Microchip for Drug Delivery
Ramille M. Capito
Leah Lucas
ME 395 MEMS Spring 2000
Presentation Outline
I. Introduction: Why the use of a microchip?
II. Microchip Design/Microfabrication
III. Gold Dissolution
IV. Circuit Design
V. Power Source
VI. Conclusions
Drug Delivery
Very important aspect of medical treatment.
Drug effectiveness directly related to the way in
which drugs are administered
--can make it very difficult to select the proper
drug delivery system.
Some therapies require that the drug be repeatedly
administered to the patient over a long period of
time, or in specific amounts at a time in order to
maximize drug effectiveness.
Problems with Current Methods
of Drug Delivery
In many cases, patients often forget, are
unwilling, or are unable to take their medication
Some drugs too potent for systemic drug
delivery (intravenous) and may cause
more harm than good
Great advantage: a drug delivery device that is
capable of controlled, pulsatile or continuous
release of a wide variety of drugs and other
therapeutics that can be safely implanted inside
the body
Other Drug Delivery Systems Attempting
to Control Drug Release
Polymeric devices:
Problem: too simple to have the
ability to precisely control the
amount or rate of drug released.
Electromechanically driven devices:
Problem: miniature power-driven
mechanical parts required to either
retract, dispense, or pump in order
to deliver drugs in the body
complicated and are subject to
breakdown (i.e. fatigue or fracture).
--complexity and size restrictions
unsuitable to deliver more than a few
drugs or drug mixtures at a time.
What is Novel About this
Microchip?
It is the first device of its kind
enabling the storage of one or more
compounds inside of the microchip in
any form (solid, liquid, or gel), with the
release of the compounds achieved on
demand and with no moving parts.
Microchip Design
simple to use and manufacture Each reservoir is capped
with a conductive membrane
biocompatible and small (i.e. gold) and wired with the
enough to be implantable final circuitry controlled by a
in the human body microprocessor.
A strong, non-
degradable, easily
etched substrate that is
impermeable to the
delivered chemicals
and non-degradable to
the surrounding
environment within the The substrate contains multiple reservoirs
body is silicon. capable of holding chemicals in the solid, liquid, or
gel form.
delivery of drugs for weeks or years at a time
varying dosages—should release substances in
a controlled dependable manner
Microfabrication Process
1.) Deposit layer of insulating
material, silicon nitride (0.12 mm),
onto the substrate by PECVD
2.) Pattern by photolithography and
square reservoirs are etched by ECR-
enhanced RIE
3.) With potassium hydroxide solution
at 85C, anisotropically etch square
pyramidal reservoirs into the silicon
along the (111) crystal
4.) Invert and deposit gold electrodes
(0.3-0.5 mm thick). Pattern by E-
beam evaporation and liftoff.
5.) Deposit electrode protective
coating, silicon dioxide, by PECVD.
Silicon dioxide over anode, cathode and
bonding pads are etched with ECR-
enhanced RIE to expose gold film.
6.) Remove SiN layer in the inside
of reservoir by RIE to expose gold
membrane.
7.) Fill reservoirs by inkjet printing
through opening (500 mm x 500 mm)
Reservoir Filling
PV = nRT
Substrate
Vapor
Bubble Heater
Drug
Microfabrication Process (cont’d)
8.) Bottom of reservoirs capped
with a silicon nitride coating
9.) Device can now be patterned
with IC control circuitry and thin-
film battery.
Why the Gold Membrane?
is chosen as the model membrane material:
It is easily deposited and patterned
Gold has a low reactivity with other substances and resists spontaneous
corrosion in many solutions over the entire pH range.
The presence of a small amount of chloride ion creates an electric potential
region which favors the formation of soluble gold chloride complexes.
Holding the anode potential in this corrosion region enables reproducible
gold dissolution.
--Potentials below this region are too low to cause appreciable corrosion,
whereas potentials above this region result in gas evolution and formation of
a passivating gold oxide layer that causes corrosion to slow or stop.
Gold has also been shown to be a biocompatible material.