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Chromerge_Cleaning_Solution_SOP

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					11/06/2006

       Chromerge Cleaning Solution

       Chemical Standard Operating Procedure
       Matt Jazwiecki

Chromerge cleaning solution can be used to clean organic contaminants from glass,
alumina, and aluminum nitride substrates.

1. Material Requirements:
   1.1. Equipment needed need for process:
       1.1.1. Standard plastic (Teflon®, Nalgene®, or PTFE) labware jar with tight
              fitting lid.
       1.1.2. Plastic (Teflon®, Nalgene®, or PTFE) wafer holder.

   1.2. Chemicals needed for process:
       1.2.1. One bottle (25 mL) of Chromerge Concentrated Labware Cleaner (CCLC
              from this point forward) (Fisher Scientific Catalog #C577-12), which
              contains 50% water and 50% chromic acid by volume (CAS# 7738-94-5).
       1.2.2. One bottle (2.5 L) of Sulfuric Acid (CAS# 7664-93-9).

   1.3. Hazards associated with all chemicals:
       1.3.1. Health Rating (Lewis): Once the two chemicals are mixed together the
               hazards of the solution will be different than the individual component
               chemicals
           1.3.1.1. CCLC: n/a
           1.3.1.2. Sulfuric Acid: 3
       1.3.2. Symptoms (MSDS):
               1.3.2.1. Skin:
               1.3.2.1.1. CCLC: irritation with burning pain, and redness.
               1.3.2.1.2. Sulfuric Acid: redness, pain, and severe burns.
               1.3.2.2. Eyes:
               1.3.2.2.1. CCLC: severe irritation, and possible eye burns.
               1.3.2.2.2. Sulfuric Acid: corrosive; may cause blurred vision, redness,
                          pain, severe tissue burns, and blindness.
               1.3.2.3. Inhalation:
               1.3.2.3.1. CCLC: irritation of respiratory tract with burning pain in the
                          nose and throat, coughing, wheezing, shortness of breath, and
                          pulmonary edema.
               1.3.2.3.2. Sulfuric Acid: irritation of the respiratory tract with burning
                          pain in the nose and throat, labored breathing, and pulmonary
                          edema.

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        1.3.2.4. Ingestion:
        1.3.2.4.1. CCLC: irritation of the gastrointestinal tract with nausea,
                     vomiting, and possible burns. May cause liver and kidney
                     damage.
        1.3.2.4.2. Sulfuric Acid: severe burning of the mouth, throat, and
                     stomach leading to death.
        1.3.2.5. Chronic exposure:
        1.3.2.5.1. CCLC: may cause nosebleeds, nasal congestion, dermatitis
                     and/or skin ulceration, lung cancer, and gastrointestinal tract
                     tumors.
        1.3.2.5.2. Sulfuric Acid: long term exposure to vapors or mist may cause
                     damage to teeth. Cancer hazard.
1.3.3. NFPA Hazard Classification (MSDS):
        1.3.3.1. Fire:
        1.3.3.1.1. CCLC: 0
        1.3.3.1.2. Sulfuric Acid: 0
        1.3.3.2. Health:
        1.3.3.2.1. CCLC: 3
        1.3.3.2.2. Sulfuric Acid: 3
        1.3.3.3. Reactivity:
        1.3.3.3.1. CCLC: 1
        1.3.3.3.2. Sulfuric Acid: 3
        1.3.3.4. Specific Hazard:
        1.3.3.4.1. CCLC: none listed
        1.3.3.4.2. Sulfuric Acid: W
1.3.4. Safety Profile (Lewis):
    1.3.4.1. CCLC: there is no specific profile listed.
    1.3.4.2. Sulfuric Acid: Human poison by unspecified route. Experimental
             poison by inhalation. Moderately toxic by ingestion. A severe eye
             irritant. Extremely irritating, corrosive and toxic to tissue, resulting
             in rapid destruction of tissue causing severe burns. If much skin is
             involved, exposure is accompanied by shock, collapse, and symptoms
             similar to those of severe burns. Repeated contact with dilute
             solutions can cause dermatitis and repeated or prolonged inhalation of
             a mist of sulfuric acid can cause inflammation of the upper
             respiratory tract, leading to chronic bronchitis. This is a very
             powerful acidic oxidizer that can ignite or explode on contact with
             many materials. When heated it emits highly toxic fumes; will react
             with water or steam to produce heat; can react with oxidizing or
             reducing materials. When heated to decomposition it emits toxic
             fumes of SOx.
1.3.5. MIOSHA PEL:
    1.3.5.1. CCLC: none listed.
    1.3.5.2. Sulfuric Acid: TWA is 1 mg/m3.
1.3.6. OSHA PEL (Lewis):

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           1.3.6.1. CCLC: none listed
           1.3.6.2. Sulfuric Acid: TWA is 1 mg/m3
       1.3.7. ACGIH TLV (Lewis):
           1.3.7.1. CCLC: TWA is 0.05 mg/m3 (as Cr)
           1.3.7.2. Sulfuric Acid: TWA is 1 mg/m3, STEL is 3 ppm

   1.4. Engineering controls:
       1.4.1. Conducted at the acid bench in the GaAs bay.

   1.5. Administrative controls:
       1.5.1. No additional controls are needed beyond those implemented in the
              chemical hygiene plan (CHP).
       1.5.2. Chromerge Cleaning Solution is purchased as a non-premixed solution.
              However, it is mixed in the lab in a large quantity (2.5 L) and any unused
              but already mixed quantities will be stored in the acid (corrosive) cabinet.

   1.6. Protective equipment needed:
       1.6.1. Trionic gloves worn over latex gloves, apron, and face shield are required
              to be worn while mixing or using Chromerge Cleaning Solution.

2. Procedure:
   2.1. Use of Chromerge Cleaning Solution
       2.1.1. Chromerge Cleaning Solution is hydroscopic and will absorb water from
               the air. As the solution ages and absorbs more water, it will lose its
               effectiveness. The solution should be discarded (see Section 4) when a
               greenish tint is visible.
       2.1.2. A small “in-use” quantity will be kept in a tight lidded plastic (Teflon ®,
               Nalgene®, or PTFE) container in the GaAs bay acid bench. If this solution
               is expired (indicated by color change), then properly dispose of waste (see
               Section 4), and check the acid cabinet for any mixed Chromerge Cleaning
               Solution. If there is no mixed solution, follow Section 2.2 for mixing
               procedure.
       2.1.3. Be sure that all wafers and wafer holders are completely dry before being
               dipped into the Chromerge Cleaning Solution to maximize the solution
               lifetime.
       2.1.4. Dip wafers into Chromerge Cleaning Solution and slowly move the wafer
               holder in a circular motion.
           2.1.4.1. For glass wafers, the recommended cleaning time is 3 minutes.
           2.1.4.2. For ceramic wafers, the recommended cleaning time is 2 minutes.
       2.1.5. Rinse wafers in the cascade rinse tank until the resistivity of the rinse
               water reaches 16 M·cm.
   2.2. Mixing Chromerge Cleaning Solution
       2.2.1. Pour one entire bottle (25 mL) of CCLC into one entire bottle (2.5 L)
               sulfuric acid.


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       2.2.2. Place 2.5 L bottle cap back on bottle, and gently shake until all particles
              are dissolved.
       2.2.3. Using black marker, cross out the sulfuric acid label. Fill out proper
              chemical label with “Chromerge Cleaning Solution” and “Use Until
              Gone,” and affix label to bottle.
       2.2.4. Follow proper procedure to dispose of the empty 25 mL bottle of CCLC.
       2.2.5. Store any unused quantity of mixed Chromerge Cleaning Solution in the
              acid cabinet.

3. Storage:
   3.1. Unused Chromerge Cleaning Solution is stored in the acid (corrosive) cabinet.
   3.2. Expired (or waste) Chromerge Cleaning Solution is stored in the acid (corrosive)
        cabinet.

4. Waste Products:
   4.1. Expired Chromerge Cleaning Solution must be poured into a properly labeled
        waste bottle. Never pour large quantities of waste down the drain for
        neutralization.
   4.2. The waste bottle is kept in the acid (corrosive) cabinet. If no waste bottle is
        present, one can be made by properly labeling an empty sulfuric bottle (generated
        from general lab use). Use the proper waste label found in the general lab supply
        rack near the acid/base/oxidizer/solvent storage cabinets.
   4.3. Use a funnel when pouring expired solutions into the waste bottle to minimize
        the chances of spilling. The funnel can be rinsed in the acid hood sink.

5. Accident Procedures:
   5.1. Contact
        5.1.1. Skin
           5.1.1.1. CLCC: Get medical aid immediately. Immediately flush skin with
                    plenty of water for at least 15 minutes while removing contaminated
                    clothing and shoes. Contact staff member immediately.
           5.1.1.2. Sulfuric Acid: Immediately flush skin with plenty of water for at
                    least 15 minutes. Contact staff member immediately.
        5.1.2. Eyes
           5.1.2.1. CLCC: Get medical aid immediately. Immediately flush with plenty
                    of water for at least 15 minutes, occasionally lifting the upper and
                    lower eyelids. Contact staff member immediately.
           5.1.2.2. Sulfuric Acid: Immediately flush with plenty of water for at least 15
                    minutes, occasionally lifting the upper and lower eyelids. Contact
                    staff member immediately.
        5.1.3. Inhalation
           5.1.3.1. CLCC and Sulfuric Acid: Get medical aid immediately. Remove
                    from exposure and move to fresh air immediately. If not breathing,
                    give artificial respiration. If breathing difficult, give oxygen. Contact
                    staff member immediately.

                                        Page 4 of 5
     5.1.4. Ingestion
        5.1.4.1. CLCC: Get medical aid immediately. Do NOT induce vomiting. If
                 conscious and alert, rinse mouth and drink 2-4 cupfuls of milk or
                 water. Contact staff member immediately.
        5.1.4.2. Sulfuric Acid: Do NOT induce vomiting. If conscious and alert,
                 rinse mouth and drink large quantities of water. Contact staff
                 member immediately.
5.2. Spill
    5.2.1. CLCC: Absorb spill with inert material (e.g. vermiculite, sand, or earth),
            then place in a suitable container. Avoid runoff into storm sewers and
            ditches which lead to waterways. Provide ventilation.
    5.2.2. Sulfuric Acid: Ventilate area. Neutralize with alkaline material (e.g. soda
            ash, lime) then absorb with inert material (e.g. vermiculite, sand, or earth),
            then place in a suitable container. Do absorb with a combustible material
            like sawdust. Do not flush to sewer.
5.3. Fire
    5.3.1. CLCC: Substance is nonflammable; use agent most appropriate to
            extinguish surrounding fire. Approach fire upwind to avoid hazardous
            vapors and toxic decomposition products. Runoff from fire control or
            dilution water may cause pollution.
    5.3.2. Sulfuric Acid: Substance is nonflammable; use agent most appropriate to
            extinguish surrounding fire. Contact with water can cause violent
            liberation of heat and splattering of material. Contact with metals may
            evolve flammable hydrogen gas. Approach fire upwind to avoid
            hazardous vapors and toxic decomposition products. Strong dehydrating
            agent, which may cause ignition of finely divided materials on contact.
            Oxides of sulfur may be produced in fire. Runoff from fire control or
            dilution water may cause pollution.

   Report all accidents (injuries, spills, fires) to the SSEL On Call or other
    SSEL staff. For emergencies during non-business hours, call the SSEL
    Emergency Response Team at (734) 764-4127 or Department of Public Safety
    at (734) 763-1131.




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