an option, it is possible to fit a set of micros-
              Introduction	to	the	Pneumatic	Valve	    witches to the valve to indicate whether the valve
              Range                                   is in the open or closed position. Please refer to
              • 3 bar air supply to open              the order codes as to whether or not the valve
              • Spring closed                         includes microswitches. If you have an existing
              • Demountable, all metal bonnet-seal    unswitched valve, upgrade kits are available to
              • Viton® or Chemraz® face seals         include the microswitch option.
              • Viton® or Chemraz® pneumatic seals
              • Microswitch options
              • Rotatable CF flange, Klein, ISO, or
                 unflanged port options




  158                                                                www.vgscienta.com
                                            Viton® and Chemraz® Pneumatic Valve,
                                            Range - VRDP, KRDP and KRKP Series
All	Viton	VRDP	Series

                                                         VRDP	Series	-	All	Seals	Viton®
	 	    	   	              	   Conduc-	 						 	 	 	                            	      B
                                                                                      	 akeout		 Shipping	 Valve	Plus	   Valve,	No		
	 	 lange	OD	
  F                     Tube	  tance	    	     	 	 	                           	      	 emp°C(1)	 Weight	 Microswitch	 Microswitch(*)	
                                                                                      T
	mm	 	 inch	             OD	 litre/sec	 A	    C	 	 D	                         E	    Open	 	 Closed	 kg	    Order	Code	 Order	Code
   Unflanged             41.3          34         58         136        70    65     140     150    2.5     ZVRPM40U         ZVRDP40U
  70           2.75      41.3          34         63     136        70        65     140     150    2.7     ZVRPM40R         ZVRDP40R
       SKF40             41.3          34         63     136        70        65     140     150    2.7     ZVRPM40K         ZVRDP40K
   Unflanged             63.5         100         97     197 114              76     140     150    7.0     ZVRPM60U         ZVRDP60U
 114           4.50      63.5         100         105    197 114              76     140     150    7.4     ZVRPM60R         ZVRDP60R
 ISO-K 63 flanges        63.5         100         103    197 114              76     140     150    7.4     ZVRPM60K         ZVRDP60K

All dimensions in mm unless otherwise stated.                                                                                                 UHV	
                                                                                                                                           Pneumatic	
(*) Valve does not include open / closed position microswitches as standard, please refer to relevant accessories section.                 Right	Angle
(1) Microswitches (if fitted) are not bakeable and must be removed before this temperature can be attained.                                   Valves




Chemraz®	and	Viton®	KRDP	Series

                                KRDP	Series	-	Valve	Seals	Chemraz®,	Pneumatic	Seals	Viton®
	 	    	   	             	   Conduc-	 						 	 	 	                            	      	Bakeout	 	  Shipping	 Valve	Plus	  Valve,	No		
	 	 lange	OD	
   F                   Tube	  tance	    	    	 	 	                            	      	 emp°C(1)	
                                                                                     T            Weight	 Microswitch	 Microswitch(*)	
	 mm	 	 inch	           OD	 litre/sec	 A	 C	 	 D	                            E	    Open	 	 Closed	 kg	      Order	Code	 Order	Code
   Unflanged            41.3          34          58    136         70       65     140      150    2.5     ZKRPM40U         ZKRDP40U
  70        2.75        41.3          34          63    136         70       65     140      150    2.7     ZKRPM40R         ZKRDP40R
       SKF40            41.3          34          63    136         70       65     140      150    2.7     ZKRPM40K         ZKRDP40K
   Unflanged            63.5        100           97    197        114 76           140      150    7.0     ZKRPM60U         ZKRDP60U
 114        4.50        63.5        100          105 197           114 76           140      150    7.4     ZKRPM60R         ZKRDP60R
 ISO-K 63 flanges       63.5        100          103 197           114 76           140      150    7.4     ZKRPM60K         ZKRDP60K
All dimensions in mm unless otherwise stated.
(*) Valve does not include open / closed position microswitches as standard, please refer to relevant accessories section.
(1) Microswitches (if fitted) are not bakeable and must be removed before this temperature can be attained.




All	Chemraz®	KRKP	Series

                                                        KRKP	Series	-	All	Seals	Chemraz®
	 	    	   	            	  Conduc-	 						 	                        	         	      	Bakeout		    Shipping	 Valve	Plus	  Valve,	No		
	 	 lange	OD	
   F                  Tube	 tance	 	        	                       	         	      	 emp°C(1)	
                                                                                     T             Weight	 Microswitch	 Microswitch(*)	
	 mm	 	 inch	          OD	 litre/sec	 A	   C	                      D	        E	    Open	 	 Closed	    kg	    Order	Code	 Order	Code
    Unflanged         41.3       34         58         136         70        65     200     200     2.5     ZKKPM40U         ZKRKP40U
  70           2.75   41.3       34         63         136         70        65     200     200     2.7     ZKKPM40R         ZKRKP40R
        SKF40         41.3       34         63         136         70        65     200     200     2.7     ZKKPM40K         ZKRKP40K
    Unflanged         63.5       100        97         197     114           76     200     200     7.0     ZKKPM60U         ZKRKP60U
  114          4.50   63.5       100        105        197     114           76     200     200     7.4     ZKKPM60R         ZKRKP60R
 ISO-K 63 flanges     63.5       100        103        197     114           76     200     200     7.4     ZKKPM60K         ZKRKP60K
All dimensions in mm unless otherwise stated.
(*) Valve does not include open / closed position microswitches as standard, please refer to relevant accessories section.
(1) Microswitches (if fitted) are not bakeable and must be removed before this temperature can be attained.
(†) Pneumatic cylinder uses Viton seals so it must not see a temperature higher than +150 °C, which is lower than the rest of the valve.




www.vgscienta.com                                                                                                                             159
              Spares and Accessories - VRDP KRDP and KRKP Series


               	                                  VRDP,	KRDP	and	KRKP	Series	-	Spares	and	Accessories
              	 Valve	          Face	      Bonnet	 Pneumatic	Microswitch	 Movement	                    	 lange	Mounting	Gaskets	
                                                                                                       F                          Nut	and	
              	 rder	Code	
              O                 Seals	      Seal	    Seals	      Kit	     Assembly(2)	              Copper	     Viton	 Aluminium	 Bolt	Kit
               ZVRDP40U       ZVR40VS      ZCU38      ZVR40VPS       ZVRMS40       ZVRDP40M
               ZVRDP40R       ZVR40VS      ZCU38      ZVR40VPS       ZVRMS40       ZVRDP40M          ZAL38          ZVIT38     ZAL38   ZM6B35
               ZVRDP40K       ZVR40VS      ZCU38      ZVR40VPS       ZVRMS40       ZVRDP40M             -           ZSKF40IR     -     ZSKF40C
               ZKRDP40U       ZKR40KS      ZCU38      ZVR40VPS       ZVRMS40       ZVRDP40M             -             -          -        -
               ZKRDP40R       ZKR40KS      ZCU38      ZVR40VPS       ZVRMS40       ZVRDP40M         ZCU38           ZVIT38     ZAL38   ZM6B35
               ZKRDP40K       ZKR40KS      ZCU38      ZVR40VPS       ZVRMS40       ZVRDP40M             -           ZSKF40IR     -     ZSKF40C
               ZKRKP40U       ZKR40KS      ZCU38      ZVR40KPS       ZVRMS40       ZVRDP40M             -             -          -        -
               ZKRKP40R       ZKR40KS      ZCU38      ZVR40KPS       ZVRMS40       ZVRDP40M         ZCU64           ZVIT64     ZAL64   ZM8B45
               ZKRKP40K       ZKR40KS      ZCU38      ZVR40KPS       ZVRMS40       ZVRDP40M             -             -          -        -
   UHV	        ZVRDP60U       ZVR60VS      ZCU64      ZVR60VPS       ZVRMS60       ZVRDP60M             -             -          -        -
Pneumatic	     ZVRDP60R       ZVR60VS      ZCU64      ZVR60VPS       ZVRMS60       ZVRDP60M         ZCU64           ZVIT64     ZAL64   ZM8B45
Right	Angle
   Valves      ZVRDP60K       ZVR60VS      ZCU64      ZVR60VPS       ZVRMS60       ZVRDP60M             -             -          -        -
               ZKRDP60U       ZKR60KS      ZCU64      ZVR60VPS       ZVRMS60       ZVRDP60M             -             -          -        -
               ZKRDP60R       ZKR60KS      ZCU64      ZVR60VPS       ZVRMS60       ZVRDP60M         ZCU64           ZVIT64     ZAL64   ZM8B45
               ZKRDP60K       ZKR60KS      ZCU64      ZVR60VPS       ZVRMS60       ZVRDP60M             -             -          -        -
               ZKRKP60U       ZKR60KS      ZCU64      ZVR60KPS       ZVRMS60       ZVRDP60M             -             -          -        -
               ZKRKP60R       ZKR60KS      ZCU64      ZVR60KPS       ZVRMS60       ZVRDP60M         ZCU64           ZVIT64     ZAL64   ZM8B45
               ZKRKP60K       ZKR60KS      ZCU64      ZVR60KPS       ZVRMS60       ZVRDP60M             -             -          -        -
              (1) Viton® seal as standard. If Chemraz® seal is required, this must be ordered as a separate item.




  160                                                                                                       www.vgscienta.com
         PTFE Viton® Sealed Pneumatic Valves - PRP Series

Introduction	to	PTFE	Valves
• Novel seat seal design - ideal for process
   automation
• Fully bakeable to 230 °C including actuator
   and limit switches
• Can be baked closed - seat seal will not stick
• Can be repeatedly cycled at temperature
• 50,000 cycles until first service
• Visual position indicator
• Limit switches fitted as standard
• Demountable all metal bonnet seal
• Viton® o-ring seat seal as standard,
   Chemraz® option available                                                                            PTFE/Viton
                                                                                                        Right	Angle
• Rotatable conflat, ISO, KF or unflanged                                                                  Valves
   versions available                                All dimensions in mm.
• Bellows sealed actuation

The PRP series of angle valves employ a novel,
patented, seat seal arrangement which allows
repeated operation and bakeout at high tempera-
ture (up to 230 ºC) without the associated risk of
the seat seal o-ring sticking or deforming. The
complete valve including the pneumatic actua-
tor and limit switch assembly is fully bakeable
without dismantling.

These valves are ideal for applications where
a fully bakeable automatic shut off valve is
required. Examples include loadlock pumping
on UHV systems, differential pumping lines for
electron and ion guns, and deposition systems        to operate the valve. The cylinder assembly
where the valve can be operated hot (heater tape     incorporates open and closed limit switches
or bakeout jacket) to minimise process gas or        as standard; a visual position indicator is also
by-product condensation.                             provided. The complete actuator mechanism is
                                                     demountable and can be removed and replaced
The pneumatic cylinder is single-acting and          with the valve body remaining bolted to the
requires a maximum inlet pressure of 4 bar           vacuum system.




www.vgscienta.com                                                                                          161
              PTFE Viton® Sealed Pneumatic Valves - PRP Series


              Viton®	Seat	Seal

                                                                PRP	Series	-	Viton®	Seat	Seal
               	 		    	                      	                 	             	        Open/Closed	   Shipping					        		
               Flange	OD	                   Tube	        Conductance		        	         Bakeout	      Weight	              	 																		
               mm	 inch	                     OD	             l.s-1	           A	           ºC	           kg	          Order	Code
                 70    2.75                 41.3              34             63             230           3             ZPRPV40R
                  KF40                      41.3              34             63             230           3             ZPRPV40K
              All dimensions in mm unless otherwise stated.


              Chemraz®	Seat	Seal

PTFE/Viton                                                    PRP	Series	-	Chemraz®	Seat	Seal
Right	Angle
   Valves
               	 		    	                     	                 	              	        Open/Closed	   Shipping					        		
               Flange	OD	                  Tube	        Conductance		         	         Bakeout	      Weight	              	 																		
               mm	 inch	                    OD	             l.s-1	           A	            ºC	           kg	          Order	Code
               	 70    2.75                 41.3              34             63            230            3             ZPRPC40R
                  KF40                      41.3              34             63            230            3            ZPRPC40K
              All dimensions in mm unless otherwise stated.




  162                                                                                             www.vgscienta.com
                   Viton® Manual Gas Handling Valves - GH Series

Introduction	to	the	Viton®	Manual	Gas	
Handling	Valves
• Small dead volume
• 10,000 cycle service life
• Can be panel mounted
• Operating pressure range from 1000 mbar
   to 10-11 mbar
• Bakeable to 140 °C open or closed
• Bellows sealed actuation

The GH series of right angle valves are designed
for applications where small dead volume is
required, making them ideal for gas inlet sys-                                                                                 Gas	
                                                                                                                             Handling
tems.                                                                                                                         Valves


The GH series of valves come with two diam-
eters of inlet tube, for high or low gas flows.




                                                GH	Series	Manual	Gas	Handling	Valves
	      	 Flange	OD	 	                 Tube		              					           	            	        Shipping	Weight	
	     mm	     	  inch	                 OD		               A	              C	           D	              kg	      Order	Code
            Unflanged                  6.4                37              39           38             1.0        ZGH7U
       34               1.33           6.4                38              39           38             1.0       ZGH97R
             SKF10                     6.4                39              39           38             1.0       ZGH97SK
            Unflanged                  14.3               33              39           38             1.0       ZGH14U
       34               1.33           14.3               38              39           38             1.0       ZGH914R
             SKF16                     14.3               49              39           38             1.0       ZGH14SK
All dimensions in mm unless otherwise stated.


Spares	and	Accessories	for	Viton®	Manual	Gas	Handling	Valves

                                                 GH	Series	-	Spares	and	Accessories
	     	      Spare	Viton®	                  	 Spare	Movement	 	      	            	         	
	  Valve	    Bonnet	and	                    	     Assembly	   	      	            		Mounting	Gaskets	 	        Nut	and	
	Order	Code	  Face	Seal	                  Metric	     	    Imperial	 	         Copper	 Viton®	 Aluminium	      Bolt	Kit
    ZGH7U           ZGH714VS           ZGH714MM                ZGH714MA          -          -          -           -
    ZGH97R          ZGH714VS           ZGH714MM                ZGH714MA        ZCU19   ZVIT19       ZAL19       ZM4B20
    ZGH97SK         ZGH714VS           ZGH714MM                ZGH714MA          -     ZSKF10IR        -       ZSKF10C
    ZGH14U          ZGH714VS           ZGH714MM                ZGH714MA          -          -          -           -
    ZGH914R         ZGH714VS           ZGH714MM                ZGH714MA        ZCU19   ZVIT19       ZAL19       ZM4B20
    ZGH14SK         ZGH714VS           ZGH714MM                ZGH714MA          -     ZSKF16IR        -       ZSKF10C



www.vgscienta.com                                                                                                             163
           All Metal Gas Handling Valves - CRT Series

                                                                                    Introduction	to	All	Metal	Gas	Handling	
                                                                                    Valves
                                                                                    The CRT series of valves are designed for
                                                                                    applications where small conductance and fast
                                                                                    action is required, making them ideal for gas
                                                                                    inlet systems. The CRT series of valves are avail-
                                                                                    able in both right angle (CRT7) and tee versions
                                                                                    (CRT7T).

                                                                                    The dead volume of the CRT7 is just 0.1 ml
                                                                                    and a toggle lever provides easy, reliable, and
                                                                                    very visible valve closure. Both the copper pad
  Gas	                                                                              and the knife edge can be replaced on the CRT7
Handling
 Valves                                                                             valve. The CR7 is only available as a right angle
                                                                                    version and uses the more common screw action
                                                                                    to open and close the valve. It must be returned
                                                                                    to the factory for pad and knife edge replace-
                                                                                    ment as it is a sealed unit and there are no user
                                                                                    serviceable internal parts.




           CRT7 and CRT7T series - lever. Dimension C is for toggle lever in        CR7 series - screwdrive.
           the open position.

                                                      CRT	Series	-	All	Metal	Gas	Handling	Valves
           		 	 	 	      	              	           	        													 	      	           	     											Bakeout		 Shipping	   	
           F
           	 lange	OD	 Tube		         Valve	 Conductance	 Closure	         						 	           	     					Temperature	°C	 Weight	
           m
           	 m	 	 inch	 OD	           Type	    litre/sec	 Method	         A	 B	              C	    D	 Open	 Closed	         kg	 Order	Code
              Unflanged     6.4    Right Angle      0.05     Toggle Lever      38      48 110      34      450   300      0.5   ZCRT7U
             34     1.33    6.4    Right Angle      0.05     Toggle Lever      40      48 110      34      450   300      0.5   ZCRT97R
              Unflanged     6.4        Tee          0.05     Toggle Lever      38      48 110      34      450   300      0.5   ZCRT7TU
             34     1.33    6.4        Tee          0.05     Toggle Lever      40      48 110      34      450   300      0.5   ZCRT97TR
             Unflanged      6.4    Right Angle      0.05     Drive Screw       37 N/A 36           25      450   300      0.5    ZCR7U
             34     1.33    6.4    Right Angle      0.05     Drive Screw       38 N/A 36           25      450   300      0.5   ZCR97R
           All dimensions in mm unless otherwise stated.




 164                                                                                                    www.vgscienta.com
                  All Metal Gas Handling Valves - CRT Series


                          CRT	Series	-	Spares	and	Accessories
	   Valve	      Repair	         	         Mounting	Gaskets	         	        Nut	and	
	 Order	Code	    Kit	        Copper	           Viton	           Aluminium	   Bolt	Kit
   ZCRT7U       ZCRT7RK         -                 -                 -           -
  ZCRT97R       ZCRT7RK      ZCU19             ZVIT19             ZAL19      ZM4B20
  ZCRT7TU       ZCRT7RK         -                 -                 -           -
  ZCRT97TR      ZCRT7RK      ZCU19             ZVIT19             ZAL19      ZM4B20
   ZCR7U           -            -                 -                 -           -
   ZCR97R          -         ZCU19             ZVIT19             ZAL19      ZM4B20




                                                                                          Gas	
                                                                                        Handling
                                                                                         Valves




www.vgscienta.com                                                                        165
              All Metal Right Angled Valves - CR and CRD Series

                                                                   can easily be removed and replaced, with the
                                                                   valve remaining bolted to the vacuum system. A
                                                                   standard copper gasket makes the bonnet seal.
                                                                   We would recommend that you use the CRD
                                                                   type demountable valves where it is difficult to
                                                                   remove the complete valve from the system or
                                                                   where the process or duty of the valve is harsh.

                                                                   The CR valve uses a replaceable copper pad, but
                                                                   the whole valve must first be removed from the
                                                                   system. The pad is then removed and replaced
                                                                   through the side port.
 All	Metal
Right	Angle
   Valves                                                          If a new movement or bellows assembly is
                                                                   required it must be returned to the factory.
              All	Metal	Right	Angled	Valves
              • High quality materials                             Both the CR and CRD valves can be shut off to
              • High build quality                                 a torque level or by aligning the indicator marks
              • Fully and repeatedly bakeable                      on the body and the top nut. A separate operat-
              • Good conductance                                   ing handle is included with the valve.
              • Leak rate less than 10-11 mbar ls-1
              • Pressure range from 10-12 mbar to 4 bar            Rotatable flanges are used on both valve axes
              • 10,000 cycles to first service                     allowing for complete valve alignment in any
              • Bellows sealed actuation                           mounting situation.

              Introduction	to	All	Metal	Right	Angled	
              Valves
                                                                   	          Closure	Torques	for	All	Metal	Valves
              This range of valves are of right angled configu-
                                                                   	             	                               Torque	
              ration, meaning that the inlet and outlet ports      	     Valve	Order	Code	                        Nm
              are at ninety degrees to each other. They are all              ZCRT7 Series                          N/A
              designed as heavy duty valves with a good con-                  ZCR7 Series                       0.7 to 1.1
              ductance and are available in a range of styles.         ZCR20 and ZCRD20 Series                  2.4 to 3.7
                                                                       ZCR40 and ZCRD40 Series                  7.7 to 12.1
              The bonnet (top) seal of the valve is either weld-       ZCR60 and ZCRD60 Series                 19.0 to 29.9
              ed (CR series) or demountable (CRD series). On                ZCSD32 Series                        21 to 33
              the CRD series the whole movement mechanism          To convert torque to imperial units use1 Nm = 142 oz ins.




  166                                                                                 www.vgscienta.com
       All Metal Manual Right Angled Valves - CR and CRD
                                                    Series




                                                                                                                                     All	Metal
                                                                                                                                    Right	Angle
ZCR series (welded).                                                    ZCRD series (demountable).                                     Valves




                                        All	Metal	Angle	Valves	-	CR	and	CRD	Series
 			 	 	           	          	           	             													     	     	      	 Bakeout	 	        Shipping	      	     	
 Flange	OD	      Tube		Conductance	       	             													     	     					Temperature	°C	       Weight	
 m
 	 m	 	 inch	     OD	    litre/sec	 Construction	       A	      B	        C	    D	 Open	 	 Closed	            kg	    Order	Code
  Unflanged       19.1        5         Welded         25       59       86     22    450            300     1.0      ZCR20U
 34      1.33     19.1        5         Welded         38       59       86     22    450            300     1.0      ZCR20R
  Unflanged       19.1        5       Demountable      25       59       86     34    450            300     1.0      ZCRD20U
 34      1.33     19.1        5       Demountable      38       59       86     34    450            300     1.0      ZCRD20R
  Unflanged       41.3       34         Welded         58       69       109    49    450            300     2.0      ZCR40U
 70      2.75     41.3       34         Welded         63       69       109    49    450            300     2.0      ZCR40R
 70      2.75     41.3       34         Welded         (*)      69       109    49    450            300     2.0      ZCR43R
  Unflanged       41.3       34       Demountable      58       69       109    70    450            300     2.2      ZCRD40U
 70      2.75     41.3       34       Demountable      63       69       109    70    450            300     2.2      ZCRD40R
 70      2.75     41.3       34       Demountable      100      69       109    70    450            300     2.2      ZCRD43R
  Unflanged       63.6      100         Welded         97      106       156    76    450            300     6.0      ZCR60U
 114     4.50     63.6      100         Welded         105     106       156    76    450            300     6.0      ZCR60R
  Unflanged       63.6      100       Demountable      97      106       156   114    450            300     6.6      ZCRD60U
 114     4.50     63.6      100       Demountable      105     106       156   114    450            300     6.6      ZCRD60R
All dimensions in mm unless otherwise stated.
(*) ZCR43R has "A"dimensions of 65 mm for the axial port and 57 mm for the radial port.




www.vgscienta.com                                                                                                                      167
              All Metal Right Angled Valves Spares and Accessories




 All	Metal
Right	Angle
   Valves



                                                          CR	and	CRD	Series	-	Spares	and	Accessories
              	     	     Valve	            	            	             	              	               	            						 	
              	 Valve	    Serial	         Spare	      Bonnet	        Tool	          Hand	                  	
                                                                                                  Movement								Mounting	Gaskets	    Nut	and	
              	 rder	Code	 		No	
              O                            Pad	        Seal	         Kit(1)	        Wheel	        Assembly	     Copper	 	     Viton	   Bolt	Kit
                 ZCR20U          All     ZCR20C           -        ZCR20TK              -               -              -        -         -
                 ZCR20R          All     ZCR20C           -        ZCR20TK              -               -            ZCU19   ZVIT19    ZM4B20
                ZCRD20U          All     ZCR20C        ZCU19       ZCR20TK              -         ZCRD20MA             -        -         -
                ZCRD20R          All     ZCR20C        ZCU19      ZCR20TK               -         ZCRD20MA           ZCU19   ZVIT19    ZM4B20
                 ZCR40U          All     ZCR40C           -        ZCR40TK         ZCRHW                -              -        -         -
                 ZCR40R          All     ZCR40C           -        ZCR40TK         ZCRHW                -            ZCU38   ZVIT38    ZM6B35
                ZCRD40U          All     ZCR40C        ZCU38       ZCR40TK         ZCRHW          ZCRD40MA             -        -         -
                ZCRD40R          All     ZCR40C        ZCU38       ZCR40TK         ZCRHW          ZCRD40MA           ZCU38   ZVIT38    ZM6B35
                 ZCR60U          All     ZCR60C           -        ZCR60TK         ZCRHW                -              -        -         -
                 ZCR60R          All     ZCR60C           -        ZCR60TK         ZCRHW                -            ZCU64   ZVIT64    ZM8B45
                ZCRD60U          All     ZCR60C        ZCU64       ZCR60TK         ZCRHW          ZCRD60MA             -        -         -
                ZCRD60R          All     ZCR60C        ZCU64       ZCR60TK         ZCRHW          ZCRD60MA           ZCU64   ZVIT64    ZM8B45
              (1) Tool kit contains all Allen keys, spanners, thread lubricant etc. required when servicing valve.




  168                                                                                                          www.vgscienta.com
    Repair and Replacement of Older Style CR and CRD
                                                Valves
There are a large number of the older style ver-
sions of the CR and CRD valves still in use. For
these valves VG Scienta offer a wide range of
spares and accessories, which are listed in the
table below. Please note that as some of these
spares are for very early versions their availability
is limited, or they may be on longer than normal
deliveries. When you wish to replace an existing
valve with a new version, the valve comparison
table shows the body dimensions to indicate the
major differences.

                                                                                                                               All	Metal
                                                                                                                              Right	Angle
                                                                                                                                 Valves



                                 Older	Style	CR	and	CRD	Valves	-	Repairs	and	Replacement
 F
 	 lange	OD	        Old	Valve	             Axial	           Radial											New	Valve	      Axial	       Radial	
 	 mm	             Order	Code	             Port	             Port	          Order	Code	      Port	         Port	      Notes
      34             ZCR914R                 38               38                ZCR20R         38             38
      70              ZCR38R                 65               57                ZCR40R         63             63        (1)
      70              ZCR38R                 63               63                ZCR40R         63             63        (1)
      70              ZCR38R                 65               57                ZCR43R         65             57        (2)
     114              ZCR64R                110               97                ZCR60R        105          105
      34            ZCRD919R                 38               38            ZCRD20R            38             38
      70             ZCRD38R                100               100           ZCRD40R            63             63        (1)
      70             ZCRD38R                100               100           ZCRD40R           100          100          (2)
     114             ZCRD64F                151               122           ZCRD60R           105          105

All dimensions in mm unless otherwise stated.
Table shows nearest neighbour equivalent or choice where possible.
(1) Alternative valve with different port dimensions.
(2) Alternative valve with identical port dimensions.



Spares	and	Accessories

                                  Older	Style	CR	and	CRD	valves	-	Spares	and	Accessories
 	 Valve	      Serial	             Spare	           Bonnet	          Service	         	 Mounting	Gaskets	 	    Nut	and	
 O
 	 rder	Code	 Number	               Pad	             Seal	             Kit	        Copper	   Viton	 Aluminium	 Bolt	kit
   ZCRD19            All             ZCRD19SK kit contain these parts              ZCU19    ZVIT19    ZAL19         ZM4B20
    ZCR38         > C8053        ZCR38CM              N/A             N/A          ZCU38    ZVIT38    ZAL38         ZM6B35
                  < C8053         ZCR38C              N/A             N/A          ZCU38    ZVIT38    ZAL38         ZM6B35
   ZCRD38         > D2614        ZCR38CM            ZCR38G            N/A          ZCU38    ZVIT38    ZAL38         ZM6B35
                  < D2614         ZCR38C            ZCR38G            N/A          ZCU38    ZVIT38    ZAL38         ZM6B35
    ZCR64         > C7802        ZCR64CM              N/A             N/A          ZCU64    ZVIT64    ZAL64         ZM8B45
                  < C7801         ZCR64C              N/A             N/A          ZCU64    ZVIT64    ZAL64         ZM8B45
   ZCRD64         > D2659        ZCR64CM            ZCR64G            N/A          ZCU64    ZVIT64    ZAL64         ZM8B45
                  < D2659         ZCR64C            ZCR64G            N/A          ZCU64    ZVIT64    ZAL64         ZM8B45
  ZCRD100            All        ZCRD100C          ZCRD100G            N/A          ZCU100   ZVIT100   ZAL100        ZM8B50
  ZCRD150            All        ZCRD150C          ZCRD150G            N/A          ZCU150   ZVIT150   ZAL150        ZM8B60




www.vgscienta.com                                                                                                                169
                All Metal Line-of-Sight Valve - CSD Series

                                                                                             Introduction	to	the	All	Metal	Line-of-	
                                                                                             Sight	Valve
                                                                                             This range of valve has a straight and clear
                                                                                             internal bore, which means that you can pass
                                                                                             objects or processes through the valve. This can
                                                                                             include anything from transfer mechanisms to
                                                                                             laser light.

                                                                                             The bonnet (top) seal of the valve is fully
                                                                                             demountable so that the whole movement mech-
                                                                                             anism can easily be removed and replaced with
                                                                                             the valve remaining bolted to the vacuum sys-
  All	Metal                                                                                  tem. A standard copper gasket makes the bonnet
Line-of-Sight
   Valves                                                                                    seal. The valve can then have its copper sealing
                                                                                             pad replaced when the operating mechanism
                                                                                             has been removed. The CSD valves can be shut
                                                                                             off to a torque level or by aligning the indicator
                                                                                             marks on the body and the top nut. A separate
                                                                                             operating handle is included with the valve.


                                                                                             	 MPORTANT	PRODUCT	INFORMATION
                                                                                             I
                                                                                             Spares and accessories - A full range of spares and
                                                                                             accessories is available for this and existing valves.
                                                                                             Please see the relevant tables in the spares and acces-
                                                                                             sories section. We can also offer a full factory repair
                                                                                             and reconditioning service for most generations of this
                                                                                             type of valve.



                                                                All	Metal	Line-of-Sight	Valves	-	CSD	Series
                	 	      	   			                												 	             	                  							 	         	Bakeout		 	  Shipping	
                	Flange	OD	  	                Valve			Conductance	         	                  	       								Temperature	°C	 Weight
                	mm	 inch	 Bore	              Type	       litre/sec	 Construction	           A1	 A2	 Open	 	 Closed	             kg	    Order	Code
                     Unflanged   29.0 Line-of-Sight            20        Demountable         109    55       450                 300       6.5           ZCSD32U
                  70     2.75 29.0 Line-of-Sight         20              Demountable         117    63       450                 300       6.7           ZCSD32R
                All dimension in mm unless otherwise stated.



                CSD	Series	Spares	and	Accessories

                 	      	           	             	                 C
                                                                    	 SD	Series	-	Spares	and	Accessories	                    	         	
                	  Valve	     Serial	                 Spare	         Bonnet	       Tool	           Movement	          	 ounting	Gaskets(2)	
                                                                                                                      M                      Nut	and		
                	Order	Code	 Number	                   Pad	           Seal	        Kit(1)	         Assembly	       Copper	 Viton	 Aluminium	 Bolt	kit
                      ZCSD32       > S2645        ZCR60C              ZCU64     ZCSD32TK           ZCSD32MA              -             -           -          -
                      ZCSD32       < S2645       NB-02174           ZCSD32G           -                  -          ZCU38 ZVIT38                 ZAL38     ZM6B35
                      ZCSD25       > S1239      ZCSD25CM            ZCSD25G           -                  -          ZCU38 ZVIT38                 ZAL38     ZM6B35
                      ZCSD25       < S1239       ZCSD25C             ZCSD25G          -                  -             ZCU38 ZVIT38              ZAL38     ZM6B35
                      ZCSD50            All      ZCSD50C             ZCSD50G          -                  -             ZCU64 ZVIT64              ZAL64     ZM8B45
                (1) Tool kit contains all allen keys, spanners, thread lubricant etc. required when servicing valve.




   170                                                                                                             www.vgscienta.com
                                                                                  Leak Valves

Introduction	to	Leak	Valves
• Argon processing
• Sputtering and sputter cleaning
• System purging
• Fine and ultra fine gas control
• Gas back-filling

Leak valves are used to very accurately control
the flow of gas into a vacuum system from an
external source. They utilise the basic sealing
principle of the all metal angle valve - namely a
softer metal pad forced against a harder metal
seat - but have two major differences. The first                                                          All	Metal
                                                                                                            Leak
is that the knife edge has a truncated profile that                                                        Valves
allows the passage of gas molecules to be care-
fully controlled as the sealing force is released.
The second is that the relative movement of the
knife edge and sealing pad can be very accurately     the properties of being able to both withstand
controlled. The VG Scienta all metal leak valve       hot or corrosive materials and make it capable
range use two different types of sealing material     of handling high inlet pressures of up to 10 bar.
to give the valve different properties.               The use of the diaphragm also minimises the
                                                      internal volume of the valve.
Ease	of	Maintenance
These valves are constructed for long life and        LVM	Series
low maintenance. The seal materials are designed      The LVM range offers unrivaled response and
to function well within their elastic limit. Should   repeatability over a wider dynamic range than
it become necessary to service any valve due to       has been previously available. This is achieved
contamination, for example, the replacement of        by the use of a novel new design of pad and
the main working parts is simple. VG Scienta          sealing face. The new design virtually eliminates
can also provide a factory servicing scheme for       hysteresis and has low internal volume to allow
damaged valves.                                       rapid clean up. Furthermore, the ultra fine con-
                                                      trol actuator fitted to the LVM valve enhances
The	MD5	Series                                        the performance to provide high sensitivity.
The first type (the MD5 series) uses a stellite-      Careful materials selection allows wide use and
faced knife edge and nickel diaphragm to make         high bakeout temperatures.
the UHV seal. These materials give this valve




www.vgscienta.com                                                                                           171
            All Metal Right Angled Leak Valves - MD5 Series

                                                                                   All	Metal	Right	Angled	Leak	Valves	MD5	
                                                                                   Series
                                                                                   • Valve can withstand hot or corrosive gases
                                                                                   • High inlet pressure (up to 10 bar)
                                                                                   • Low internal volume
                                                                                   • User serviceable
                                                                                   • Operating pressure range from 1 bar to 10-7
                                                                                      mbar
                                                                                   • Bakeable to 450 °C



All	Metal
  Leak
 Valves
            All dimensions in mm.                                                   All dimensions in mm.




            ZMD95                                                                  ZMD9538



                                                               All	Metal	Leak	Valves	MD5	Series
            	 	 	       	      	             O
                                             	 perating		            Open	             	
                                                                                Closed									Bakeout		    Shipping
            		Flange	OD	 Max	Inlet	          	Pressure	 	         Conductance		Leak	rate	      	Temp	ºC	     Weight	 A	       	
            	Axial	Radial	 Pressure	        Max	 	    Min	            ls-1	    mbar.l.s-1		 Open	 	 losed(2)	 kg	
                                                                                                   C                 mm	 Order	Code
            34T(1)      34     10 bar    1,000 mbar 10e-7 mbar          0.1         1 x 10-12     450       250   1.0   6.5   ZMD95
                                                          -7
              70        34     10 bar    1,000 mbar 10e mbar            0.1         1 x 10-12     450       250   1.0   18    ZMD9538
            (1) 34T indicates 34 mm OD tapped flange
            (2) Provided no internal part of the valve is exposed to atmosphere during bakeout.




 172                                                                                                    www.vgscienta.com
                      All Metal Right Angled Leak Valves - LVM Series

All	Metal	Right	Angled	Leak	Valves	LVM	
Series
• Inlet pressure up to 10 bar
• Fine control mechanism with minimum
   backlash
• Adjustable graduated index ring
• Wide dynamic range
• Available with range of mounting flanges
• User serviceable
• Stainless steel and copper alloys used
   throughout
• Operating pressure range from 10-11 mbar
• Bakeable to 450 ºC open                                                                                                                  All	Metal
                                                                                                                                             Leak
                                                                                                                                            Valves

                                                    Right	Angle	Leak	Valves	-	LVM	Series
	 	       	 							Tube	OD	         	          	           	      Open	 Leak	rate	       	 Bakeout	     Shipping	
		Flange	OD(2)	 Inlet	 Outlet		 ax	Inlet						Operating	Range	 Conductance	Closed						 emperature	°C(1)	Weight	
                              M                                                        T
	Axial	 Radial	 mm	 mm	 Pressure	 Max	                   Min	      l.s-1		 mbar.l.s-1	 Open	 	Closed	      kg	 Order	Code
	 34          34      6.4    14.0      10 bar   100 mbar    1 x 10-11 mbar      0.1      1 x 10-12   450          250   2.6     ZLVM940
                                                                      -11
     34R     34R      6.4    14.0      10 bar   100 mbar    1 x 10 mbar         0.1      1 x 10-12   450          250   2.6    ZLVM940R
     70       70      6.4    14.0      10 bar   100 mbar    1 x 10-11 mbar      0.1      1 x 10-12   450          250   2.6     ZLVM263
     70R     70R      6.4    14.0      10 bar   100 mbar    1 x 10-11 mbar      0.1      1 x 10-12   450          250   2.6     ZLVM263R
(1) Provided no internal part of the valve is exposed to atmosphere during bakeout.
(2) R indicates rotatable flange.


Equivalent	Valve	Chart
 	           Type	or																													Flange	Size	      	 																											Port	Length	mm	
 	          Supplier	               Inlet	OD	              Outlet	OD	                 Inlet	                Outlet	       Order	Code
            ZLVM940/R                34/34R                     34/34R                  40                        40
            ZLVM263/R                70/70R                     70/70R                  63                        63
           VG-ZMD96MR                  34R                       34R                    72                        67          ZLVM967
           VG-ZMD97R                   34R                       34R                    72                        67          ZLVM967
           VG-ZMD6MR                   70R                       70R                    72                        67          ZLVM267
            VG-ZMD7R                   70R                       70R                    72                        67          ZLVM267
             VARIAN                    34R                       70                     44                        33          ZLVM29
            BALZERS                    34R                       70                     44                        33          ZLVM29
              MDC                      34R                       70                     44                        33          ZLVM29
            LEYBOLD                     34                       34                     40                        40          ZLVM940



All	Metal	Right	Angled	Leak	Valves	LVM	Series	-	Typical	Performance	Curves




www.vgscienta.com                                                                                                                            173
            All Metal Right Angled Leak Valves - LVM Series

            All dimensions in mm.                                                   All dimensions in mm.




All	Metal
  Leak
 Valves
            ZLVM940 and ZLVM940R.                                                   ZLVM263 and ZLVM263R.


             	                	                  	              	              		
                                                      Spares	and	Accessories	LVM	and	MD	Series
             	  Valve	                   Valve	                  Service	                   	
                                                                                   Mounting												Mounting	Gaskets	                  Nut	and	
             	Order	Code	           Serial	Number	                 Kit	            Bracket	           Copper	     Viton	                  Bolt	Kit
                 ZLVM940/R                 All                 ZLVMDSK*                 -               ZCU19          ZVIT19             ZM4B20
                                      ZLVMPSK*                       -
                    All               ZLVMDSK*                       -
                 ZLVM263/R                                     ZLVMPSK*                 -               ZCU38          ZVIT38             ZM6B35
                  ZMD95                    All                  ZMD5SK                  -               ZCU19          ZVIT19                 -
                 ZMD9538                   All                  ZMD5SK                  -               ZCU19          ZVIT19             ZM4B20
                                                                                                        ZCU38          ZVIT38             ZM6B35
                 ZMD6MU             Up to MD2503                ZMD6SK               MD67B                  -              -                  -
                                  MD2504 to MD2605             ZMD6ASK               MD67B                  -              -                  -
                                  MD2606 and Beyond            ZMD6MSK               MD67B                  -              -                  -
                 ZMD96MR            Up to MD2503                ZMD6SK               MD67B              ZCU19          ZVIT19             ZM4B20
                                  MD2504 to MD2605             ZMD6ASK               MD67B              ZCU19          ZVIT19             ZM4B20
                                  MD2606 and Beyond            ZMD6MSK               MD67B              ZCU19          ZVIT19             ZM4B20
                  ZMD7U             Up to MD2544                ZMD7SK               MD67B                  -              -                  -
                                  MD2545 and Beyond            ZMD7MSK               MD67B                  -              -                  -
                 ZMD97R             Up to MD2544                ZMD7SK               MD67B              ZCU38          ZVIT38             ZM6B35
                                  MD2545 and Beyond            ZMD7MSK               MD67B              ZCU38          ZVIT38             ZM6B35
                  ZMD7R             Up to MD2544                ZMD7SK               MD67B                  -              -                  -
                                  MD2545 and Beyond            ZMD7MSK               MD67B                  -              -                  -

            * In most cases ZLVMPSK, which consists of the Pad Service Kit, will be sufficient for the repair. However in extreme cases where the valve
               has been severely damaged or is in a bad state of disrepair ZLVMDSK, which consists of an entire replacement diaphragm will be nec-
               essary.




 174                                                                                                    www.vgscienta.com
 All Metal Right Angled Valves - Motorised LVM Version

Introduction	to	Motorised	Precision	Leak	
Valves
• Remote control of system pressure
• Closed loop pressure control
• Ideal for precision gas dosing and mixing
• Control of etch guns for surface science
• Interfaces to standard pressure
  measurement and control equipment
• Excellent stability and precision control

The motorised version of the LVM precision
leak valve opens up a range of possibilities for
system pressure control. The motor and gearbox                                                               All	Metal
arrangement gives extremely precise adjustment;                                                                Leak
                                                                                                              Valves
this allows sophisticated control of system pres-
sure or gas mixing when used in conjunction          and provides versatile and precise closed loop
with suitable pressure measurement and control       pressure control. Full details of this controller
electronics. The motorised version of the valve      are given on pages 177 and 178. VG Scienta
will provide much finer resolution of pressure       have tested the motorised LVM and the pressure
control than that indicated by the typical per-      flow controller in conjunction with the IGC3
formance curves for the manual version of the        ionisation gauge controller and have found that
LVM.                                                 it gives stable and accurate control over a wide
                                                     range of pressure conditions. Contact the fac-
The motorised valve is supplied with the step-       tory for further information.
per motor and gearbox fitted; open and closed
limit switches are also provided. When used for
automated pressure control, it is recommended
that an additional shut-off valve is fitted in the                         Technical	Data
inlet system to allow complete isolation of the
                                                     Operating Pressure Range       100 mbar to 10-11 mbar
gas inlet from the vacuum chamber.
                                                     Open Conductance               0.1 l.s-1
The valve is suitable for both open and closed       Closed Leak Rate               10-12 mbar.l.s-1
loop control situations. For open loop control
a suitable stepper motor controller is required.     Bakeout Temperature            Open        450 ºC
Closed loop control requires the integration of a    (with motor etc. removed)      Closed      250 ºC
pressure measurement gauge controller (typical-      Motor                          4-phase stepper
ly an ionisation gauge) and a pressure controller.   Limit Switches                 Rated 24 VDC at 2A
The ZPFC1 Pressure flow controller has been          Recommended Controllers        Ionisation Gauge: IGC3
                                                                                    (also IGCI and IGC2)
specially developed to drive the motorised LVM




www.vgscienta.com                                                                                              175
            All Metal Right Angled Valves - Motorised LVM Version

            All dimensions in mm.




All	Metal
  Leak
 Valves




                                                                    Motorised	Leak	Valve
            	   	    									Tube	OD					Port	Length	     	      	 Operating				   			Open	           	
                                                                                                Closed									Bakeout	 Shipping	 	
            	Flange	OD(2)	Inlet	 	 utlet	 Inlet	Outlet	Max	Inlet	 			 Range	 	
                                  O                                               Conductance	Leak	Rate			Temp	°C	(1)	 Weight
                                                                                              	           	
            	Axial	Radial	 mm	 	mm		 mm	 mm	 Pressure	 Max	             	   Min	       l.s-1	  mbar.l.s-1	 Open		Closed	 kg	 Order	Code
                 34    34     6.4   14.0   40     40     10 bar 100 mbar 1 x 10-11 mbar        0.1    1 x 10-12    450    250     3.0     ZLV940M
                34R    34R    6.4   14.0   40     40     10 bar 100 mbar 1 x 10-11 mbar        0.1    1 x 10-12
                                                                                                                   450    250     3.0     ZLV940RM
                 70    70     6.4   14.0   63     63     10 bar 100 mbar 1 x 10-11 mbar        0.1    1 x 10-12    450    250     3.0     ZLV263M
                70R    70R    6.4   14.0   63     63     10 bar 100 mbar 1 x 10-11 mbar        0.1    1 x 10-12    450    250     3.0     ZLV263RM
                34R    34R    6.4   14.0   40     40     10 bar 100 mbar 1 x 10-11 mbar        0.1    1 x 10-12    450    250     3.0     ZLV967M
                                                                                 -11
                70R    70R    6.4   14.0   40     40     10 bar 100 mbar 1 x 10 mbar           0.1    1 x 10-12    450    250     3.0     ZLV267M
                 70    34R    6.4   14.0   63     63     10 bar 100 mbar 1 x 10-11 mbar        0.1    1 x 10-12    450    250     3.0     ZLV29M
                Pressure Flow Controller                                                                                                 ZLVMPFC(*)
            (1) Motor and limit switches removed.
            (2) R indicates rotatable flange.
            (*) Note the ZLVMPFC should be used in conjunction with the IGC3 Controller ZIGC1 ion gauge controller.



                                                                   Equivalent	Valve	Chart
                	    	                   	                            	
                                             														Flange	Size																						Port	Length,	mm		         Part	Code	for	Equivalent					
                	 Supplier	            Type	          Inlet	OD	 Outlet	OD	                  Inlet	       Outlet	          Motorised	LVM
                      VG            ZMD96MR              34R          34R                 72              67                    ZLV967M
                      VG             ZMD97R              34R          34R                 72              67                    ZLV967M
                      VG             ZMD6MR              70R           72                 67             70R                    ZLV267M
                      VG              ZMD7R              70R          70R                 72              67                    ZLV267M
                   VARIAN                                34R           70                 44              33                    ZLV29M
                  BALZERS                                34R           70                 44              33                    ZLV29M
                      MDC                                34R           70                 44              33                    ZLV29M
                  LEYBOLD                                34            34                 40              40                    ZLV940M




 176                                                                                                  www.vgscienta.com
  Pressure/Flow Controller ZPFC1(use with motorised
                                          leak valve)
Introduction	to	the	ZPFC1
• Upstream pressure control
• Control of gas to etch sources
• Sputtering systems
• Controller for use with VG Scienta LVM
   motorised leak valve
• Controller operates to maintain a constant
   pressure or flow in a vacuum system
• Accepts inputs from a wide range of
   pressure transducers
• Full PID control
• Front panel control of input range control
   loop tuning                                                                                             Pressure/Flow
                                                                                                              Control
• Automatic and manual valve control                                                                          Valves
• External signals can be used to command
   the set point or to open or close the valve
• Open/close lights indicate when the valve is        vide the control feedback; however flow can be
   fully opened or closed                             controlled instead of pressure if a suitable mass
• Error meter indicates the difference                flow controller is used as the feedback element.
   between the set point and the actual pres-
   sure or flow                                       The controller has been optimised for the drive
• Operates from 115 or 230 VAC mains                  system used on the LVM motorised valve. The
   supply                                             controller will accept pressure inputs from a
                                                      wide variety of transducers and controllers;
The ZPFC1 pressure/flow controller has been           front panel control allows the input range to be
designed to operate with the VG Scienta’s             selected from 0.1 V, 1.0 V or 10.0 V full scale.
LVM series of motorised leak valves. The              Further front panel controls select manual or
ZPFC1 pressure flow controller has been spe-          automatic operation and also permit tuning of
cially developed to drive the motorised LVM           the control loop. External inputs can be used to
and provides versatile and precise closed loop        provide the pressure set point and to open or
pressure control. It can be used in conjunction       close the valve.
with a motorised LVM and suitable pressure
measuring equipment (for example the IGC3             The ZPFC1 controller takes the DC signal from
gauge controller) to maintain a constant pressure     the pressure transducer and compares it to the
or flow in a vacuum system.                           given set point. The valve is then driven so as to
                                                      minimise the error between the actual pressure
The pressure or flow is controlled by varying         and the set pressure. The controller uses full
the conductance of the valve. In most systems         PID control functions to maintain an accurate
it will be the system pressure that is used to pro-   and responsive control of the system pressure.




www.vgscienta.com                                                                                              177
                Pressure Flow Controller ZPFC1




                                                                                 The ZPFC1 controller is supplied with a 3m cable for connection
                                                                                 to the VG Scienta LVM series of motorised valves. A mains cable
                                                                                 is also supplied.
                Dimensions in inches (mm in brackets)



Pressure/Flow    	      Item	Description	                                                                                      Order	Code
   Control           Pressure/Flow Controller                                                                                    ZLVMPFC
   Valves



                                        Technical	Data                                                  Technical	Data
                                         Dimensions                                             Front	Panel	Controls	continued
                 Front Panel                    2U (240mm) half width             VALVE MODE                    CLOSE - valve drives closed
                 Rack Insertion Depth           300 mm approximately                                            MANUAL - valve controlled
                                                                                                                by the OPEN/CLOSE switch
                                                including connectors                                            SS - soft start position
                 Chassis Width                  203 mm behind front panel                                       AUTO - maintain set point
                                                                                                                EXT - operates in auto mode
                 Unit Weight                    2.5 kg
                                                                                  OPEN/CLOSED                   Lights indicate the valve posi-
                 Shipping Weight                5.0 kg approximately
                                                                                                                tion
                                                                                  ERROR METER                   Indicates difference between
                                   Front	Panel	Controls                                                         set point and actual pressure
                 ON/POWER                       Control AC power - LED            SET POINT                     Setpoint input
                                                indicates that power is on
                 INT/EXT                        Selects internal (front panel)                       Rear	Panel	Controls
                                                set point control or external
                                                                                  LINE CORD                     AC Power Input
                                                set point voltage
                                                                                  VOLTAGE SELECTOR              Sets input voltage
                 10V/1.0V/0.1V                  Selects full scale transducer
                                                input                             FUSE                          Both sides of the AC input
                                                                                                                are fused
                 Z(ZERO)                        Allows for transducer zero
                                                offset errors                     VALVE CONNECTOR               15-pin D connector to valve
                 SPAN                           Allows precise adjustment of      INTERFACE                     External inputs etc.
                                                the input voltage                 INPUT                         Input pressure signal
                 PHASE LEAD                     Allows for compensation of
                                                the major lag in the control                                General
                                                system
                                                                                  Operating Temperature         0 °C to 40 °C
                 GAIN                           Determines the overall con-
                                                                                  Supply Voltage                100-120 VAC nominal 50/60 Hz
                                                trol loop gain
                                                                                                                220-240 VAC nominal 50/60 Hz
                 OPEN/CLOSE                     Allows manual override of
                                                                                  Power Consumption             60 VA maximum
                                                the set point to either the
                                                open or closed position           Ventilation                   Sufficient air circulation is
                                                                                                                required




   178                                                                                              www.vgscienta.com

								
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